• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.134-134
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• 2011

High-k dielectric materials such as $HfO_2$, $ZrO_2$ and $Al_2O_3$ increase gate capacitance and reduce gate leakage current in MOSFET structures. This behavior suggests that high-k materials will be promise candidates to substitute as a tunnel barrier. Furthermore, stack structure of low-k and high-k tunnel barrier named variable oxide thickness (VARIOT) is more efficient.[1] In this study, we fabricated the $WSi_2$ nanocrystals nonvolatile memory device with $SiO_2/HfO_2/Al_2O_3$ tunnel layer. The $WSi_2$ nano-floating gate capacitors were fabricated on p-type Si (100) wafers. After wafer cleaning, the phosphorus in-situ doped poly-Si layer with a thickness of 100 nm was deposited on isolated active region to confine source and drain. Then, on the gate region defined by using reactive ion etching, the barrier engineered multi-stack tunnel layers of $SiO_2/HfO_2/Al_2O_3$ (2 nm/1 nm/3 nm) were deposited the gate region on Si substrate by using atomic layer deposition. To fabricate $WSi_2$ nanocrystals, the ultrathin $WSi_2$ film with a thickness of 3-4 nm was deposited on the multi-stack tunnel layer by using direct current magnetron sputtering system [2]. Subsequently, the first post annealing process was carried out at $900^{\circ}C$ for 1 min by using rapid thermal annealing system in nitrogen gas ambient. The 15-nm-thick $SiO_2$ control layer was deposited by using ultra-high vacuum magnetron sputtering. For $SiO_2$ layer density, the second post annealing process was carried out at $900^{\circ}C$ for 30 seconds by using rapid thermal annealing system in nitrogen gas ambient. The aluminum gate electrodes of 200-nm thickness were formed by thermal evaporation. The electrical properties of devices were measured by using a HP 4156A precision semiconductor parameter analyzer with HP 41501A pulse generator, an Agillent 81104A 80MHz pulse/pattern generator and an Agillent E5250A low leakage switch mainframe. We will discuss the electrical properties for application next generation non-volatile memory device.

• Korean Journal of Materials Research
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• v.1 no.1
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• pp.46-53
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• 1991

The stress of PSG (Phosphosilicate glass), USG (Undoped-silicate grass) and SiN films, which are mainly used as passivation layers in semiconductor memory devices, deposited by CVD methods has been studied as a function of film thickness and holding time in air. The stress of the PSG film or the USG film is increased in tensile state with increasing film thickness. On the other hand the stress level of the SiN film in compressive stress does not change as film thickness changes. The stress of PSG film shows the drastic change from the tensile stress to the compressive stress after the film is left 2 days in air. FTIR spectra indicated that the stress variation was due to the penetration of water molecule. It looks possible to recover the stress of about $2.5{\times}{10^9}dyne/cm^2$ by annealing treatment at $300^{\circ}C$ for 20min. The total stress of multi-layered films having the PSG film is determined mainly by the stress variation of PSG layer with holding time. The total stress of multi-layered film appears to have a functional relationship with the stress in the thickness of each film. The resistance against stress-migration of sputtered Al line increases with increasing the tensile stress for the PSG film or the USG film.

• Journal of the Korean Magnetics Society
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• v.27 no.3
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• pp.87-91
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• 2017

Carbon-encapsulated Ni and metal Ni nanoparticles were synthesized by levitational gas condensation (LGC). Methane ($CH_4$) gas was used to coat the surface of the Ni nanoparticles. The Ni particles had a core diameter of 10 nm, and were covered by 2~3 nm thin carbon layers with multi-shells structure.The low magnetization comparing with the Ni nanoparticles without carbon-shell results in the coexistence of nonmagnetic carbon and a large surface spin percentage with disordered magnetization orientation for the nanoparticles. Biginelli reactions in the presence of L-proline and Ni and carbon encapsulated Ni nanoparticles were carried out to change the ratio between stereoisomers. The obtained S-enantiomers for 3,4-dihydropyrimidine (DHPM) using catalysts of Ni, and Ni@C was an excess of about ${\Delta}{\sim}7.4%$ and ${\Delta}{\sim}19.6%$, respectively. The nanopowders were fully recovered using magnet to reuse as a catalyst. The Ni@C was shown at same yield to formation of 3,4-DHPM, though it was recycled for catalyst in the reaction.

