• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권7호
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• pp.311-315
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• 2002

Chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric(IMD), inter-level dielectric (ILD) layers of multi-layer interconnections. In this paper, we studied the characteristics of polishing pad, which can apply shallow trench isolation (STI)-CMP process for global planarization of multi-level interconnection structure. Also, we investigated the effects of different sets of polishing pad, such as soft and hard pad. As an experimental result, hard pad showed center-fast type, and soft pad showed edge-fast type. Totally, the defect level has shown little difference, however, the counts of scratch was detected less than 2 on JR111 pad. Through the above results, we can select optimum polishing pad, so we can expect the improvements of throughput and device yield.

• 한국철도학회논문집
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• 제16권6호
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• pp.466-472
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• 2013

국내외적으로 도시철도 및 고속철도에서 콘크리트궤도 부설이 증가하고 있는 추세에 있다. 콘크리트궤도에서 필수적으로 사용되고 있는 레일체결장치의 탄성패드는 열차하중에 대한 충격을 완화시켜주는 중요한 역할을 담당하고 있다. 일반적으로 탄성패드의 강성변화를 평가하기 위해서는 단순피로시험[1]이 시행되고 있으나 이는 실제 철도환경조건과는 상이할 수 있다. 본 연구에서는 실제 철도현장에서 통과톤수를 받은 탄성패드에 대한 정적스프링계수를 측정하였다. 또한, 신품 탄성패드에 대해서 단순피로시험과 복합가속열화시험을 수행하였다. 사용한 탄성패드의 강성값은 사용시간과 반복횟수에 따른 시험결과값과 비교되었다. 시험결과의 비교를 통해 사용한 탄성패드의 정적스프링계수 변화경향이 반복하중과 열이 함께 고려된 복합가속열화시험결과와 동일한 경향을 보이는 것을 확인하였다. 또한, 복합가속열화와 관련된 T-NT식을 이용하여 탄성패드의 복합가속열화 모델을 도출하였으며, 약 2.62의 가속계수를 가지는 것을 확인하였다. 최종적으로 본 연구를 통해 폴리우레탄 탄성패드에 대한 복합가속열화 모델식을 제안하였다.

• 한국정밀공학회지
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• 제21권7호
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• pp.22-29
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• 2004

As a result of high integration of semiconductor device, the global planarization of multi-layer structures is necessary. So the chemical mechanical polishing(CMP) is widely applied to manufacturing the dielectric layer and metal line in the semiconductor device. CMP process is under influence of polisher, pad, slurry, and process itself, etc. In comparison with the general CMP which uses the slurry including abrasives, fixed abrasive pad takes advantage of planarity, resulting from decreasing pattern selectivity and defects such as dishing & erosion due to the reduction of abrasive concentration especially. This paper introduces the manufacturing technique of fixed abrasive pad using hydrophilic polymers with swelling characteristic in water and explains the self-conditioning phenomenon. And the tungsten CMP using fixed abrasive pad achieved the good conclusion in terms of the removal rate, non-uniformity, surface roughness, material selectivity, micro-scratch free contemporary with the pad life-time.

• 대한안전경영과학회지
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• 제17권2호
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• pp.235-240
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• 2015

Using a progressive die of the multi-stage drawing product, It was experiments for the Influence of the Products Roundness on the die pad process Safety die model, obstacle countermeasure research safety die design When the die pad is independent structure, Sidewall thickness of the inside 2stage, 3stage, 4stage of the product is thicker, the thickness of the inside 1stage and the bottom is thinner. it was become unstable beacuse the inside 1stage related to the Products Roundness is thinner. When the die pad is Integrated structure, Sidewall thickness of the inside 1stage, 2stage of the product is thicker, and Sidewall 3stage and 4stage was a thin. it was become unstable beacuse the inside 3stage related to the Products Roundness is thinner. Therefore, The appropriate combination of and integrated independent is required for each process.

• 센서학회지
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• 제17권5호
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• pp.387-395
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• 2008

An optic module system is developed adopting multiple colorimetry units for the measurement of multi-pad urinalysis dipsticks. Multiple photometry system instead of moving mechanisms has the advantages of system reliability and simplicity as well as economic aspects due to the recent development of economic color light emitting diodes and stable photo sensors. An integration amplifier with programmable integration time, a current source circuit with selectable and stable current settings were connected through analog multiplexers to thirty light emitting diodes for illumination and ten photo transistors for reading each strip pad. All the circuits are controlled by a microprocessor through a simple set of serial communication commands. The detect ability is eighteen times better than the minimum color difference of the test grading which is 0.013 in urobilinogen in the color space defined in this paper.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.463-464
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• 2013

• 한국정밀공학회지
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• 제25권8호
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• pp.37-44
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• 2008

