• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.74-74
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• 2009

The ArF PR mask was. developed to overcome the limit. of sub 40nm patterning technology with KrF PR. But ArF PR difficult to meet the required PR selectivity by thin PR thickness. So need to the multi-stack mask such as amorphous carbon layer (ACL). Generally capacitively coupled plasma (CCP) etcher difficult to make the high density plasma and inductively coupled plasma (ICP) type etcher is more suitable for multi stack mask etching. Hybrid Coupled Plasma source (HCPs) etcher using the 13.56MHz RF power for ICP source and 2MHz and 27.12MHz for bias power was adopted to improve the process capability and controllability of ion density and energy independently. In the study, the oxide trench which has the multi stack layer process was investigated with the HCPs etcher (iGeminus-600 model DMS Corporation). The results were analyzed by scanning electron microscope (SEM) and it was found that etching characteristic of oxide trench profile depend on the multi-stack mask.

• 한국통신학회논문지
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• 제36권8B호
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• pp.1003-1011
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• 2011

본 논문에서는 우선 센서네트워크를 기반으로 실시간 다중소스 센서데이터 관리시스템을 제안하고 구현하였다. 제안된 관리시스템은 대상시스템의 상태를 효율적으로 감시하고 제어하기 위해서 다수의 센서들로부터 수집된 실시간 데이터를 무선으로 서버로 전송하며, 이를 분석하여 동작하도록 설계되었다. 제안된 시스템은 원격지에서 세포배양장치와 같은 다중 소스 센서들을 클러스터 형태로 구성하고, 이들로부터 발생하는 센서데이터를 제어, 전송하며, 각 소스로부터 수신된 데이터를 소스별로 구분하여 관리가 가능하도록 구현하였다. 제안된 시스템의 성능을 평가하기 위해서 전송거리에 따른 전송 지연시간과 다중소스로부터 발생된 데이터 손실률을 측정하여 분석하였으며, 그 결과 우수한 성능을 보임을 확인하였다.

• 대한기계학회논문집
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• 제10권4호
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• pp.442-449
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• 1986

본 연구에서는 소음원 및 진동원을 규명하기 위하여 사용되어 온 종래의 주파 수응답함수(Frequency Response Function`FRF)법과 소음원 및 진동원 간에 강한 상관 관계가 존재한 경우에 사용되는 기여도함수(coherence function)법을 이용한 다차원 스텍트럼해석(Multi-Dimensional Spectral Analysis`MDSA)법에 의하여 가속도응답 및 방사음과의 기여관계를 규명하였다.

• 한국관개배수논문집
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• 제10권1호
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• pp.44-52
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• 2003

This study surveyed farming condition and the effects of nonpoint source pollution loading by cultivating in the flood control area of multi-purpose dams. According to the multi-purpose dam management regulation, cultivation can be permitted between norma

• 대한전기학회논문지
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• 제36권8호
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• pp.539-546
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• 1987

In case of operating at Variable speed the induction motor by a frequency transformer, it will cause ripples in motor torque and considerably bad effects on the machines because the output side of the frequency transformer involves a great number of harmonics. This paper Presents the methods of decreasing torque ripples in induction motor and of improving current waveform, by means of forming the waveforms of output current into multi-step waveforms similiar to sinusoid, and also by means of eliminating the harmonic components maximally, in case of operating a 18-phase multi-inverter combining 3-step current source inverter.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.1063-1064
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• 2011

• The Journal of the Acoustical Society of Korea
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• 제28권3E호
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• pp.79-87
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• 2009

This paper reviews several multi-source localization methods which estimate ITDs based on zero crossings (ZCs). Employing signal-to-noise ratio (SNR) estimation from ITD variances, these ZC-based source localization methods are more robust to diffuse noise than the cross-correlation (CC)-based one with less computational complexity. In order to take reverberant environments into account, two approaches detect intervals which dominantly contain direct-path components from sources to sensors because they may effectively provide reliable ITDDs corresponding to source directions. One accomplishes the detection by comparing the original and cepstral-prefiltering-processed envelopes, and the other searches sudden increase of acoustic energy by considering typical characteristics of acoustic reverberation. Experiments for comparison of these methods demonstrate that the approach with energy-based detection efficiently achieves multi-source localization in reverberant environments.

• 대한전자공학회논문지
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• 제26권9호
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• pp.1436-1443
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• 1989

In this paper, we propose a maximum-likelihood estimation(MLE) method to obtain the location and the amplitude of the pulses in MPE( multi-pulse excitation)-LPC speech synthesis using multi-pulses as excitation source. This MLE method computes the value maximizing the likelihood function with respect to unknown parameters(amplitude and position of the pulses) for the observed data sequence. Thus in the case of overlapped pulses, the method is equivalent to Ozawa's crosscorrelation method, resulting in equal amount of computation and sound quality with the cross-correlation method. We show by computer simulation: the multi-pulses obtained by MLE method are(1) pseudo-periodic in pitch in the case of voicde sound, (2) the pulses are random for unvoiced sound, (3) the pulses change from random to periodic in the interval where the original speech signal changes from unvoiced to voiced. Short time power specta of original speech and syunthesized speech obtained by using multi-pulses as excitation source are quite similar to each other at the formants.

• 한국전기전자재료학회논문지
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• 제19권10호
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• pp.942-946
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• 2006

We simulated insulation defects of stator winding wire on high voltage generator by 5 types. 4 types have one discharge source and other one has multi discharge source by simulation. For accurate decision, measurements used to PRPD pattern to occurred partial discharge source of various types. In this research, when PRPD pattern carried out or analyzed pattern recognition of discharge source, it used to powerful tools. In this result, PRPD Pattern defined to have single discharge source of 4 types by insulation defect. When insulation defect simulated, all the defected winding have not the same result. Errors for a little different can make mistakes from a subtle distinction. The difference between internal and void discharge have magnitude of pulse amplitude of inner discharge bigger than void discharge and have a shape of bisymmetry. But void discharge has a shape of bisymmetry against maximum value on polarity respectively. In cases of slot and surface discharge, we confirmed to show similar results those other researchers. In case of multi-discharge, as a result of we could classify not perfect match with occurred patterns in single discharge eachother. In the future, we will have to recognize and classify with results of multi-discharge.

• 대한의용생체공학회:의공학회지
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• 제20권3호
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• pp.291-297
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• 1999

다채널의 심전도 신호에서, 소수의 리이드에 만 잡음이 유기되고 나머지 대부분의 리이드 신호들은 이 잡음과 통계적인 상관 관계가 없을 때, source consistency filtering(SCF) 은 이러한 잡음의 감쇄에 매우 효과적이다. 특히, SCF는 원래 신호의 왜곡을 최소화하면서 , 선택적으로 잡음 만을 제거하는 매우 우수한 특성을 가진다. 이러한 특성은 하나의 신호원에서 기인하는 다채널 신호들의 공간적 및 시간적 상관관계를 모두 이용함으로서 가능하다. 본 논문에서는 SCF의 원리 및 구현 방법을 구체적으로 기술하여 이 방법에 대한 이해를 증진하고자 한다. 또한 기존의 방법을 개선한 새로운 SCF를 제안하였으며 , 이의 효과적인 구현에 필요한 알고리즘의 상세한 설계 지침을 제시하였다. 다채널의 심전도 신호를 대상으로 하여 그 성능을 검증하였고, 현재의 SCF 가 가지는 한계를 명확히 하며, 개선의 방향을 제시하였다.