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Micro Electrochemical Machining Using a Multi-Function Electrode

복합기능 전극을 이용한 미세 전해가공

  • 신홍식 (서울대학교 기계항공공학부) ;
  • 김보현 (안동대학교 기계공학부) ;
  • 김규만 (경북대학교 기계공학부) ;
  • 정도관 (서울대학교 기계항공공학부) ;
  • 주종남 (서울대학교 기계항공공학부)
  • Published : 2009.05.01

Abstract

In micro electrochemical machining(micro-ECM), it is important to measure and control the potential of a tool electrode and a workpiece electrode because electrochemical reaction rate depends on the potential of the electrodes. When the electrode potential was measured against a reference electrode, the error of measured electrode potential could be minimized by proper tool electrode design. In this paper, multi-function electrodes consisting of a tool electrode and a reference electrode was fabricated by micro fabrication techniques. The machining conditions in micro-ECM using multi-function electrodes, such as pulse voltage parameters and electrode potential, were investigated.

Keywords

References

  1. Datta, M., and Landolt, D., 2000, 'Fundamental Aspects and Applications of Electrochemical Micro Fabrication,' Electrochimica Acta, Vol. 45, pp. 2535-2558 https://doi.org/10.1016/S0013-4686(00)00350-9
  2. Schuster, R., Kirchner, V., Allongue, P., and Ertl, G., 2000, 'Electrochemical Micromachining,' Science, Vol. 289, pp. 98-101 https://doi.org/10.1126/science.289.5476.98
  3. Kirchner, V., Cagnon, L., Schuster, R., and Gerhard, E., 2001, 'Electrochemical Machining of Stainless Steel Microelements with Ultarashort Voltage Pulses,' Applied Physics Letters, Vol. 79, No. 11, pp. 1721-1723 https://doi.org/10.1063/1.1401783
  4. Kim, B. H., Lee, Y. S., Choi, D. K., and Chu, C. N., 2005, 'Taper Reduction in Micro Electrochemical Milling Using Disk Type Electrode,' Journal of the Korean Society for Precision Engineering, Vol. 22, No. 4, pp. 167-172
  5. Park, B. J., 2006, 'Effects of Tool Electrode Size on Micro Electrochemical Machining Using Ultra Short Pulses,' PhD Dissertation Seoul National University
  6. Bard., J. and Faulkner., Larry R., 2001, 'Electrochemical Methods Fundamentals and Applications,' John Wiley & Sons, INC
  7. Paik, W. K. and Park, S. M., 2001, 'Electrochemistry: Science and Technology of Electrode Processes,' Cheongmoongak, Seoul
  8. Kim, B. H., Ryu, S. H., Choi, D. K. and Chu, C. N., 2005, 'Micro Electrochemical Milling,' Journal of Micromechanics and Microengineering., Vol. 15, No. 1, pp. 124-129 https://doi.org/10.1088/0960-1317/15/1/019