• Journal of Intelligence and Information Systems
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• v.15 no.2
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• pp.49-59
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• 2009

Contents-based image retrieval methods are in general more objective and effective than text-based image retrieval algorithms since they use color and texture in search and avoid annotating all images for search. SIM(Self-organizing Image browsing Map) is one of contents-based image retrieval algorithms that uses only browsable mapping results obtained by SOM(Self Organizing Map). However, SOM may have an error in selecting the right BMU in learning phase if there are similar nodes with distorted color information due to the intensity of light or objects' movements in the image. Such images may be mapped into other grouping nodes thus the search rate could be decreased by this effect. In this paper, we propose an improved SIM that uses HSV color model in extracting image features with color quantization. In order to avoid unexpected learning error mentioned above, our SOM consists of two layers. In learning phase, SOM layer 1 has the color feature vectors as input. After learning SOM Layer 1, the connection weights of this layer become the input of SOM Layer 2 and re-learning occurs. With this multi-layered SOM learning, we can avoid mapping errors among similar nodes of different color information. In search, we put the query image vector into SOM layer 2 and select nodes of SOM layer 1 that connects with chosen BMU of SOM layer 2. In experiment, we verified that the proposed SIM was better than the original SIM and avoid mapping error effectively.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.22 no.3
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• pp.492-498
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• 2021

This feasibility study evaluated an optically transparent planar antenna using liquid salt-water as the conducting material. The most significant reason behind using liquid salt-water for transparent antenna applications is its excellent average optical transparency (OTav) (> 95% at a salinity of 40 ppt) compared to other typical solid transparent thin-film electrodes, such as indium tin oxide (ITO:> 73%) or multi-layer films (MLF: > 78%). Each conductive arm of the proposed dipole is constructed from a salt-water layer held between two clear planar acrylic layers (��r = 2.61, tan�� = 0.01, OTav > 90%) (acrylic/salt-water/acrylic; ASA) due to surface tension. To examine the electrical and optical properties of the ASA structure, the surface tension was measured to determine the thickness of the salt-water layer that finalized its sheet resistance and OTav. The average gain and efficiency of the antenna were 1.72 dBi and 74%, respectively, in the operating UHF (Ultra high frequency) band (470-771 MHz). Therefore, the proposed antenna can be a good candidate for applications as a transparent planar antenna using salt-water.

• KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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• v.27 no.3
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• pp.149-158
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• 2021

Advances in food packaging play an important role in keeping food manufacturing and food supply safe. Food packaging facilitates the storage, handling, transportation and preservation of food, and also contributes to the minimization of food waste. On the other hand, food packaging materials have high production volumes, short usage times, and accelerate the occurrence of environmental problems related to waste. The circular economy has already been introduced to pursue sustainability through resource conservation and recycling, and to reduce waste and carbon emissions. By activating an eco-friendly economic system that minimizes resource depletion and environmental pollution, reducing, reusing, recycling and redesigning the goals of the circular economy will reduce the impact of food packaging on the environment. This review focused on the safety aspects of recycled food packaging as recycling is currently considered an important means of packaging waste management. Assessing the safety of recycled packaging is very important because recycling can increase the levels of potentially hazardous chemicals in packaging and in the food after they are migrated. Various food packaging materials such as plastic, paper and cardboard, aluminum, steel, and multi-material multi-layers packaging are commonly used, but only the recycling safety of plastic food packaging materials, which is the most used and has a significant increase in post-use problem, is discussed in this review.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.16 no.1
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• pp.8-17
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• 2023

In conventional liquid crystal display(LCD) manufacturing process, Indium Tin Oxide(ITO) as transparent electrode and rubbing process of polyimide as alignment layer are essential process to apply electric field and align liquid crystal molecules. However, there are some limits that deposition of ITO requires high vacuum state, and rubbing process might damage the device with tribolectric discharge. In this paper, we made nanocomposite with PEDOT:PSS and MWNT to replace ITO and constructed alignment layer by nano imprint lithography with nano wrinkle pattern, to replace rubbing process. These replacement made that only one PEDOT:PSS/MWNT film can function as two layers of ITO and polyimide alignment layer, which means simplification of process. Transferred nano wrinkle patterns functioned well as alignment layer, and we found out lowered threshold voltage and shortened response time as MWNT content increase, which is related to increment of electric conductivity of the film. Through this study, it may able to contribute to process simplification, reducing process cost, and suggesting a solution to disadvantage of rubbing process.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.16 no.6
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• pp.526-532
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• 2023

