• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.7
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• pp.311-315
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• 2002

Chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric(IMD), inter-level dielectric (ILD) layers of multi-layer interconnections. In this paper, we studied the characteristics of polishing pad, which can apply shallow trench isolation (STI)-CMP process for global planarization of multi-level interconnection structure. Also, we investigated the effects of different sets of polishing pad, such as soft and hard pad. As an experimental result, hard pad showed center-fast type, and soft pad showed edge-fast type. Totally, the defect level has shown little difference, however, the counts of scratch was detected less than 2 on JR111 pad. Through the above results, we can select optimum polishing pad, so we can expect the improvements of throughput and device yield.

• Journal of the Korean Society for Railway
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• v.16 no.6
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• pp.466-472
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• 2013

The use of a concrete track is gradually growing in urban and high-speed railways in many part of the world. The resilient pad, which is essentially when concrete tracks are used, plays the important role of relieving the impact caused by train loads. The simple fatigue test[1] to estimate the variable stiffness of resilient pads is usually performed, but it differs depending on the practical conditions of different railways. In this study, the static stiffness levels of used resilient pads according to passing tonnages levels were measured in laboratory tests. Also, the simple fatigue test and the multi-stress accelerated degradation test for new resilient pads were performed in a laboratory. The static stiffness of the used pad was compared with the results of tests of usage times and cycles. The results of the comparison showed that the variable static stiffness levels of the used pad were similar to results of the multi-stress accelerated degradation test considering the fatigue and heat load. With a T-NT equation related to the degree of the multi-stress accelerated degradation, a model of multi-stress accelerated degradation for a resilient pad was devised. It was found through this effort that the total acceleration factor was approximately 2.62. Finally, this study proposes an equation for a multi-stress accelerated degradation model for polyurethane resilient pads.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.7
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• pp.22-29
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• 2004

As a result of high integration of semiconductor device, the global planarization of multi-layer structures is necessary. So the chemical mechanical polishing(CMP) is widely applied to manufacturing the dielectric layer and metal line in the semiconductor device. CMP process is under influence of polisher, pad, slurry, and process itself, etc. In comparison with the general CMP which uses the slurry including abrasives, fixed abrasive pad takes advantage of planarity, resulting from decreasing pattern selectivity and defects such as dishing & erosion due to the reduction of abrasive concentration especially. This paper introduces the manufacturing technique of fixed abrasive pad using hydrophilic polymers with swelling characteristic in water and explains the self-conditioning phenomenon. And the tungsten CMP using fixed abrasive pad achieved the good conclusion in terms of the removal rate, non-uniformity, surface roughness, material selectivity, micro-scratch free contemporary with the pad life-time.

• Journal of the Korea Safety Management & Science
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• v.17 no.2
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• pp.235-240
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• 2015

Using a progressive die of the multi-stage drawing product, It was experiments for the Influence of the Products Roundness on the die pad process Safety die model, obstacle countermeasure research safety die design When the die pad is independent structure, Sidewall thickness of the inside 2stage, 3stage, 4stage of the product is thicker, the thickness of the inside 1stage and the bottom is thinner. it was become unstable beacuse the inside 1stage related to the Products Roundness is thinner. When the die pad is Integrated structure, Sidewall thickness of the inside 1stage, 2stage of the product is thicker, and Sidewall 3stage and 4stage was a thin. it was become unstable beacuse the inside 3stage related to the Products Roundness is thinner. Therefore, The appropriate combination of and integrated independent is required for each process.

• Journal of Sensor Science and Technology
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• v.17 no.5
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• pp.387-395
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• 2008

An optic module system is developed adopting multiple colorimetry units for the measurement of multi-pad urinalysis dipsticks. Multiple photometry system instead of moving mechanisms has the advantages of system reliability and simplicity as well as economic aspects due to the recent development of economic color light emitting diodes and stable photo sensors. An integration amplifier with programmable integration time, a current source circuit with selectable and stable current settings were connected through analog multiplexers to thirty light emitting diodes for illumination and ten photo transistors for reading each strip pad. All the circuits are controlled by a microprocessor through a simple set of serial communication commands. The detect ability is eighteen times better than the minimum color difference of the test grading which is 0.013 in urobilinogen in the color space defined in this paper.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.463-464
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• 2013

