• Current Applied Physics
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• v.18 no.11
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• pp.1436-1440
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• 2018

SiN and SiCN film production using plasma-enhanced atomic layer deposition (PE-ALD) is investigated in this study. A developed high-power and high-density multiple inductively coupled plasma (multi-ICP) source is used for a low temperature PE-ALD process. High plasma density and good uniformity are obtained by high power $N_2$ plasma discharge. Silicon nitride films are deposited on a 300-mm wafer using the PE-ALD method at low temperature. To analyze the quality of the SiN and SiCN films, the wet etch rate, refractive index, and growth rate of the thin films are measured. Experiments are performed by changing the applied power and the process temperature ($300-500^{\circ}C$).

• Journal of the Korean Vacuum Society
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• v.18 no.3
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• pp.164-175
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• 2009

CFD is used to analyze gas flow characteristics, power absorption, electron temperature, electron density and chemical species profile of an internal antenna type inductively coupled plasma system. An optimized grid generation technology is used for a complex real-scale models for industry. A bare metal antenna shows concentrated power absorption around rf a feeding line. Skin depth of power absorption for a system is modeled to 50 mm, which is reported 53 mm by experiments. For an application of bipolar plates for hydrogen fuel cells, multi-sheet loading ICP nitriding system is proposed using an internal ICP antenna. It shows higher atomic nitrogen density than reported simple pulsed dc nitriding systems. Minimum gap between sheets for uniform nitriding is modeled to be 39 mm.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.25 no.3
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• pp.392-404
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• 2015

Objectives: This study measured and analyzed the concentrations of crystalline silica, elemental carbon and the contribution ratio of pollutants which influence environmental and respiratory disease around the Ansim Briquette Fuel Complex in Daegu, Korea. Methods: We analyzed the crystalline silica and elemental carbon in the air according to FTIR(Fourier Transform Infrared Spectroscopy) and NIOSH(National Institute of Occupation Safety and Health) method 5040, respectively. In addition, lead stable isotopes, and carbon and nitrogen stable isotopes were analyzed using MC-ICP/MS(Multi Collector-Inductively Coupled Plasma/Mass Spectrometer), and IRMS(Isotope Ratio Mass Spectrometer), respectively. Results: The concentration of crystalline silica in the direct exposure area around the Ansim Briquette Fuel Complex was found to be $0.0014{\pm}0.0005mg/Sm^3$, but not to exceed the exposure standards of the ACGIH(American Conference of Governmental Industrial Hygienists). In the case of the autumn, the direct exposure area was found to show a level 2.5 times higher than the reference area, and on the whole, the direct exposure area was found to have a level 1.4 times higher than the reference area. The concentration of elemental carbon in the direct exposure area and in the reference area were found to be $0.0014{\pm}0.0006mg/Sm^3$, and $0.0006{\pm}0.0003mg/Sm^3$, respectively. This study confirmed the contribution ratio of coal raw materials to residentially deposited dusts in the area within 500 meters from the Ansim Briquette Fuel Complex and the surrounding area with a stable isotope ratio of 24.0%(0.7-62.7%) on average in the case of carbon and nitrogen, and 33.9%(26.6-54.1%) on average in the case of lead stable isotopes. Conclusions: This study was able to confirm correlations with coal raw materials used by the Ansim Briquette Fuel Complex and the surrounding area. The concentration of some pollutants, crystalline silica, and elemental carbon emitted to the direct-influence area around the Ansim Briquette Fuel Complex were relatively higher than in the reference area. Therefore, we need to impose continuous and substantive reduction countermeasures in the future to prevent particulate matter and coal raw materials in the study area. It is time for the local government and authorities to prepare active administrative methods such as the relocation of Ansim Briquette Fuel Complex.