• Title/Summary/Keyword: Multi-plasma

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A Study on DeNOx Characteristics of Corona/Catalyst Hybrid System (코로나/촉매 일체형 시스템의 탈질특성에 관한 연구)

  • Chang, Hong-Ki;Choi, Chang-Sik;Shin, Jung-Uk;Ji, Young-Yeon;Hong, Min-Sun;Chung, Yoon-Jin
    • Journal of Korean Society for Atmospheric Environment
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    • v.23 no.6
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    • pp.699-707
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    • 2007
  • This study was carried out to investigate the reaction characteristics of corona/catalyst hybrid $DeNO_x$ process. The experiments were performed by using the multi-staged pin-to-hole type corona reactor which is enable to control the pin-to-hole gap and to insert the catalyst. Also, used for this study, were catalysts which commercially used Pt, Pd and $TiO_2$, and oxygen and hydrocarbon ($C_2H_4$) as reagents. In the syn-gas test, at high temperatures in the range of $100{\sim}200^{\circ}C$, the corona-only $DeNO_x$ process did not reduce the $NO_x$ concentration effectively. However in the presence of ethylene and oxygen as reagents, the $NO_x$ removal efficiency was better at these high temperatures than corona-only $DeNO_x$ process. In addition, coronal catalyst hybrid process with $TiO_2$ showed more efficiency of $NO_x$ removal than Pt and Pd catalyst, because the $TiO_2$ catalyst was more active than Pt and Pd catalyst to converse the $NO_2$ to $HNO_3$. Furthermore, at the condition of real diesel exhaust gas, the $DeNO_x$ efficiency of corona/catalyst hybrid process was not good at higher reaction temperature and plasma density.

Tribology Coating Study of Thick DLC (ta-C) Film (DLC (ta-C) 후막코팅을 위한 트라이볼로지 코팅 연구)

  • Jang, Young-Jun;Kang, Yong-Jin;Kim, Gi Taek;Kim, Jongkuk
    • Tribology and Lubricants
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    • v.32 no.4
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    • pp.125-131
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    • 2016
  • In recent years, thick ta-C coating has attracted considerable interest owing to its existing and potential commercial importance in applications such as automobile accessories, drills, and gears. The thickness of the ta-C coating is an important parameter in these applications. However, the biggest problems are achieving efficient coating and uniformity over a large area with high-speed deposition. Feasibility is confirmed for the ta-C coating thickness of up to 9.0 µm (coating speed: 3.0 µm/h, fixed substrate) using a single FCVA cathode. The thickness was determined using multiple coating cycles that were controlled using substrate temperature and residual stresses. In the present research, we have designed a coating system using FCVA plasma and produced enhanced thick ta-C coating. The system uses a specialized magnetic field configuration with stabilized DC arc plasma discharge during deposition. To achieve quality that is acceptable for use in automobile accessories, the magnetic field, T-type filters, and 10 pieces of a multi-cathode are used to demonstrate the deposition of the thick ta-C coating. The results of coating performance indicate that uniformity is ±7.6 , deposited area is 400 mm, and the thickness of the ta-C coating is up to 5.0 µm (coating speed: 0.3 µm/h, revolution and rotation). The hardness of the coating ranges from 30 to 59 GPa, and the adhesion strength level (HF1) ranges from 20 to 60 N, depending on the ta-C coating.

Cytocidal Effect of TALP-32 on Human Cervical Cancer Cell HeLa (TALP-32의 인체자궁암 세포주 HeLa에 대한 세포독성)

  • Park, Ji-Hoon;Kim, Jong-Seok;Yun, Eun-Jin;Song, Kyoung-Sub;Seo, Kang-Sik;Kim, Hoon;Jung, Yeon-Joo;Yun, Wan-Hee;Lim, Kyu;Hwang, Byoung-Doo;Park, Jong-Il
    • Toxicological Research
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    • v.22 no.4
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    • pp.315-322
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    • 2006
  • TALP-32 is highly basic protein with a molecular weight of 32 kDa purified from human term placenta. Some basic proteins such as defensins and cecropins are known to induce cell death by increasing membrane permeability and some of them are under development as an anticancer drug especially targeting multi-drug resistant cancers. Therefore, we investigated cytotoxic effect and mechanism of TALP-32 When HeLa cell was incubated with TALP-32, cytotoxicity was increased in time and dose dependent manner. As time goes by, HeLa cells became round and plasma membrane was ruptured. Increase of plasma membrane permeability was determined with LDH release assay. Also in transmission electron microscopy, typical morphology of necrotic cell death, such as cell swelling and intracellular organelle disruption was observed, but DNA fragmentation and caspase activation was not. And necrotic cell death was determined with Annexin V/Pl staining. The cytotoxicity of TALP-32 was minimal and decreased or RBC and Hep3B respectively. These data suggests that TALP-32 induces necrosis on rapidly growing cells but not on slowly growing cells implicating the possibility of its development of anticancer peptide drug.

