• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
• /
• pp.247-251
• /
• 2004

반도체 소자의 제조에 있어 실리콘 표면에 성장한 자연산화막을 제거하기 위해 일반적으로 습식 세정 기술이 이용되어 왔다. 하지만 소자의 최소 선폭(design rule)이 nano급으로 고집적화 됨에 따라 contact hole 바닥의 자연산화막을 깨끗이 제거하는데 있어서 그 한계를 나타나고 있다. 이에 대한 효과적인 대안 공정으로 가스 건식 세정 기술이 연구되고 있다. 본 논문에서는 한 번에 50매 이상의 웨이퍼를 처리함으로써 생산성 측면에서 월등한 배치식 설비에서 원거리 플라즈마(remote plasma) 장치에서 2.450Hz의 마이크로웨이브(${\mu}$-wave)에 의해 형성시킨 수소라디칼과 $NF_3$ 가스를 이용하여 실리콘에 결함을 주지 않고 자연산화막을 선택적으로 제거하는 공정에 대해 고찰하였다. AFM을 이용한 표면분석, TEM을 이용한 물성분석, 그리고 ToF-SIMS 및 XPS를 이용한 화학 분석을 습식 및 건식 세정을 비교 평가한 결과, 건식 세정 공정이 실리콘 표면에 결함을 주지 않고 자연산화막을 제거 할 수 있음을 확인하였다. 산화막$(SiO_2)$, 질화막$(Si_3N_4)$, 그리고 다결정 실리콘(Poly-Si) 등의 각 막질별 식각 특성을 고찰하였으며, $NH_3$의 캐리어 가스인 $N_2$의 주입량을 조절함으로써 수소라디칼 형성 효율의 개선이 가능하였으며, 이로부터 게이트와 소스/드레인 사이를 절연하기 위해 이용되는 질화막의 식각 선택비를 2배 정도 개선할 수 있었다. nano급 소자에 실장하여 평가한 결과에서 불산(HF)에 의한 습식 세정 방식에 비하여 약 $20{\sim}50%$ 정도의 contact 저항 감소 효과가 있음이 확인되었다.두 소자 모두 $40mA/cm^2$ 에서 이상적인 화이트 발란스와 같은(0.33,0.33)의 색좌표를 보였다.epsilon}_0=1345$의 빼어난 압전 및 유전특성과 $330^{\circ}C$의 높은 $T_c$를 보였고 그 조성의 vibration velocity는 약4.5 m/s로 나타났다.한 관심이 높아지고 있다. 그러나 고 자장 영상에서의 rf field 에 의한 SAR 증가는 중요한 제한 요소로 부각되고 있다. 나선주사영상은 SAR 문제가 근원적으로 발생하지 않고, EPI에 비하여 하드웨어 요구 조건이 낮아 고 자장에서의 고속영상방법으로 적합하다. 본 논문에서는 고차 shimming 을 통하여 불균일도를 개선하고, single shot 과 interleaving 을 적용한 multi-shot 나선주사영상 기법으로 $100{\times}100$에서 $256{\times}256$의 고해상도 영상을 얻어 고 자장에서 초고속영상기법으로 다양한 적용 가능성을 보였다. 연구에서 연구된 $[^{18}F]F_2$가스는 친핵성 치환반응으로 방사성동위원소를 도입하기 어려운 다양한 방사성의 약품개발에 유용하게 이용될 수 있을 것이다.었으나 움직임 보정 후 영상을 이용하여 비교한 경우, 결합능 변화가 선조체 영역에서 국한되어 나타나며 그 유의성이 움직임 보정 전에 비하여 낮음을 알 수 있었다. 결론: 뇌활성화 과제 수행시에 동반되는 피험자의 머리 움직임에 의하여 도파민 유리가 과대평가되었으며 이는 이 연구에서 제안한 영상정합을 이용한 움직임 보정기법에 의해서 개선되었다. 답이 없는 문제, 문제 만들기, 일반화가 가능한 문제 등으로 보고, 수학적 창의성 중 특히 확산적 사고에 초점을 맞추어 개방형 문제가 확

• 한국신재생에너지학회:학술대회논문집
• /
• 한국신재생에너지학회 2010년도 춘계학술대회 초록집
• /
• pp.82.1-82.1
• /
• 2010