• Journal of the Korean Society for Precision Engineering
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• v.25 no.8
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• pp.37-44
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• 2008

Nowadays, the increasing global competition forces manufacturer to reduce the cost and time for implementation of manufacturing system. The AR(augmented reality) technology as a new human-machine interface introduces a noteworthy perspective for a new manufacturing system design. Using AR technology, a physically existing production environment can be superimposed with virtual planning objects. Therefore, the planning tasks can be validated without modeling the surrounding environment of the production domain during short process planning time. In this paper, we introduce the construction of AR browser and determine the optimal environment parameters for field application of AR system through lots of tests. And, many methods such as multi-marker coordinate system, division of virtual objects and so on, are proposed in order to solve the problems suggested from initial field test. Based on these tests and results, the test-bed of C/Pad assembly system is configured and robot program for C/Pad assembly is generated based on AR system.

• Journal of the Korean Society of Environmental Restoration Technology
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• v.21 no.1
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• pp.133-143
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• 2018

In spite of the growing importance of landscaping trees, the rate of flawed and withered trees damaged by pest, disease, drought or frost is increasing. In order to evaluate the performance of the Tree Protective Pad, which are developed to reduce the failure ratio in landscape planting, the tree protective pad for 'digging', 'pest controlling', and 'insulating' are tested based on the five functional criteria; moisturizing effect, wither preventive effect, pest and disease control, thermal effect, tensile strength, and environmental performance. The result of this study is as follows. The moisturizing effect of the tree protective pad for digging is found to be outstanding. According to the result of testing the pad on trees, in particular, it is better than jute tape in wither preventive effect, which means it is expected to prevent flaw and wilt from planting during the improper seasons like summertime. The experiment of installing the protective tree pad for pest controlling to the trunk of Quercus mongolica shows that preventive effect of the pad from diseases and insects is superior, and it also has economical effect by reducing the use of agricultural chemicals. The comparative test of the pad for insulating and jute tape proves that the temperature of the pad is about $2^{\circ}C$ higher than outside. The rate of tensile strength and biodegradation of the pad exceeds the optimal level, so it is revealed that the pad may be the work efficient and environment-friendly product. Likewise, by timely irrigating trees, the tree protective pad economically prevents trees from pest, disease,drought or frost, which may be caused by improper seasonal or delayed planting. As a means of reducing the flaw and facilitating the growth of trees, the exceptional performance of the pad is expected to effectively used in landscape planting and management.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.35 no.2
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• pp.131-140
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• 2022

Installing Continuous Welded Rail (CWR) is one of the economical ways to resolve the challenges of noise, vibration, and the open-deck steel railway bridge impact, and the SSF method using the interlocking sleeper fastener has recently been developed. In this study, the method employed for determining the optimum vertical stiffness of the sleeper pad installed under the bridge sleeper, which is utilized to adjust the rail height and absorb shock when the train passes when the interlocking sleeper fastener is applied, is presented. To determine the optimal vertical stiffness of the sleeper pad, related existing design codes are reviewed, and, running safety, ride comfort, track safety, and bridge vibration according to the change in the vertical stiffness of the sleeper pad are estimated via flexible multi-body dynamic analysis,. The flexible multi-body dynamic analysis is performed using commercial programs ABAQUS and VI-Rail. The numerical analysis is conducted using the bridge model for a 30m-long plate girder bridge, and the response is calculated when passing ITX Saemaeul and KTX vehicles and freight wagon when the vertical stiffness of the sleeper pad is altered from 7.5 kN/mm to 240 kN/mm. The optimum stiffness of the sleeper pad is calculated as 200 kN/mm under the conditions of the track components applied to the numerical analysis.

• 한국HCI학회:학술대회논문집
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• 2009.02a
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• pp.508-511
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• 2009

In Interactive Storytelling, storyline is developed according to the user's interaction. Diffrerent from linear, fixed storytelling, users may select an event or make decisions which affect on the story plotting. Therefore user's feeling of immersion and interest may be greatly enhanced. In this paper, we used markers and multi-touch pad for user's interaction for interactive storytelling. Users could present his/her level of interest and provide feedback through markers and multi-touch pad, through which storyline was differently developed.