Fabrication of CNT dispersed Cu matrix composites by wet mixing and spark plasma sintering process (습식 교반 및 방전 플라즈마 소결 공정에 의한 CNT 분산 Cu 복합재료 제조)

  • Cho, Seungchan;Jo, Ilguk;Lee, Sang-Bok;Lee, Sang-Kwan;Choi, Moonhee;Park, Jehong;Kwon, Hansang;Kim, Yangdo
    • Journal of Powder Materials
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    • v.25 no.2
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    • pp.158-164
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    • 2018
  • Multi-walled carbon nanotube (MWCNT)-copper (Cu) composites are successfully fabricated by a combination of a binder-free wet mixing and spark plasma sintering (SPS) process. The SPS is performed under various conditions to investigate optimized processing conditions for minimizing the structural defects of CNTs and densifying the MWCNT-Cu composites. The electrical conductivities of MWCNT-Cu composites are slightly increased for compositions containing up to 1 vol.% CNT and remain above the value for sintered Cu up to 2 vol.% CNT. Uniformly dispersed CNTs in the Cu matrix with clean interfaces between the treated MWCNT and Cu leading to effective electrical transfer from the treated MWCNT to the Cu is believed to be the origin of the improved electrical conductivity of the treated MWCNT-Cu composites. The results indicate the possibility of exploiting CNTs as a contributing reinforcement phase for improving the electrical conductivity and mechanical properties in the Cu matrix composites.

Development and Testing of a Prototype Long Pulse Ion Source for the KSTAR Neutral Beam System

  • Chang Doo-Hee;Oh Byung-Hoon;Seo Chang-Seog
    • Nuclear Engineering and Technology
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    • v.36 no.4
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    • pp.357-363
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    • 2004
  • A prototype long pulse ion source was developed, and the beam extraction experiments of the ion source were carried out at the Neutral Beam Test Stand (NBTS) of the Korea Superconducting Tokamak Advanced Research (KSTAR). The ion source consists of a magnetic bucket plasma generator, with multi-pole cusp fields, and a set of tetrode accelerators with circular apertures. Design requirements for the ion source were a 120kV/65A deuterium beam and a 300 s pulse length. Arc discharges of the plasma generator were controlled by using the emission-limited mode, in turn controlled by the applied heating voltage of the cathode filaments. Stable and efficient arc plasmas with a maximum arc power of 100 kW were produced using the constant power mode operation of an arc power supply. A maximum ion density of $8.3{\times}10^{11}\;cm^{-3}$ was obtained by using electrostatic probes, and an optimum arc efficiency of 0.46 A/kW was estimated. The accelerating and decelerating voltages were applied repeatedly, using the re-triggering mode operation of the high voltage switches during a beam pulse, when beam disruptions occurred. The decelerating voltage was always applied prior to the accelerating voltage, to suppress effectively the back-streaming electrons produced at the time of an initial beam formation, by the pre-programmed fast-switch control system. A maximum beam power of 0.9 MW (i.e. $70\;kV{\times}12.5\;A$) with hydrogen was measured for a pulse duration of 0.8 s. Optimum beam perveance, deduced from the ratio of the gradient grid current to the total beam current, was $0.7\;{\mu}perv$. Stable beams for a long pulse duration of $5{\sim}10\;s$ were tested at low accelerating voltages.