수소화된 비정질 실리콘 박막을 이용한 반도체는 현재 태양전지, 트랜지스터, 매트릭스 배열 및 이미지 센서 등의 분야에서 이용되고 있다. 자세히 이야기 하면, 여러 가지의 광전효과 물질에 대한 특성이 있으며, 가시광선영역에 대하여 > $10^5cm^{-1}$이상의 매우 높은 광흡수계수와 낮은 온도를 갖는 증착공정 등이 있다. 박막의 밴드갭은 약 1.6~1.8eV로서 태양전지의 흡수층과 passivation층으로 적절하다. 여러 가지 종류의 태양전지 중 비정질 실리콘 박막/결정질 실리콘 기판의 구조로 이루어진 이종접합 태양전지는 저온에서 공정이 가능한 대표적인 것으로서 HIT(Heterojunction with Intrinsic Thin layer)구조로 산요사에 의해 제안된 것이다. 이것은 결정질 실리콘 기판과 도핑된 비정질 실리콘 박막사이에 얇은 진성층 비정질실리콘 박막을 삽입함으로서, 캐리어 전송을 좋게하여 실리콘 기판 표면의 passivation효과를 증대시키는 결과를 가지고 온다. 실험실 규모에서는 약 20%이상의 효율을 보이고 있으며, 모듈에서는 19.5%의 높은 효율을 보이고 있어 실리콘 기판을 이용한 고효율 태양전지로서 각광을 받고 있다. 이러한 이종접합 태양전지의 대부분은 단결정 실리콘을 사용하고 있는데, 점차적으로 다결정 실리콘 기판으로 추세가 바뀌고 있어, 여기에 맞는 표면 passivation 공정 및 분석이 필요하다. 본 발표에서는 다결정 실리콘 기판위에 진성층 비정질 실리콘 박막을 유도결합 플라즈마 화학기상 증착법(ICP-CVD)을 이용하여 제조하여 passivation 효과를 분석한다. 일반적으로 ICP는 CCP(coupled charged plasma)에 비해 약 100배 이상 높은 플라즈마 밀도를 가지고 있으며, 이온 충돌같은 표면으로 작용하는 것들이 기존 방식에 비해서 작다라는 장점이 있다. 먼저, 유리기판을 사용하여 ICP-CVD 챔버내에 이송 한 후 플라즈마 파워, 온도 및 가스비(SiH4/H2)에 따른 진성층 비정질 실리콘 박막을 증착 한 후, 밴드갭, 전도도 및 결합구조 등에 대한 결과를 분석한 후, 최적의 값을 가지고 250um의 두께를 갖는 다결정 실리콘을 기판위에 증착을 한다. 두께(1~20nm)에 따라 표면의 passivation이 되는 정도를 QSSPCD(Quasi steady state Photoconductive Decay)법에 의하여 소수캐리어의 이동거리, 재결합율 및 수명 등에 대한 측정 및 분석을 통하여 다결정 실리콘 기판의 passivation effect를 확인한다. 제시된 데이터를 바탕으로 향후 다결정 HIT셀 제조를 통해 태양전지 효율에 대한 특성을 비교하고자 한다.

• Tuberculosis and Respiratory Diseases
• /
• 제76권4호
• /
• pp.179-183
• /
• 2014

Immunoglobulin (Ig) G4-related disease is a recently recognized systemic fibroinflammatory condition characterized by a lymphoplasmacytic infiltrate rich in IgG4-positive plasma cells with elevated circulating levels of IgG4. The disease can either be localized to one or two organs, or present as diffuse multi-organ disease. Furthermore, lesions in different organs can present simultaneously or metachronously. In the pulmonary manefestations, lesions associated with IgG4-related disease have been described in the lung parenchyma, airways and pleura, as well as the mediastinum. We report a case of IgG4-related disease presenting as massive pleural effusion and thrombophlebitis.

