• Title/Summary/Keyword: Multi-step process

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Filling the Submicron Contact Holes with Al Alloys (AI 합금의 Contact Hole Filling 에 관한 연구)

  • 김용길
    • Journal of the Korean Vacuum Society
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    • v.2 no.4
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    • pp.474-479
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    • 1993
  • Submicron contact hole filling with aluminum alloys has been achieved with a multistep metallization method, which utilizes a metal " flow" or self-diffusion process at elevated temperatures after the metal was sputter-deposited. A multi-chamber, modular sputtering system was employed to deposit aluminum alloys and subsequently to anneal the deposited metal films under vacuum at high temperatures. The film were deposited on 200 mm wafers with planar, dc magnetron sputtering sources without anysubstrate bias. The basic process steps studied for the multistep metallization include an initial layer deposition at low temperatures less than $100^{\circ}C$, and an annealin gstep at elevated temperatures, between 450 and $550^{\circ}C$. The degree of planarization or step coverage was dependent strongly upon the temperature and time of the flow step and complete filling of the submicron contacts with aluminum alloys was achieved. Responsible mechanisms for the enhancement in step coverge and factros determining uniform and reproducible flow of aluminum alloys during the high temperauture step are discussed.discussed.

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Process Modification and Numerical Simulation for an Outer Race of a CV Joint using Multi-Stage Cold Forging (등속조인트용 외륜의 다단 냉간 단조공정을 위한 공정개선 및 유한요소 해석)

  • Kang, B.S.;Ku, T.W.
    • Transactions of Materials Processing
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    • v.23 no.4
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    • pp.211-220
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    • 2014
  • The outer race of a constant velocity (CV) joint having six inner ball grooves has traditionally been manufactured by multi-stage warm forging, which includes forward extrusion, upsetting, backward extrusions, necking, ironing and sizing, and machining. In the current study, a multi-stage cold forging process is examined and an assessment for replacing and modifying the conventional multi-stage warm forging is made. The proposed procedure is simplified to the backward extrusion of the conventional process, and the sizing and necking are combined into a single sizing-necking step. Thus, the forging surface of the six ball grooves can be obtained without additional machining. To verify the suitability of the proposed process, a 3-dimensional numerical simulation on each operation was performed. The forging loads were also predicted. In addition, a structural integrity evaluation for the tools was carried out. Based on the results, it is shown that the dimensional requirements of the outer race can be well met.

Three-Dimensional Microstructures Fabricated by Multi-Step Electrochemical Aluminum-Foil Etching (알루미늄 박판의 다단 전해식각 공정을 이용한 3 차원 마이크로 구조물의 제작)

  • Kim, Yoon-Ji;Youn, Se-Chan;Han, Won;Cho, Young-Ho;Park, Ho-Joon;Chang, Byeung-Gyu;Oh, Yong-Soo
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.34 no.12
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    • pp.1805-1810
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    • 2010
  • We present a simple, cost-effective, and fast fabrication process for three-dimensional (3D) microstructures; this process is based on multi-step electrochemical etching of metal foils which facilitates the mass production of 3D microstructures. Compared to electroplating, this process maintains uniform and well-controlled material properties of the microstructure. In the experimental study, we perform single-step electrochemical etching of aluminum foils for the fabrication of 2D cantilever arrays. In the single-step etching, the depth etch rate and bias etch rate are measured as $1.50{\pm}0.10 {\mu}m/min$ and $0.77{\pm}0.03 {\mu}m/min$, respectively. Using the results of single-step etching, we perform two-step electrochemical etching for 3D microstructures with probe tips on cantilevers. The errors in height and lateral fabrication in the case of the fabricated structures are $15.5{\pm}5.8% $ and $3.3{\pm}0.9%$, respectively; the surface roughness is $37.4{\pm}9.6nm$.

