• Title/Summary/Keyword: Mu-Scan

Search Result 242, Processing Time 0.033 seconds

A Study on the Formation of Polycrystalline Silicon Film by Lamp-Scanning Annealing and Fabrication of Thin Film Transistors (램프 스캐닝 열처리에 의한 다결정 실리콘 박막의 형성 및 TFT 제작에 관한 연구)

  • Kim, Tae-Kyung;Kim, Gi-Bum;Lee, Byung-Il;Joo, Seung-Ki
    • Journal of the Korean Institute of Telematics and Electronics D
    • /
    • v.36D no.1
    • /
    • pp.57-62
    • /
    • 1999
  • Polycrystaline thin film transistors are fabricated on the transparent glass substrate by a lamp-scan annealing. The line-shaped lamp scanning method, which is profitable for large area process, effectively radiated silicon film on glass substrate. Amorphous silion film absorbs the light which is emitted from halogen-lamp and it transformed into crystalline silicon by metal-induced lateral crystallization. In order to enhance the annealing effect, capping layer was deposited on the whole substrate. When the scan speed was 1-2mm/sec, lateral crystallization of amorphous silicon under capping layer was 18~27${\mu}m/scan$. The thin film transistor fabricated by this method shows high electron mobility over 130$cm^2/V{\cdot}sec$

  • PDF

Formation of PDP cell structure using Nd:YAG laser beam (Nd:YAG 레이저빔에 의한 PDP 방전셀의 구조 형성)

  • Ahn, Min-Young;Lee, Kyoung-Cheol;Lee, Hong-Kyu;Lee, Cheon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2000.04a
    • /
    • pp.129-132
    • /
    • 2000
  • The PDP(Plasma Display Panel) barrier rib material on the glass substrate was patterned for fabrication of the PDP cell using Nd:YAG laser(1064 nm) which can generate the second(532 nm) and forth(266 nm) harmonic wave by HGM(harmonic generation modules). At a scan speed of 20 ${\mu}m/s$ with the second harmonic wave(532 nm) of Nd:YAG laser, the etching threshold laser fluence of the PDP material was 6.5 $mJ/cm^2$ and a sample(thickness = 180 ${\mu}m$) on the glass substrate was removed clearly at a laser fluence of 19.5 $mJ/cm^2$. In order to increase the throughput of the fabrication we divided a single-beam into multi-beams by using a metal mask between the sample and the focusing lens. As a result, 10 lines of PDP cell were formed by one laser beam scanning at a scan speed of 200 ${\mu}m/s$ and a laser fluence of 2.86 $J/cm^2$.

  • PDF

High Power Characteristics of Amorphous $MnO_2$ Electrode by Variation of Electrode Thickness (비정질 $MnO_2$ 전극의 전극두께에 따른 고출력 특성 변화)

  • Seong W. K.;Kim E. S.;Lee H. Y.;Kim S. W.
    • Journal of the Korean Electrochemical Society
    • /
    • v.3 no.4
    • /
    • pp.235-240
    • /
    • 2000
  • Screen-printing and doctor blade method were investigated and proposed as an electrode coating process for high power capacitor. CV measured from the amorphous $MnO_2$ electrode prepared by screen-printing shows closer to ideal capacitor characteristics. Specific capacitances calculated from CVs with potential scan rate of 50mV/s were 5.8, 81.8, and 172.0 F/g for electrode thickness of $140{\mu}m,\;24{\mu}m,\; 3{\mu}m$, respectively. Assumed that utilization of active $MnO_2$ in electrode of screen-printing is $100\%$, those were $3.4\%$ in one of paste method and $47.6\%$ in one of doctor blade method. The screen-printing can be good technique to coat thin film on current collector for high power application.

Usefulness of wearing pocket dosimeter in nuclear medicine (핵의학 영상검사에서 Pocket dosimeter 착용의 유용성 평가)

  • Kim, Young-Bin;Lee, Eun-Ji;Kim, Kun-Jae
    • The Korean Journal of Nuclear Medicine Technology
    • /
    • v.15 no.1
    • /
    • pp.25-28
    • /
    • 2011
  • Purpose: The aim of study is to find accuracy of pocket dosimeter in measuring exposed dose in compared with survey meter and to compare exposed dose according as Nuclear medicine exams. Materials and Method: First, radiation dose to point source(185 MBq,370 MBq, ${\ldots}$, 1665 MBq, 1850 MBq) were measured in using a pocket dosimeter and a survey meter. Second, radiation dose to 12 patients injected $^{18}F$-FDG 370 MBq were measured in using a pocket dosimeter and a survey meter. Third, radiation dose to 10 patients injected $^{99m}Tc$-DPD 925 MBq were measured in using a pocket dosimeter and a surveymeter. Result: The average is $70.12{\pm}39.36{\mu}Sv/h$ in measurement of point source with Surveymeter and $5{\pm}3.06{\mu}Sv$ in measurement of point source with Pocket dosimeter. The average is $25.04{\pm}6.16{\mu}Sv/h$ in measurement of PET/CT patients with Surveymeter and $2.41{\pm}0.51{\mu}Sv$ in measurement of PET/CT with Pocket dosimeter. The average is $8.58{\pm}0.96{\mu}Sv/h$ in measurement of Bone Scan patients with Surveymeter and $1{\mu}Sv$ in measurement of Bone Scan patients with Pocket dosimeter. Significant difference found between Survey meter value and Pocket dosimeter value in all experimentation (p<0.001). Conclusion: Accoring to rusult Wearing Pocket dosimeter is usefulnee in manerage of exposed dose in nucler medicine exams.