• 대한한의학회지
• /
• 제31권4호
• /
• pp.9-19
• /
• 2010

Objective: To compare the contents and transfer rate of hazardous substances in crude, washing solution, crude after washing, decoction and remnant after boiling. Methods: The heavy metal contents of each step were measured by inductively coupled plasma mass spectrometer (ICP-MS) and mercury analyzer (SP-3DS). In order to analyze pesticides in each sample we used simultaneous multi-residue analysis of pesticides by GC/ECD, which was followed by GC/MSD analysis to confirm the identity of the detected pesticide in each sample. In addition, the contents of sulfur dioxide ($SO_2$) were performed by Monier-Williams distillation method. Results: 1. Contents (mg/kg) of heavy metals were not detected in decoctions of any tested herbal medicine prescriptions. 2. Transfer rates (%) of heavy metals from crude to remnant were as follows: Yijin-tang (As: 46.9, Cd: 50.0 and Pb: 100.0), Oryung-san (As: 80.0, Cd: 100.0 and Pb: 73.8), Hwangryunhaedok-tang (As: 88.9, Cd: 71.4 and Pb: 92.7), Bangpungtongseong-san (As: 100.0, Cd: 17.3 and Pb: 56.1), Oyaksungi-san (As: 47.4, Cd: 175.0 and Pb: 142.4). 3. Contents (mg/kg) of residual pesticides were not detected in any samples. 4. Transfer rate (%) of sulfur dioxide ($SO_2$) from crude to remnant in all samples were as follows: Yijin-tang (25.0), Oryung-san (166.7), Hwangryunhaedok-tang (50.0), Bangpungtongseong-san (181.8), Oyaksungi-san (50.0). Conclusion: Our results showed that the boiled herbal medicine prescriptions which we take are safe from the hazardous substances.

• 사상체질의학회지
• /
• 제22권2호
• /
• pp.93-100
• /
• 2010

1. Objectives: To compare the contents of hazardous substances such as crude, washing solution, crude after washing, decoction and remnant. 2. Methods: The heavy metal contents of each step were measured by inductively coupled plasma (ICP) spectrometer and mercury analyzer (MA-2). In order to analyze pesticides in Yanggyeoksanhwa-tang we used simultaneous multi- residue analysis of pesticides by GC/ECD, which was followed by GC/MSD analysis to confirm the identity of the detected pesticide in each sample. In addition, the contents of sulfur dioxide (SO2) were performed by Monier-Williams distillation method. 3. Results: 1) The mean values of heavy metal contents (mg/kg) for each steps in Yanggeoksanhwa-tang were as follows: crude (Pb; 1.87, As; 1.29, Cd; 0.28 and Hg; N.D.), washing solution (Pb; 1.98, As; 1.13, Cd; 0.10 and Hg; N.D.), crude after washing (Pb; 1.90, As; 1.40, Cd; 0.22 and Hg; N.D.), decoction (Pb; 1.90, As; 1.14, Cd; 0.11 and Hg; N.D.) and remnant (Pb; 2.39, As; 1.29, Cd; 0.25 and Hg; 0.01). 2) Contents (mg/kg) of residual pesticides in crude and decoction were not detected. 3) Contents (mg/kg) of sulfur dioxide (SO2) in crude, crude after washing and remnant exhibited 3.00, 2.00 and 2.00 mg/kg, respectively. However, contents of sulfur dioxide in washing solution and decoction were not detected. 4. Conclusions: These Results: will be used to establish a criterion of heavy metals, residual pesticides and sulfur dioxide of each step in Yanggeoksanhwa-tang.

• Tuberculosis and Respiratory Diseases
• /
• 제67권1호
• /
• pp.37-41
• /
• 2009

LIP는 매우 드문 간질성 폐질환의 일종으로 비특이적인 방사선학적 소견으로 보이므로 타 간질성 폐질환과의 감별을 위해서는 반드시 개흉 폐생검을 하여야 한다. 또한 LIP 진단 후 다른 자가 면역 질환 및 감염의 확인이 치료방향의 결정에 있어 필요하며 폐섬유화 및 폐성심으로의 진행을 막기 위해서 조기에 적극적인 폐생검을 시행하여 적극적인 치료를 시작하여야 한다. 또한 일부 악성 림프종으로의 진행도 보고 되고 있어 정기적인 추적 검사가 필요하다. 저자들은 1개월 간의 기침과 운동 시 호흡곤란으로 내원하여 개흉 폐생검 결과 LIP로 진단 후 스테로이드 치료로 호전된 1예를 경험하였기에 관련 문헌고찰과 함께 보고한다.

