• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.490-490
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• 2013

In semiconductor industry, it is expected that plasma process which use 450 mm source will be used at next generation. However, main obstacle of the large area plasma source is plasma uniformity from it. When electrode is enlarged, field difference between center area and side area reduces the plasma uniformity [1-3]. Therefore we investigate multi-electrode which diminish this field difference.We designed two multi-electrode models. One has two segments and the other has five segments. Each multi-electrode model is connected with two power generator and two matchers. One generator and one matcher is connected with center electrode part. The other one generator and the other one matcher is connected with side electrode part. The ion density is measured at 29 points by using floating harmonic method [4-6]. After measuring the data of each multi-electrode model, we discuss the difference of profile between two models' data.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.5
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• pp.496-501
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• 2009

In micro electrochemical machining(micro-ECM), it is important to measure and control the potential of a tool electrode and a workpiece electrode because electrochemical reaction rate depends on the potential of the electrodes. When the electrode potential was measured against a reference electrode, the error of measured electrode potential could be minimized by proper tool electrode design. In this paper, multi-function electrodes consisting of a tool electrode and a reference electrode was fabricated by micro fabrication techniques. The machining conditions in micro-ECM using multi-function electrodes, such as pulse voltage parameters and electrode potential, were investigated.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.51 no.9
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• pp.423-430
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• 2002

The fabrication and experimentation of multi-channel electrodes which enable detecting and recording of multi-site neuronal signals have been investigated. A multi-channel electrode array was fabricated by depositing 2000${\AA}$ thick Au layer on the 1000${\AA}$ thick Ti adhesion layer on a glass wafer. The metal paths were patterned by wet etching and passivated by depositing a PECVD silicon nitride insulation layer to prevent signals from intermixing or cross-talking. After placing a thin slice of rat cerebellar granule cell in the culture ring located in central portion of the multi-channel electrode plate, a neuronal signal from an electrode which is in contact with the cerebellar granule cell has been detected. It was found that the electrode impedance ranges 200㏀∼1㏁ and the impedance is not changed by cleaning with nitric acid. Also, the impedance is inversely proportion to the exposed electrode area and the cross-talk is negligible when the electrode spacing is bigger than 600$\mu\textrm{m}$. The amplitude and frequency of the measured action potential were 38㎷ and 2㎑, which are typical values. From the experimental results, the fabricated multi-channel electrode array proved to be suitable for multi-site neuronal signal detection for the analysis of a complicated cell network.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.145-145
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• 2011

Recently, multi-hole electrode RF capacitively coupled plasma discharge is being used in the deposition of microcrystalline silicon for thin film solar cell to increase the speed of deposition. To make efficient multi-hole electrode RF capacitively coupled plasma discharge, the hole diameter is to be designed concerning the plasma parameters. In past studies, the relationship between plasma parameters such as pressures and gas species, and hole diameter for efficient plasma density enhancement is experimentally shown. In the presentation, the relationship between plasma deriving frequency and hole diameter for efficient multi-hole electrode RF capacitively coupled plasma discharge is shown. In usual capacitively coupled plasma discharge, plasma parameter, such as plasma density, plasma impedence and plasma temperature, change as frequency increases. Because of the change, the optimum hole diameter of the multi-hole electrode RF capacitively coupled plasma for high density plasma is thought to be modified when the plasma deriving frequency changes. To see the frequency effect on the multi-hole RF capacitively coupled plasma is discharged and one of its electrode is changed from a plane electrode to a variety of multi-hole electrodes with different hole diameters. The discharge is derived by RF power source with various frequency and the plasma parameter is measured with RF compensated single Langmuir probe. The shrinkage of the hole diameter for efficient discharge is observed as the plasma deriving frequency increases.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.247.1-247.1
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• 2014