Nowadays, the increasing global competition forces manufacturer to reduce the cost and time for implementation of manufacturing system. The AR(augmented reality) technology as a new human-machine interface introduces a noteworthy perspective for a new manufacturing system design. Using AR technology, a physically existing production environment can be superimposed with virtual planning objects. Therefore, the planning tasks can be validated without modeling the surrounding environment of the production domain during short process planning time. In this paper, we introduce the construction of AR browser and determine the optimal environment parameters for field application of AR system through lots of tests. And, many methods such as multi-marker coordinate system, division of virtual objects and so on, are proposed in order to solve the problems suggested from initial field test. Based on these tests and results, the test-bed of C/Pad assembly system is configured and robot program for C/Pad assembly is generated based on AR system.

• 한국환경복원기술학회지
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• 제21권1호
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• pp.133-143
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• 2018

In spite of the growing importance of landscaping trees, the rate of flawed and withered trees damaged by pest, disease, drought or frost is increasing. In order to evaluate the performance of the Tree Protective Pad, which are developed to reduce the failure ratio in landscape planting, the tree protective pad for 'digging', 'pest controlling', and 'insulating' are tested based on the five functional criteria; moisturizing effect, wither preventive effect, pest and disease control, thermal effect, tensile strength, and environmental performance. The result of this study is as follows. The moisturizing effect of the tree protective pad for digging is found to be outstanding. According to the result of testing the pad on trees, in particular, it is better than jute tape in wither preventive effect, which means it is expected to prevent flaw and wilt from planting during the improper seasons like summertime. The experiment of installing the protective tree pad for pest controlling to the trunk of Quercus mongolica shows that preventive effect of the pad from diseases and insects is superior, and it also has economical effect by reducing the use of agricultural chemicals. The comparative test of the pad for insulating and jute tape proves that the temperature of the pad is about $2^{\circ}C$ higher than outside. The rate of tensile strength and biodegradation of the pad exceeds the optimal level, so it is revealed that the pad may be the work efficient and environment-friendly product. Likewise, by timely irrigating trees, the tree protective pad economically prevents trees from pest, disease,drought or frost, which may be caused by improper seasonal or delayed planting. As a means of reducing the flaw and facilitating the growth of trees, the exceptional performance of the pad is expected to effectively used in landscape planting and management.

• 한국전산구조공학회논문집
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• 제35권2호
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• pp.131-140
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• 2022

레일장대화는 무도상교량의 소음, 진동, 충격 등의 문제점을 해결할 수 있는 경제적인 방안 중 하나이며, 최근 연동식 침목고정장치를 이용한 SSF 공법이 개발된 바 있다. 이 연구에서는 연동식 침목고정장치 적용 시 레일 높이 조정 및 열차 통과 시의 충격 흡수를 목적으로 교량침목 하부에 삽입되는 침목패드의 최적 연직강성을 결정하는 과정을 제시하였다. 침목패드의 최적 연직강성 결정을 위하여 관련 기존 기준을 검토하였으며, 유연다물체동적해석을 통하여 침목패드의 연직강성 변화에 따른 주행안전성, 승차감 및 궤도의 안전성에 대한 지표들과 교량 응답 변화를 검토하였다. 유연다물체동적해석은 상용프로그램인 ABAQUS와 VI-Rail을 이용하여 수행하였다. 수치해석은 30m 상로판형교에 대한 교량모델을 이용하여 수행하였으며, 침목패드의 연직강성이 7.5kN/mm ~ 240kN/mm로 변화할 때 ITX 새마을, KTX 및 화차 통과 시의 응답을 산정하였다. 수치해석에 적용된 궤도구성품 조건에서 침목패드의 최적 강성은 100kN/mm로 산정되었다.

• 한국HCI학회:학술대회논문집
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• 한국HCI학회 2009년도 학술대회
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• pp.508-511
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• 2009

인터렉티브 디지털 스토리텔링은 디지털 기기 등을 이용해 사용자의 반응에 따라 이야기를 진행하는 것을 의미한다. 이는 컴퓨터 등의 디지털 기기를 사용하여 기존에 한 방향으로만 이루어지던 기존의 스토리텔링방법의 한계점을 보환할 수 있고, 사용자가 직접 이야기의 진행 방향이나 방법 등을 선택할 수 있게 하여 이야기에 몰입도를 높일 수 있는 장점이 있다. 우리는 이러한 인터렉티브 디지털 스토리텔링에 마커와 멀티터치 스크린을 사용하였다. 사용자로 하여금 마커를 사용하여 현재 이야기 진행에 따른 흥미도를 선택하게 하고, 멀티터치 스크린을 통해 다양한 사용자 반응을 입력받아 이야기를 진행 할 수 있는 방법을 제안하고자 한다.