• Current Applied Physics
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• 제18권11호
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• pp.1436-1440
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• 2018

SiN and SiCN film production using plasma-enhanced atomic layer deposition (PE-ALD) is investigated in this study. A developed high-power and high-density multiple inductively coupled plasma (multi-ICP) source is used for a low temperature PE-ALD process. High plasma density and good uniformity are obtained by high power $N_2$ plasma discharge. Silicon nitride films are deposited on a 300-mm wafer using the PE-ALD method at low temperature. To analyze the quality of the SiN and SiCN films, the wet etch rate, refractive index, and growth rate of the thin films are measured. Experiments are performed by changing the applied power and the process temperature ($300-500^{\circ}C$).

• 한국진공학회지
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• 제18권3호
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• pp.164-175
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• 2009

전산 유체 역학 코드를 사용하여 안테나 내장형 유도 결합 플라즈마 시스템의 가스 유동 특성, 전력 흡수, 전자 온도, 전자 밀도, 화학종의 분포에 대해서 살펴보았다. 복잡한 현실적 3차원 시스템에 대한 안정한 수치해의 도출을 위해서 최적화된 격자생성 전략을 구사하였으며, 이를 이용하여 플라즈마 질화 시스템을 한 예로 전력 흡수, 가스 유동, 전자 온도, 전자 밀도, 화학종의 분포를 분석하였다. 금속 노출형 안테나의 경우 전력 도입부 쪽에 전력 흡수의 불균형이 모델에서 예측되었으며 유전체피복 안테나의 한 예에서 전력 흡수 표피 깊이가 실제 보고된 값인 53 mm와 잘 일치하는 50 mm로 예측되었다. 또한 수소연료 전지 분리판을 위한 고속 질화 공정용 시스템의 모델링에서도 산업용 대량 처리 시스템에 적절한 다중 분리판의 장입 간격을 가스 유동, 활발한 질화종인 질소 원자와 질소 분자 이온의 농도를 근거로 예측하였다.

• 한국산업보건학회지
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• 제25권3호
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• pp.392-404
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• 2015

Objectives: This study measured and analyzed the concentrations of crystalline silica, elemental carbon and the contribution ratio of pollutants which influence environmental and respiratory disease around the Ansim Briquette Fuel Complex in Daegu, Korea. Methods: We analyzed the crystalline silica and elemental carbon in the air according to FTIR(Fourier Transform Infrared Spectroscopy) and NIOSH(National Institute of Occupation Safety and Health) method 5040, respectively. In addition, lead stable isotopes, and carbon and nitrogen stable isotopes were analyzed using MC-ICP/MS(Multi Collector-Inductively Coupled Plasma/Mass Spectrometer), and IRMS(Isotope Ratio Mass Spectrometer), respectively. Results: The concentration of crystalline silica in the direct exposure area around the Ansim Briquette Fuel Complex was found to be $0.0014{\pm}0.0005mg/Sm^3$, but not to exceed the exposure standards of the ACGIH(American Conference of Governmental Industrial Hygienists). In the case of the autumn, the direct exposure area was found to show a level 2.5 times higher than the reference area, and on the whole, the direct exposure area was found to have a level 1.4 times higher than the reference area. The concentration of elemental carbon in the direct exposure area and in the reference area were found to be $0.0014{\pm}0.0006mg/Sm^3$, and $0.0006{\pm}0.0003mg/Sm^3$, respectively. This study confirmed the contribution ratio of coal raw materials to residentially deposited dusts in the area within 500 meters from the Ansim Briquette Fuel Complex and the surrounding area with a stable isotope ratio of 24.0%(0.7-62.7%) on average in the case of carbon and nitrogen, and 33.9%(26.6-54.1%) on average in the case of lead stable isotopes. Conclusions: This study was able to confirm correlations with coal raw materials used by the Ansim Briquette Fuel Complex and the surrounding area. The concentration of some pollutants, crystalline silica, and elemental carbon emitted to the direct-influence area around the Ansim Briquette Fuel Complex were relatively higher than in the reference area. Therefore, we need to impose continuous and substantive reduction countermeasures in the future to prevent particulate matter and coal raw materials in the study area. It is time for the local government and authorities to prepare active administrative methods such as the relocation of Ansim Briquette Fuel Complex.