Carbon Nanotube-based Nanohybrid Materials as Counter Electrode for Highly Efficient Dye-sensitized Solar Cells (고효율 염료감응형 태양전지를 위한 탄소나노튜브 기반 나노 하이브리드 상대전극)

  • Kim, Ji-Soo;Sim, Eun-Ju;Dao, Van-Duong;Choi, Ho-Suk
    • Korean Chemical Engineering Research
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    • v.54 no.2
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    • pp.262-267
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    • 2016
  • In this study, we present an excellent approach for easily and uniformly immobilizing Pt, Au and bimetallic PtAu nanoparticles (NPs) on a multi-walled carbon nanotube (MWNT)-coated layer through dry plasma reduction. The NPs are stably and uniformly immobilized on the surface of MWNTs and the nanohybrid materials are applied to counter electrode (CE) of dye-sensitized solar cells (DSCs). The electrochemical properties of CEs are examined through cyclic voltammogram, electrochemical impedance spectroscopy, and Tafel measurements. As a result, both electrochemical catalytic activity and electrical conductivity are highest for PtAu/MWNT electrode. The DSC employing PtAu/MWNT CE exhibits power conversion efficiency of 7.9%. The efficiency is better than those of devices with MWNT (2.6%), AuNP/MWNT (2.7%) and PtNP/MWNT (7.5%) CEs.

솔라셀용 uC-Si:H 박막 증착공정을 위한 플라즈마 소스에 대한 고찰 및 multi-hole hollow cathode CCP에 대한 연구

  • Seo, Sang-Hun;Lee, Heon-Su;Lee, Yun-Seong;Jang, Hong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.409-409
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    • 2010
  • 솔라셀은 차세대 대체 에너지 소스로 최근 큰 각광을 받고 있다. 솔라셀의 제조에 있어 가장 중요한 공정은 마이크로 결정질 및 비결정질 실리콘(uC-Si:H and a-Si:H) 박막을 증착하는 PECVD (Plasma Enhanced CVD)공정이다. 현재까지 이 증착공정을 위한 플라즈마 소스로 CCP(Capacitively Coupled Plasma)가 주로 사용되어 왔다. 그러나, CCP를 플라즈마 소스를 사용한 경우 솔라셀 대량 생산 적용시 다른 방법들에 비해 긴 공정 시간이 해결해야 할 문제점으로 대두되었다. 본 발표에서는 솔라셀의 대량 생산을 위한 마이크로 결정질 실리콘 박막 증착에 있어 현 시점에서 해결되어야 할 문제점에 대해 고찰해 보고자 한다. 현재까지 이러한 문제점들을 해결하기 위해 적용되어 왔던 플라즈마 소스들을 나열하고 이러한 플라즈마 소스에 대한 특성 및 문제점들을 고찰한다. 또한, PECVD 공정상의 문제점을 해결하기 위한 플라즈마 조건을 플라즈마 벌크에서의 전자에너지 분포를 기준으로 제시하고자 한다. 솔라셀용 결정질 실리콘 박막 증착용 플라즈마 소스로 hollow cathode 방전이 가장 유력시되고 있다. 본 연구에서는 CCP 플라즈마에서 hollow cathode 방전시 발생되는 플라즈마 특성에 대한 기초 연구를 제시한다. 기초 연구를 위해 다양한 불활성 가스인 아르콘, 헬륨, 크립톤 가스에 13.56 MHz의 RF 파워를 인가하고 방전되는 플라즈마 밀도 변화를 관찰하였다. 특히, 다양한 hole diameter에서 발생되는 플라즈마 밀도의 변화를 기존 평면 CCP 플라즈마의 밀도에 비교하여 분석함으로써 hole diameter에 따른 효과를 관찰하였다. 이러한 결과는 PIC 시뮬레이션을 통해 얻은 전자에너지 분포함수를 바탕으로 메커니즘을 논의하고자 한다. 마지막으로 솔라셀용 PECVD공정을 위해 고밀도 플라즈마 소스의 필요성뿐 만 아니라 대면적 소스의 구현에 대한 문제점을 고찰하였다. 대면적 공정에서 가장 중요한 핵심 연구 이슈는 공정 균일도를 높이는 것이다. CCP 플라즈마 소스에서 전극의 크기가 대면적화 됨에 따라 발생되는 전자기파 효과에 의한 불균일도에 대해 RF 전자기장 시뮬레이션을 통해 확인하고, 균일도 확보를 위한 방안에 대한 논의하고자 한다.