  • PDF

Analysis of the Spatial Dose Rates According to the Type of Radiation Source Used in Multi-bed Hospital Room (다인병실에서 이용되는 방사선원의 종류에 따른 공간선량률 분석)

  • Jang, Dong-Gun;Kim, Junghoon;Park, Eun-Tae
    • Journal of radiological science and technology
    • /
    • v.40 no.3
    • /
    • pp.407-413
    • /
    • 2017
  • Medical radiation offers significant benefits in diagnosing and treating patients, but it also generates unnecessary radiation exposure to those nearby. Accordingly, the objective of the present study was to analyze spatial dose rate according to types of radiation source term in multi-bed hospital rooms occupied by patients and general public. MCNPX was used for geometric simulation of multi-bed hospital rooms and radiation source terms, while the radiation source terms were established as whole body bone scan patients and imaging using a portable X-ray generator. The results of simulation on whole body bone scan patients showed $3.46{\mu}Sv/hr$ to another patient position, while experimental results on imaging using a portable X-ray generator showed $1.47{\times}10^{-8}{\mu}Sv/irradiation$ to another patient position in chest imaging and $2.97{\times}10^{-8}{\mu}Sv/irradiation$ to another patient position in abdomen imaging. Multi-bed hospital room, unnecessary radiation generated in the surrounding patients, while legal regulations and systematic measures are needed for radiation exposure in multi-bed hospital rooms that are currently lacking in Korea.

The singulation study of $\mu$-BGA(Ball Grid Array) board using a pulsed Nd:YAG laser (펄스 Nd:YAG 레이저를 이용한 $\mu$-BGA 기판의 개별칩 분리 연구)

  • Baek, Kwang-Yeol;Lee, Kyoung-Cheol;Lee, Choen
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2000.11a
    • /
    • pp.524-527
    • /
    • 2000
  • In this paper, we have studied minimization of the burr which occurred after $\mu$-BGA(ball grid array) singulation process, singulation of the multilayer with a pulsed Nd:YAG(266, 532 nm) laser is used to cut the metal layer which doesn't well absorb laser beam. Especially, the photoresist and $N_2$blowing is effective to minimize of the surface demage and burr. In this experiment, the $N_2$ blowing reduces a laser energy loss by debris and suppress a surface oxidation. The SEM(scanning electron microscopes) and non-contact 3D inspector are used to measure cutting line-width and surface demage. The $\mu$-BGA singulation threshold energy is 75.0 J/cm$^2$at 30 ${\mu}{\textrm}{m}$/s scan speed.

  • PDF

Enlargement of Field-of-View (FOV) of the CCD Camera by the Current Adjustment of the Projection Lens System in the KBSI-HVEM (KBSI-HVEM 투사렌즈 전류제어에 의한 CCD Camera의 Field of View(FOV) 확장)

  • Kim, Young-Min;Shim, Hyo-Sik;Kim, Youn-Joong
    • Applied Microscopy
    • /
    • v.35 no.4
    • /
    • pp.98-104
    • /
    • 2005
  • A FOV (field-of-view) of the HV-MSC (high voltage multi-scan CCD, $1024{\times}1024$ pixels) camera mounted in the post-column HV-GIF (high voltage gatan image filter) has been drastically enlarged by the projection lens current adjustment. An imaging area of the HV-MSC camera obtained at the lowest magnification (2,000x) is $112{\mu}m^2$ which corresponds to the recording area of the film at the magnification of 8,800x, while the achievable recording area is only $0.43{\mu}m^2$ at the same magnification without this technique. Ignoring the image distortion of less than 5%, we have designed an on-site reference graph to estimate projection lens currents for microscope magnifications above 8,800x, where the recording area on the HVMSC is same as that on the film.