A Study on the Methods of the Poetic Association in Steven Holl's Architecture (스티븐 홀의 건축에 나타난 시적연상방식 연구)

  • Park, Young-Ho
    • Korean Institute of Interior Design Journal
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    • v.25 no.6
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    • pp.149-157
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    • 2016
  • The purpose of this study aims to investigate the characteristics of architectural association methods which apply Hall's poetic concept by looking into how Hall extracts languages and images under what circumstances and by analyzing how the extracted elements are integrated into an architectural space through what association processes. First of all, poetic association functions in the architectural process are compared, and the value of using visual associations in architectural designs are investigated based on the results of the analysis. Next, Steven Holl's poetic concept is investigated in the context of the concept extraction step, the idea expansion step, and the space composition step in order to find out how such association methods work in the process of architectural designs. The methods of reproducing, changing and using Steven Holl's poetic concept can be summarized as follows in relation with experiential associations, multi-meaning associations and morphology associations: 1) Steven Holl's experiential associations are a method of expressing perceived images in the form of languages in the process of interpreting land and programs. This method has the characteristics of reproducing various architectural ideas by generating a relationship between invisible characteristics of land in images and languages. 2) Steven Holl's multi-meaning associations are a method of directly associating a project with related objects and incidents, or of coming up with a hidden meaning. It has the characteristics of changing ambiguous images of metaphoric, figurative or ironic languages into concrete architectural images. 3) Steven Holl's morphology associations is a method of expressing morphology images and languages which are directly related to the images. Morphology associations have the characteristics of regenerating sensory experience elements into languages or images, which can be seen experiential associations; or they use metaphoric images in architecture by substituting them with other architectural elements, which can be seen in multi-meaning associations.

Development of a Web-Based Solution Builder for Three-Step Decision Support System

  • Hwang, Heung-Suk
    • Industrial Engineering and Management Systems
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    • v.1 no.1
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    • pp.58-63
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    • 2002
  • Recently a new multi-attribute analysis method is one of the evident areas of important points in the decision support system analysis. The area of decision support system may be broken into three primary area: idea generation, multi-attribute structured analysis method, and the integration of the results of analysis. This research developed an internet/intranet-based solution builder for a three-step decision support system in the view of 1) brainstorming for the idea generation, 2) analytic hierarchy process as a multi-attribute structured analysis method and 3) aggregating logic model to integrate the results of individual analysis. A computer program is developed and demonstrated in internet/intranet-based decision problem. This solution builder provides decision makers a good tool for remote group decision making.

Development of a Design System for Multi-Stage Gear Drives (2nd Report: Development of a Generalized New Design Algorithm) (다단 치차장치 설계 시스템 개발에 관한 연구(제 2보: 일반화된 신설계 알고리즘의 개발))

  • Chong, Tae-Hyong;Bae, In-Ho;Park, Gyung-Jin
    • Journal of the Korean Society for Precision Engineering
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    • v.17 no.10
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    • pp.192-199
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    • 2000
  • The design of multi-stage gear drives is a time-consuming process because it includes more complicated problems, which are not considered in the design of single-stage gear drives. The designer has no determine the number of reduction stages and the gear ratios of each reduction stage. In addition, the design problems include not only dimensional design but also configuration design of gear drive elements. There is no definite rule or principle for these types of design problems. Thus the design practices largely depend on the sense and the experiences of the designer, and consequently result in undesirable design solution. A new and generalized design algorithm has been proposed to support the designer at the preliminary phase of the design of multi-stage gear drives. The proposed design algorithm automates the design process by integrating the dimensional design and the configuration design process. The algorithm consists of four steps. In the first step, the user determines the number of reduction stages. In the second step, gear ratios of every stage are chosen using the random search method. The values of the basic design parameters of a gear are chose in the third step by using the generate and test method. Then the values of the dimensions, such as pitch diameter, outer diameter and face width, are calculated for the configuration design in the next step. The strength and durability of each gear is guaranteed by the bending strength and the pitting resistance rating practices by using AGMA rating formulas. In the final step, the configuration design is carried out using simulated annealing algorithm. The positions of gears and shafts are determined to minimize the geometrical volume (size) of a gearbox while avoiding interferences between them. These steps are carried out iteratively until a desirable solution is acquired. The proposed design algorithm is applied to the preliminary design of four-stage gear drives in order to validate the availability. The design solution has considerably good results in both aspects of the dimensional and the configuration design.

