• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.74-74
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• 2009

The ArF PR mask was. developed to overcome the limit. of sub 40nm patterning technology with KrF PR. But ArF PR difficult to meet the required PR selectivity by thin PR thickness. So need to the multi-stack mask such as amorphous carbon layer (ACL). Generally capacitively coupled plasma (CCP) etcher difficult to make the high density plasma and inductively coupled plasma (ICP) type etcher is more suitable for multi stack mask etching. Hybrid Coupled Plasma source (HCPs) etcher using the 13.56MHz RF power for ICP source and 2MHz and 27.12MHz for bias power was adopted to improve the process capability and controllability of ion density and energy independently. In the study, the oxide trench which has the multi stack layer process was investigated with the HCPs etcher (iGeminus-600 model DMS Corporation). The results were analyzed by scanning electron microscope (SEM) and it was found that etching characteristic of oxide trench profile depend on the multi-stack mask.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.36 no.8B
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• pp.1003-1011
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• 2011

In this paper, a real-time multi-source sensor data management system based on wireless sensor network is proposed and implemented. The proposed management system is designed to transmit the wireless data to the server in order to monitor and control the multi-source target's status efficiently by analyzing them. The proposed system is implemented to make it possible to control and transmit the wireless sensor data by classifying them, of which data are issued from the clustered sources composed of a number of the remote multiple sensors. In order to evaluate the performance of the proposed system, we measure and analyze both the transmission delay time according to the distance and the data loss rate issued from multiple data sources. From these results, it is verified that the proposed system has a good performance.

• Transactions of the Korean Society of Mechanical Engineers
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• v.10 no.4
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• pp.442-449
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• 1986

본 연구에서는 소음원 및 진동원을 규명하기 위하여 사용되어 온 종래의 주파 수응답함수(Frequency Response Function`FRF)법과 소음원 및 진동원 간에 강한 상관 관계가 존재한 경우에 사용되는 기여도함수(coherence function)법을 이용한 다차원 스텍트럼해석(Multi-Dimensional Spectral Analysis`MDSA)법에 의하여 가속도응답 및 방사음과의 기여관계를 규명하였다.

• KCID journal
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• v.10 no.1
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• pp.44-52
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• 2003

This study surveyed farming condition and the effects of nonpoint source pollution loading by cultivating in the flood control area of multi-purpose dams. According to the multi-purpose dam management regulation, cultivation can be permitted between norma

• The Transactions of the Korean Institute of Electrical Engineers
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• v.36 no.8
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• pp.539-546
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• 1987

In case of operating at Variable speed the induction motor by a frequency transformer, it will cause ripples in motor torque and considerably bad effects on the machines because the output side of the frequency transformer involves a great number of harmonics. This paper Presents the methods of decreasing torque ripples in induction motor and of improving current waveform, by means of forming the waveforms of output current into multi-step waveforms similiar to sinusoid, and also by means of eliminating the harmonic components maximally, in case of operating a 18-phase multi-inverter combining 3-step current source inverter.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.1063-1064
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• 2011

• The Journal of the Acoustical Society of Korea
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• v.28 no.3E
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• pp.79-87
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• 2009

This paper reviews several multi-source localization methods which estimate ITDs based on zero crossings (ZCs). Employing signal-to-noise ratio (SNR) estimation from ITD variances, these ZC-based source localization methods are more robust to diffuse noise than the cross-correlation (CC)-based one with less computational complexity. In order to take reverberant environments into account, two approaches detect intervals which dominantly contain direct-path components from sources to sensors because they may effectively provide reliable ITDDs corresponding to source directions. One accomplishes the detection by comparing the original and cepstral-prefiltering-processed envelopes, and the other searches sudden increase of acoustic energy by considering typical characteristics of acoustic reverberation. Experiments for comparison of these methods demonstrate that the approach with energy-based detection efficiently achieves multi-source localization in reverberant environments.

• Journal of the Korean Institute of Telematics and Electronics
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• v.26 no.9
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• pp.1436-1443
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• 1989

In this paper, we propose a maximum-likelihood estimation(MLE) method to obtain the location and the amplitude of the pulses in MPE( multi-pulse excitation)-LPC speech synthesis using multi-pulses as excitation source. This MLE method computes the value maximizing the likelihood function with respect to unknown parameters(amplitude and position of the pulses) for the observed data sequence. Thus in the case of overlapped pulses, the method is equivalent to Ozawa's crosscorrelation method, resulting in equal amount of computation and sound quality with the cross-correlation method. We show by computer simulation: the multi-pulses obtained by MLE method are(1) pseudo-periodic in pitch in the case of voicde sound, (2) the pulses are random for unvoiced sound, (3) the pulses change from random to periodic in the interval where the original speech signal changes from unvoiced to voiced. Short time power specta of original speech and syunthesized speech obtained by using multi-pulses as excitation source are quite similar to each other at the formants.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.10
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• pp.942-946
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• 2006

We simulated insulation defects of stator winding wire on high voltage generator by 5 types. 4 types have one discharge source and other one has multi discharge source by simulation. For accurate decision, measurements used to PRPD pattern to occurred partial discharge source of various types. In this research, when PRPD pattern carried out or analyzed pattern recognition of discharge source, it used to powerful tools. In this result, PRPD Pattern defined to have single discharge source of 4 types by insulation defect. When insulation defect simulated, all the defected winding have not the same result. Errors for a little different can make mistakes from a subtle distinction. The difference between internal and void discharge have magnitude of pulse amplitude of inner discharge bigger than void discharge and have a shape of bisymmetry. But void discharge has a shape of bisymmetry against maximum value on polarity respectively. In cases of slot and surface discharge, we confirmed to show similar results those other researchers. In case of multi-discharge, as a result of we could classify not perfect match with occurred patterns in single discharge eachother. In the future, we will have to recognize and classify with results of multi-discharge.

• Journal of Biomedical Engineering Research
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• v.20 no.3
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• pp.291-297
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• 1999

Source consislency filtering (SCF) is very effective at removing nOIse when only one or a few leads among multi-lead ECG signals are contaminated. When the noise at one or only a few leads are statistically uncorrelated with signals at other leads, SCF seleclIvely removes the noise with a neglIgIble amount of distortion in the original signal waveform. In order to enhance the understanding of this new method, we describe the lheory and implementational details of SCF in this paper. Numerical implementation and test results of SCF on a multi-lead ECG dalabase show that SCF is a new kind of adaptive filters utilizmg spatial as well as temporal information in multi-c.hannel signals origmatmg from a single source. We also describe the limitations and future improvements in using SCF.