• 대한본초학회지
• /
• 제23권4호
• /
• pp.51-58
• /
• 2008

Objectives: To compare the contents of heavy metals, residual pesticides and sulfur dioxide before/after a decoction. Methods: The heavy metal contents before/after a decoction were measured by Inductively Coupled Plasma Atomic Emission Spectrometer(ICP-AES) and mercury analyzer. In order to analyze pesticides in 5 samples we used simultaneous multi-residue analysis of pesticides by GC/ECD, which was followed by GC/MSD analysis to confirm the identity of the detected pesticide in each sample. In addition, the contents of sulfur dioxide($SO_2$) were performed by Monier-Williams distillation method. Results: 1. The mean values of heavy metal contents(mg/kg) for the samples were as follows: Galgeun-tang(before decoction-Pb; 0.793, Cd; 0.133, As; 0.016 and Hg; 0.005, after decoction-Pb; 0.033, Cd; 0.004, As; 0.002 and Hg; not detected), Gumiganghwal-tang(before decoction-Pb; 0.934, Cd; 0.197, As; 0.046 and Hg; 0.006, after decoction-Pb; 0.062, Cd; 0.007, As; 0.004 and Hg; 0.0001), Sosiho-tang(before decoction-Pb; 0.891, Cd; 0.134, As; 0.091 and Hg; 0.014, after decoction-Pb; 0.036, Cd; 0.002, As; 0.004 and Hg; not detected), Ojuck-san(before decoction-Pb; 0.907, Cd; 0.136, As; 0.084 and Hg; 0.007, after decoction-Pb; 0.074, Cd; 0.007, As; 0.011 and Hg; 0.0005) and Samsoeum(before decoction-Pb; 1.234, Cd; 0.154, As; 0.016 and Hg; 0.007, after decoction-Pb; 0.094, Cd; 0.006, As; 0.002 and Hg; 0.001). 2. Contents(mg/kg) of residual pesticides before/after a decoction in all samples were not detected. 3. Contents(mg/kg) of sulfur dioxide($SO_2$) before a decoction in Galgeun-tang, Gumiganghwal-tang, Sosiho-tang, Ojuck-san and Samsoeum exhibited 1.2, 3.4, 11.1, 12.0 and 5.7, respectively. However, contents of sulfur dioxide after a decoction in all samples were not detected. Conclusions: These results will be used to establish a criterion of heavy metals, residual pesticides and sulfur dioxide.

• 대한한의학방제학회지
• /
• 제17권2호
• /
• pp.53-63
• /
• 2009

Objective : To compare the contents of heavy metals, residual pesticides and sulfur dioxide before/after a decoction. Methods : The heavy metal contents before/after a decoction were measured by Inductively Coupled Plasma Atomic Emission Spectrometer (ICP-AES) and mercury analyzer. In order to analyze pesticides in 4 samples we used simultaneous multi-residue analysis of pesticides by GC/ECD, which was followed by GC/MSD analysis to confirm the identity of the detected pesticide in each sample. In addition, the contents of sulfur dioxide ($SO_2$) were performed by Monier-Williams distillation method. Results: 1. The mean values of heavy metal contents (mg/kg) for the samples were as follows: Jaeumganghwa-tang (before decoction - Pb; 1.190, Cd; 0.184, As; 0.099 and Hg; 0.028, after decoction - Pb; .033, Cd; 0.003, As; 0.005 and Hg; 0.001), Yukmijiwhang-tang (before decoction - Pb; 0.484, Cd; 0.133, As; 0.053 and Hg; 0.009, after decoction - Pb; 0.065, Cd; 0.008, As; 0.007 and Hg; not detected), Bojungikgi-tang (before decoction - Pb; 0.863, Cd; 0.197, As; below 0.016 and Hg; 0.011, after decoction - Pb; 0.071, Cd; 0.009, As; 0.004 and Hg; 0.001) and Ssangwha-tang (before decoction - Pb; 1.511, Cd; 0.212, As; 0.094 and Hg; 0.016, after decoction - Pb; 0.029, Cd; 0.006, As; 0.005 and Hg; 0.0004). 2. Contents (mg/kg) of sulfur dioxide ($SO_2$) before a decoction in Jaeumganghwa-tang, Yukmijiwhang-tang and Ssangwha-tang exhibited 22.7, 107.3 and 5.5, respectively. However, contents of sulfur dioxide after a decoction in all samples were not detected. 3. Contents (mg/kg) of residual pesticides before/after a decoction in all samples were not detected. Conclusion : These results will be used to establish a criterion of heavy metals, residual pesticides and sulfur dioxide.