Determination of radiolysis products in Tri-Octyl Amine by high performance liquid chromatography-mass spectrometer (HPLC-MS에 의한 Tri-Octyl Amine(TOA)의 방사선 분해산물 정량)

  • Yang, Han-Beom;Lee, Eil-Hee;Moon, Hyung-Sil
    • Analytical Science and Technology
    • /
    • v.18 no.3
    • /
    • pp.201-205
    • /
    • 2005
  • Tri-octyl amine (TOA) is used in solvent extraction process for radioactive waste. This compound may be degraded to di-octyl amine (DOA), mono-octyl amine (MOA) by radioactive materials. Amount of TOA, DOA and MOA in TOA must be monitored because they production of these compounds means degradation of which leads to a decrease in the extraction yield. Retention behavior for TOA, DOA and MOA are studied with Phenomenex LUNA-$C_{18}$ ($4.6mm{\times}25cm$) analytical column and $CH_3OH:H_2O$ (50 mmol $CH_3COONH_4$) eluent by liquid chromatography. Optimum condition for these compounds is $CH_3OH:H_2O$ (50 mmol $CH_3COONH_4$) = 85 : 15 ratio. TOA, DOA and MOA compounds is well separated within 20 minute. Dynamic range is $30{\sim}160{\mu}g/mL$ for TOA, $5{\sim}100{\mu}g/mL$ for DOA and $0.1{\sim}5{\mu}g/mL$ for MOA, respectively. The detection limit are $0.1{\mu}g/mL$ for TOA, $1{\mu}g/mL$ for DOA (in SCAN mode) and $0.1{\mu}g/mL$ for MOA (in SIM mode) in this system with $20{\mu}L$ sample loop.

Comparison of Doses of Single Scan PBS and Layered Rescanning PBS Using Moving Phantom in Proton Therapy (양성자 치료에서 Moving Phantom을 이용한 Single Scan PBS와 Layered Rescanning PBS의 선량비교)

  • Kim, Kyeong Tae;Kim, Seon Yeong;Kim, Dae Woong;Kim, Jae Won;Park, Ji Yeon;Jeon, Sang Min
    • The Journal of Korean Society for Radiation Therapy
    • /
    • v.31 no.1
    • /
    • pp.43-49
    • /
    • 2019
  • Purpose : We apply the Layered Rescanning PBS designed to complement the Pencil Beam Scanning(PBS), which is vulnerable to moving organs with the Moving Phantom, and compare the homogeneity with the single scan PBS. Methods and materials: Matrix X (IBA, Belgium) and Moving Phantom (standard imaging, USA) were used. A dose of 200 cGy was measured in the AP direction on a hypothetical tumor $10{\times}10{\times}5cm$. The plan type was planned as 4 kinds of sinlge scan PBS, rescan number 4, 8, 12 times. Were measured three times for each types. During the measurement, the respiratory cycle of the Moving Phantom was generally set to 4 seconds per cycle, and the movement radius in the S-I direction was set to 2 cm. In addition, beam on time was measured. Results : The mean values of $D_{max}$ in the PTV were $246.47{\pm}18.8cGy$, $223.43{\pm}8.92cGy$, and $222.47{\pm}7.7cGy$, $213.9{\pm}6.11cGy$ and the mean values of $D_{min}$ were $165.53{\pm}4.32cGy$, $173.13{\pm}11.94cGy$, $184.13{\pm}8.04cGy$, $182.67{\pm}4.38cGy$ and the mean values of $D_{mean}$ $192.77{\pm}6.98cGy$, $196.7{\pm}4.01cGy$, $198.17{\pm}4.96cGy$, $195.77{\pm}3.15cGy$ respectively. As the number of rescanning increased, the Homogeneity Index converged to 1. The beam on time was measured as 2:15, 3:15, 4:30, 5:37 on average. In the measurement process, in the low dose layer of the MU, the problem was found that it was not rescanned as many times as the set number of rescan. Conclusions : In the treatment of tumors with long-term movements, the application of layered rescanning PBS showed a more uniform dose distribution than single scan PBS. And as the number of rescan increase, the distribution of homogeneity is uniform. Compared with single scan plan and 12 rescan plan, HI value was improved by 0.32. Further studies are expected to be applicable to patients who can not be treated with respiratory synchronous radiation therapy.

Image Technique of Surface Defects by Using Photoacoustic Signal Processing (광음향 신호처리를 이용한 표면결함의 영상 기술)

  • Yi, Chong-Ho;Jun, Kye-Suk
    • The Journal of the Acoustical Society of Korea
    • /
    • v.13 no.6
    • /
    • pp.45-49
    • /
    • 1994
  • In this paper, photoacoustic image processing system was constructed by using 2W CW $CO_{2}$ laser of $10.6{\mu}m$ wavelength and PZT 5A acoustic transducer. Stainless steel of 5mm thickness was used as a sample in experiment. Three line cracks of $50{\mu}m$ in each width and depth were made by using plasma on the surface of the sample. Also, each gap among their lines was $200{\mu}m$ and $300{\mu}m$ in width. In the scan range of $2.2mm\times2mm$ including surface defects, a good image of $50{\mu}m$ resolution had been shown when modulation frequency of CW laser was 100Hz.

  • PDF