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Optimization of an Ozone-based Advanced Oxidation Process for the Simultaneous Removal of Particulate Matters and Nitrogen Oxides in a Semiconductor Fabrication Process (반도체 제조공정 미세먼지-질소산화물 동시 저감을 위한 오존 고속산화공정 최적화 연구)

  • Uhm, Sunghyun;Lee, Seung Jun;Ko, Eun Ha;Hong, Gi Hoon;Hwang, Sangyeon
    • Applied Chemistry for Engineering
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    • v.32 no.6
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    • pp.659-663
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    • 2021
  • 10 m3/min (CMM) multi-pollutants abatement system was successfully developed by effectively integrating ozone oxidation, wet scrubbing, and wet electrostatic precipitation for the simultaneous removal of particulate matters (PMs) and NOx in a semiconductor fabrication process. The sophisticated control and optimization of operating parameters were conducted to maximize the destruction and removal efficiency of NOx. In particular, the stability test of a wet electrostatic precipitator was carried out in parallel for 30 days to validate the reliability of core parts including a power supply. An O3/NO ratio, which is the most important operating parameter, was optimized to be about 1.5 and the optimization of wet scrubbing with a reducing agent made it possible to analyze the contribution of neutralization reaction.

Variations in Tribological Characteristics of SM45C by PVD Coating and Thin Films (SM45C재의 PVD코팅과 필름에 의한 트라이볼러지 특성)

  • Shim, Hyun-Bo;Suh, Chang-Min;Kim, Jong-Hyoung;Suh, Min-Soo
    • Journal of Ocean Engineering and Technology
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    • v.32 no.6
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    • pp.502-510
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    • 2018
  • In order to accumulate data to lower the friction coefficient of a press mold, tribological tests were performed before and after coating SM45C with a PVC/PO film and plasma coating (CrN, concept). The ultrasonic nanocrystal surface modification (UNSM)-treated material had a nano-size surface texture, high surface hardness, and large and deep compressive residual stress formation. Even when the load was doubled, the small amount of abrasion, small weight of the abrasion, and width and depth of the abrasion did not increase as much as those of untreated materials. A comparison of the weight change before and after the tribological test with the CrN and the concept coating material and that of the untreated material showed that the wear loss of the concept coating material and P-UNSM treated material (that is, the UNSM treated material treated with the concept coating) showed a tendency to decrease by approximately 55-75%. Concept 100N had a lower friction coefficient of about 0.6, and P-UNSM-30-100N showed almost the same curve as concept 100N and had a low coefficient of friction of about 0.6. The concept multilayer coating had a thickness of $5.32{\mu}m$. In the beginning, the coefficient of friction decreased because of the plasma coating, but it started to increase from about 250-300 s. After about 350 s, the coefficient of friction tended to approach the friction coefficient of the SM45C base metal. The SGV-280F film-attached test specimen was slightly pushed back and forth, but the SM45C base material was not exposed due to abrasion. The friction coefficient was 0.22, which was the lowest, and the tribological property was the best in this study.

Photovoltaic Performance of Crystalline Silicon Recovered from Solar Cell Using Various Chemical Concentrations in a Multi-Stage Process (습식 화학 공정에 의한 태양전지로부터 고순도 실리콘 회수 및 이를 이용한 태양전지 재제조)

  • Noh, Min-Ho;Lee, Jun-Kyu;Ahn, Young-Soo;Yeo, Jeong-Gu;Lee, Jin-Seok;Kang, Gi-Hwan;Cho, Churl-Hee
    • Korean Journal of Materials Research
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    • v.29 no.11
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    • pp.697-702
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    • 2019
  • In this study, using a wet chemical process, we evaluate the effectiveness of different solution concentrations in removing layers from a solar cell, which is necessary for recovery of high-purity silicon. A 4-step wet etching process is applied to a 6-inch back surface field(BSF) solar cell. The metal electrode is removed in the first and second steps of the process, and the anti-reflection coating(ARC) is removed in the third step. In the fourth step, high purity silicon is recovered by simultaneously removing the emitter and the BSF layer from the solar cell. It is confirmed by inductively coupled plasma mass spectroscopy(ICP-MS) and secondary ion mass spectroscopy(SIMS) analyses that the effectiveness of layer removal increases with increasing chemical concentrations. The purity of silicon recovered through the process, using the optimal concentration for each process, is analyzed using inductively coupled plasma atomic emission spectroscopy(ICP-AES). In addition, the silicon wafer is recovered through optimum etching conditions for silicon recovery, and the solar cell is remanufactured using this recovered silicon wafer. The efficiency of the remanufactured solar cell is very similar to that of a commercial wafer-based solar cell, and sufficient for use in the PV industry.