• 대한한의학회지
• /
• 제30권4호
• /
• pp.108-117
• /
• 2009

Objective: To compare the contents of heavy metals, residual pesticides and sulfur dioxide before/after a decoction. Methods: The heavy metal contents before/after a decoction were measured by inductively-coupled plasma atomic emission spectrometer (ICP-AES) and mercury analyzer. In order to analyze pesticides in 5 samples we used simultaneous multi-residue analysis of pesticides by GC/ECD, which was followed by GC/MSD analysis to confirm the identity of the detected pesticide in each sample. In addition, the contents of sulfur dioxide ($SO_2$) were performed by Monier-Williams distillation method. Results: 1. The mean values of heavy metal contents (mg/kg) for the samples were as follows: Sipjeondaebo-tang (before decoction - Pb; 1.163, Cd; 0.257, As; 0.080 and Hg; 0.016, after decoction - Pb; 0.059, Cd; 0.007, As; 0.006 and Hg; 0.0003), Palmul-tang (before decoction - Pb; 1.181, Cd; 0.242, As; 0.152 and Hg; 0.014, after decoction - Pb; 0.067, Cd; 0.008, As; 0.008 and Hg; 0.0003), Sagunja-tang (before decoction - Pb; 1.285, Cd; 0.283, As; 0.063 and Hg; 0.012, after decoction - Pb; 0.047, Cd; 0.009, As; 0.004 and Hg; not detected) and Samul-tang (before decoction - Pb; 1.025, Cd; 0.169, As; 0.099 and Hg; 0.013, after decoction - Pb; 0.065, Cd; 0.007, As; 0.010 and Hg; 0.001). 2. Contents (mg/kg) of residual pesticides before/after a decoction were not detected in any samples. 3. Contents (mg/kg) of sulfur dioxide ($SO_2$) before a decoction in Sipjeondaebo-tang, Palmul-tang, Sagunja-tang and Samul-tang exhibited 5.0, 6.0, 14.0 and 6.9, respectively. However, contents of sulfur dioxide after a decoction were not detected in any samples. Conclusion: These results will be used to establish a criterion for heavy metals, residual pesticides and sulfur dioxide.

• 대한예방한의학회지
• /
• 제21권2호
• /
• pp.1-13
• /
• 2017

Objectives : This paper serves to explore current trends of systems biology in Traditional Chinese Medicine (TCM) and examine how it may influence the Traditional Korean medicine. Methods : Literature review method was collectively used to classify Introduction to systems biology, diagnosis and syndrome classification of systems biology in TCM perspective, physiotherapy including acupuncture, herbs and formula functions, TCM systems biology, and directions of academic development. Results : The term 'Systems biology' is coined as a combination of systems science and biology. It is a field of study that tries to understand living organism by establishing a theory based on an ideal model that analyzes and predicts the desired output with understanding of interrelationships and dynamics between variables. Systems biology has an integrated and multi-dimensional nature that observes the interaction among the elements constructing the network. The current state of systems biology in TCM is categorized into 4 parts: diagnosis and syndrome, physical therapy, herbs and formulas and academic development of TCM systems biology and its technology. Diagnosis and syndrome field is focusing on developing TCM into personalized medicine by clarifying Kidney yin deficiency patterns and metabolic differences among five patterns of diabetes and analyzing plasma metabolism and biomarkers of coronary heart disease patients. In the field of physical therapy such as acupuncture and moxibustion, researchers discovered the effect of stimulating acupoint ST40 on gene expression and the effects of acupuncture on treating functional dyspepsia and acute ischemic stroke. Herbs and formulas were analyzed with TCM network pharmacology. The therapeutic mechanisms of Si Wu Tang and its series formulas are explained by identifying potential active substances, targets and mechanism of action, including metabolic pathways of amino acid and fatty acid. For the academic development of TCM systems biology and its technology, it is necessary to integrate massive database, integrate pharmacokinetics and pharmacodynamics, as well as systems biology. It is also essential to establish a platform to maximize herbal treatment through accumulation of research data and diseases-specific, or drug-specific network combined with clinical experiences, and identify functions and roles of molecules in herbs and conduct animal-based studies within TCM frame. So far, few literature reviews exist for systems biology in traditional Korean medicine and they merely re-examine known efficacies of simple substances, herbs and formulas. For the future, it is necessary to identify specific mechanisms of working agents and targets to maximize the effects of traditional medicine modalities. Conclusions : Systems biology is widely accepted and studied in TCM and already advanced into a field known as 'TCM systems biology', which calls for the study of incorporating TCM and systems biology. It is time for traditional Korean medicine to acknowledge the importance of systems biology and present scientific basis of traditional medicine and establish the principles of diagnosis, prevention and treatment of diseases. By doing so, traditional Korean medicine would be innovated and further developed into a personalized medicine.