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An XML-based Digital Mock-Up System for Heterogeneous Multi-CAD Assembly (XML을 이용한 이기종 CAD 조립체 DMU시스템의 설계)

  • Song, In-Ho;Chung, Sung-Chong
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.31 no.6 s.261
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    • pp.635-643
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    • 2007
  • As many engineers and technicians are involved in the design process of large scale and/or complex products, there are a lot of miss matches and interferences due to designers' faults and several kinds of CAD systems. Recently, CAD systems are applied to verify and check the assembly process. Digital Mock-Up(DMU) system, a tool to build a virtual mock-up in the design stage, has been used to prevent the interferences and miss matches during precision design processes. Using the virtual assembly tool, engineers are able to design precision and interference free parts without physical mock-ups. Instead of a single CAD source, several CAD systems are used to design a complex product. Several organizations are involved in the distributed design environment for heterogeneous multi-CAD assembly. XML and the lightweight CAD file are proposed for the multi-CAD assembly. XML data contains hierarchy of the heterogenenous multi-CAD assembly. STEP PDM schema and STEP ISO 10303-28 formations are applied to construct the XML data. The lightweight CAD file produced from various CAD files through ACIS kernel and InterOp not only contains mesn, B-Rep and topological data, but also is used to visualize CAD data and to verify dimensions. Developed system is executed on the desktop computers. It does not require commercial CAD systems to visualize 3D assembly data. Real-time interference and fitness checks, dimensional verification, and design and assembly verification are performed on the developed system. Assembly of heterogeneous models for a car is conducted to verify the effectiveness of the developed DMU system on the Internet.

Finite Element Analysis for Multi-stage Forging Process Design of Bolt with Nonaxisymmetric Washer Cam (비축대칭 와셔 캠 볼트의 다단 단조공정 설계를 위한 유한요소 해석)

  • Kim, Kwan-Woo;Kim, Yi-Tae;Kim, Wan-Jong;Cho, Hae-Yong
    • Journal of Advanced Marine Engineering and Technology
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    • v.32 no.4
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    • pp.585-595
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    • 2008
  • Process design of multi-stage forging for a bolt with nonaxisymmetric washer cam has been studied by using finite element method. For shape complexity of the bolt, it is impossible to manufacture in a single stage forging. To design multi-stage forging for the bolt the forging load and fiber flow of each step have been analyzed by using commercial finite element code DEFORM-3D. Simulated results have been compared with experimental ones. Multi-stage forging process has been designed with four stages. The workpiece should be eccentric shape until third forging stage. And then bolt head and washer of eccentrical shape is created in last stage. As a results, It was predicted that shape of product would be good and effective strain would be uniformly distributed in the product. Also, it was predicted whether defects would exist or not by reviewing the fiber flow.

Optimization of Incremental Sheet Forming Al5052 Using Response Surface Method (반응표면법을 이용한 Al5052 판재의 점진성형 최적화 연구)

  • Oh, S.H.;Xiao, X.;Kim, Y.S.
    • Transactions of Materials Processing
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    • v.30 no.1
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    • pp.27-34
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    • 2021
  • In this study, response surface method (RSM) was used in modeling and multi-objective optimization of the parameters of AA5052-H32 in incremental sheet forming (ISF). The goals of optimization were the maximum forming angle, minimum thickness reduction, and minimum surface roughness, with varying values in response to changes in production process parameters, such as tool diameter, tool spindle speed, step depth, and tool feed rate. A Box-Behnken experimental design (BBD) was used to develop an RSM model for modeling the variations in the forming angle, thickness reduction, and surface roughness in response to variations in process parameters. Subsequently, the RSM model was used as the fitness function for multi-objective optimization of the ISF process based on experimental design. The results showed that RSM can be effectively used to control the forming angle, thickness reduction, and surface roughness.