Optimization of an Ozone-based Advanced Oxidation Process for the Simultaneous Removal of Particulate Matters and Nitrogen Oxides in a Semiconductor Fabrication Process |
Uhm, Sunghyun
(Plant Process Development Center, Institute for Advanced Engineering)
Lee, Seung Jun (R&D Center, Plasma Technology Co. Ltd.) Ko, Eun Ha (R&D Center, Plasma Technology Co. Ltd.) Hong, Gi Hoon (Plant Process Development Center, Institute for Advanced Engineering) Hwang, Sangyeon (Plant Process Development Center, Institute for Advanced Engineering) |
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3 | S. Uhm, G. H. Hong, and S. Hwang, An Ozone-based Advanced Oxidation Process for an Integrated Air Pollution Control System, Appl. Chem. Eng., 32, 237-242 (2021). DOI |
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11 | Z. Han, T. Zou, J. Wang, J. Dong, Y. Deng, and X. Pan, A Novel Method for Simultaneous Removal of NO and SO2 from Marine Exhaust Gas via In-Site Combination of Ozone Oxidation and Wet Scrubbing Absorption, J. Mar. Sci. Eng., 8, 943 (2020). DOI |