Falls are fatal accidents that occur more than 420,000 times a year worldwide. Therefore, to study patients with falls, we found the association between extrinsic injury codes and principal diagnosis S-codes of patients with falls, and developed a prediction model to predict extrinsic injury codes based on the data of principal diagnosis S-codes of patients with falls. In this study, we received two years of data from 2020 and 2021 from Institution A, located in Gangneung City, Gangwon Special Self-Governing Province, and extracted only the data from W00 to W19 of the extrinsic injury codes related to falls, and developed a prediction model using W01, W10, W13, and W18 of the extrinsic injury codes of falls, which had enough principal diagnosis S-codes to develop a prediction model. 80% of the data were categorized as training data and 20% as testing data. The model was developed using MLP (Multi-Layer Perceptron) with 6 variables (gender, age, principal diagnosis S-code, surgery, hospitalization, and alcohol consumption) in the input layer, 2 hidden layers with 64 nodes, and an output layer with 4 nodes for W01, W10, W13, and W18 exogenous damage codes using the softmax activation function. As a result of the training, the first training had an accuracy of 31.2%, but the 30th training had an accuracy of 87.5%, which confirmed the association between the fall extrinsic code and the main diagnosis S code of the fall patient.

• Proceedings of the KOSOMBE Conference
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• v.1991 no.05
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• pp.65-70
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• 1991

A hybrid model which uses a probabilistic model and a MLP(multi layer perceptron) model for pattern recognition of EMG(electromyogram) signals is proposed in this paper. MLP model has problems which do not guarantee global minima of error due to learning method and have different approximation grade to bayesian probabilities due to different amounts and quality of training data, the number of hidden layers and hidden nodes, etc. Especially in the case of new test data which exclude design samples, the latter problem produces quite different results. The error probability of probabilistic model is closely related to the estimation error of the parameters used in the model and fidelity of assumtion. Generally, it is impossible to introduce the bayesian classifier to the probabilistic model of EMG signals because of unknown priori probabilities and is estimated by MLE(maximum likelihood estimate). In this paper we propose the method which get the MAP(maximum a posteriori probability) in the probabilistic model by estimating the priori probability distribution which minimize the error probability using the MLP. This method minimize the error probability of the probabilistic model as long as the realization of the MLP is optimal and approximate the minimum of error probability of each class of both models selectively. Alocating the reference coordinate of EMG signal to the outside of the body make it easy to suit to the applications which it is difficult to define and seperate using internal body coordinate. Simulation results show the benefit of the proposed model compared to use the MLP and the probabilistic model seperately.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.389-390
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• 2012

In this study, we fabricate a superhydrophobic surface made of hierarchical nanostructures that combine wax crystalline structure with moth-eye structure using vacuum cluster system and measure their hydrophobicity and durability. Since the lotus effect was found, much work has been done on studying self-cleaning surface for decades. The surface of lotus leaf consists of multi-level layers of micro scale papillose epidermal cells and epicuticular wax crystalloids [1]. This hierarchical structure has superhydrophobic property because the sufficiently rough surface allows air pockets to form easily below the liquid, the so-called Cassie state, so that the relatively small area of water/solid interface makes the energetic cost associated with corresponding water/air interfaces smaller than the energy gained [2]. Various nanostructures have been reported for fabricating the self-cleaning surface but in general, they have the problem of low durability. More than two nanostructures on a surface can be integrated together to increase hydrophobicity and durability of the surface as in the lotus leaf [3,5]. As one of the bio-inspired nanostructures, we introduce a hierarchical nanostructure fabricated with a high vacuum cluster system. A hierarchical nanostructure is a combination of moth-eye structure with an average pitch of 300 nm and height of 700 nm, and the wax crystalline structure with an average width and height of 200 nm. The moth-eye structure is fabricated with deep reactive ion etching (DRIE) process. $SiO_2$ layer is initially deposited on a glass substrate using PECVD in the cluster system. Then, Au seed layer is deposited for a few second using DC sputtering process to provide stochastic mask for etching the underlying $SiO_2$ layer with ICP-RIE so that moth-eye structure can be fabricated. Additionally, n-hexatriacontane paraffin wax ($C_{36}H_{74}$) is deposited on the moth-eye structure in a thermal evaporator and self-recrystallized at $40^{\circ}C$ for 4h [4]. All of steps are conducted utilizing vacuum cluster system to minimize the contamination. The water contact angles are measured by tensiometer. The morphology of the surface is characterized using SEM and AFM and the reflectance is measured by spectrophotometer.