The capacitive coupled plasma is used widely in the semiconductor industries. Especially, the uniformity of the industrial plasma is heavily related with defect ratio of devices. Therefore, the industries need the capacitive coupled plasma source which can generate the uniform plasma and control the plasma's uniformity. To achieving the uniformity of the large area plasma, we designed multi-powered electrodes. We controlled the uniformity by controlling the power of each electrode. After this work, we started to research another concept of the plasma device. We make the plasma chamber that has multi-ground electrodes imaginary (CST microwave studio) and simulate the electric field. The shape of the multi-ground electrodes is ring type, and it is same as the shape of the multi-power electrodes that we researched before. The diameter of the side electrode's edge is 300mm. We assumed that the plasma uniformity is related with the impedance of ground electrodes. Therefore we simulated the imaginary chamber in three cases. First, we connected L (inductor) and C (capacitor) at the center of multi-ground electrodes. Second, we changed electric conductivity of multi-ground electrode. Third, we changed the insulator's thickness between the center ground electrode and the side ground electrode. The driving frequency is 2, 13.56 and 100 MHz. We switched our multi-powered electrode system to multi-ground electrode system. After switching, we measured the plasma uniformity after installing a variable vacuum capacitor at the ground line. We investigate the effect of ground electrodes' impedance to plasma uniformity.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.7
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• pp.533-541
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• 1999

Multi-discharge type ozonizer(MDO) using superposed silent discharge has been designed and manufactured. It consists of three electrodes( central electrode, internal electrode, and external electrode ) and double gaps( gap between central electrode and internal electrode, gap between internal electrode and external electrode ). Therefore, ozone is generated by superposing silent discharges generated between the gaps respectively. And the MDO consists of three types of superposed discharge ozonizers according to voltage appling method for each electrode ; A.C. high voltages are applied two of three electrodes with phase difference of 180[˚], the other electrode is a ground. This paper describes that discharge and ozone generation characteristics of MDO which comprising central electrode and internal electrode applied A.C. high voltages with phase difference of 180[˚] respectively, and the grounded external electrode. As a result, the maximum ozone concentration, generation, and yield can be obtained 10208[ppm], 6.4[g/h], and 280[g/kwh] respectively.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.5
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• pp.88-93
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• 2012

This paper describes the machinability of the sintered carbide and tool-die steel(STD-11) by electric discharge drilling with various tubular electrodes which have multi-holes. Various types of electrode which have different diameters and materials are used with the application of continuous direct current and axial electrode feed. Inner part of electrodes are inserted with smaller tubes or Y-channel or bar. In ED-Drilling, the dielectric flushed down the interior of the rotating tube electrode, in order to remove machining debris from the hole. As result of experiments, the bigger the diameter of the electrode is, the lower the material removal rate is. Machinability of copper electrode is higher than that of brass. In machining of sintered carbide, to use oil is better than distilled water as dielectric.

• Journal of Biomedical Engineering Research
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• v.27 no.6
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• pp.409-417
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• 2006

Research on neural circuit is a difficult area due to complexity and inaccessibility. Due to recent developments, the research using multi-electrode array of cells or tissues has become an important research area. However, there are some difficulties to decode the submerged meaning from huge and complex neural data. Moreover, it needs a harmonic collaboration between informatics and bioscience. In this paper, we have developed a custom-designed signal processing technique for multi-electrode array measured neural responses induced by electrical stimuli to the hippocampal tissue slices of the rat brain. The raw data from hippocampal slice using the multi-electrode array system were saved in a computer. Then we estimated characteristic points in each channel and calculated the total activity. To estimate the points, we used the Polynomial Fitting Approximation Method. Using the calculated total activity, we could provide the histogram or pseudo-image matrix to help interpretation of results.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.30 no.3
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• pp.59-64
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• 2016

Applications of electrolytic ion water generated by the oxidation-reduction have gradually been expanded due to their strong sterilizing power and a surface active force. We demonstrate the effect of the multi-layer type electrode for effective ion water generation. The multi-layer type electrode has ability to generate stronger acid and alkali water by increase of the electrode reactive area. Also power consumption efficiency enhances because the electrodes disposed in middle position of the reactive cell raise the usage rate by overlapped effect as an electrolysis electrode.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.1103-1104
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• 2011