• 제목/요약/키워드: Motion error analysis

검색결과 327건 처리시간 0.023초

PZT로 구동되는 회전 스테이지의 오차 운동 분석 (An Error Motion Analysis of Rotary Stage Driven By PZT)

  • 김진호;신동익;윤덕원;한창수;이상무;남경태
    • 한국공작기계학회논문집
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    • 제17권1호
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    • pp.132-136
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    • 2008
  • Axis of rotation error on rotary system are significant; such as the spindle radial error motion of a aligner, wire bonder and inspector machine which results in the poor state of manufactured goods. In this paper, the simple stage which consists of one PZT actuator and rotary encoder, is analyzed and measured by high resolution capacitance type displacement sensor. As the result of experiment, the paper discusses several issues that must be considered when designing rotary stage driven by PZT.

저속 회전 스테이지의 5자유도 회전축 오차 분석에 관한 연구 (A Study on the Analysis of 5-DOF Axis of Rotation Error in Low Speed Rotary Stage)

  • 한창수;김진호;신동익;윤덕원;이융기;이상무;남경태
    • 반도체디스플레이기술학회지
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    • 제6권4호
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    • pp.23-27
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    • 2007
  • Rotary stages in semiconductor, display industry and many other fields require challenging accuracy to perform their functions properly. Especially, Axis of rotation error on rotary system is significant; such as the spindle error motion of the aligner, wire bonder and inspector machine which result in the poor quality products. To evaluate and improve the performance of such precision rotary stage, undesired movements on the other 5 degrees of freedom of the rotary stage must be measured and analyzed. In this paper, we have measured the three translations and two tilt motions of the worm gear type spindle with high precision capacitive sensors. To obtain the radial error motion, we have used Donaldson's reversal technique. And the axial components of the spindle tilt error motion can be obtained accurately from the axial direction outputs of sensors by Estler face motion reversal technique. Further more we have designed and developed the sensor mounting jig with standard cylinder for reversal method.

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화상처리를 이용한 동작분석 시스템에 관한 연구 (Motion analysis system using image processing)

  • 박경수;반영환;이안재;임창주;오인석;이현철
    • 대한인간공학회지
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    • 제16권3호
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    • pp.71-75
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    • 1997
  • This paper presents the development of videobased 3-dimensional tracking system. Measurement of human motion is important in the application of ertonomics. The system uses advanced direct video measurement technology. Passive retro-reflecting markers are attached to a subject and movements of markers are observed by two CCD cameras. Infrared light emitted near the CCD cameras is reflected by the markers and is detected by the cameras. The images are captured by Samsung MVB302 board and the centers of markers are calculated by DSP program. The positions of markers are transferred from MVB02 board to the computer through AT bus. The computer then tracks the position of each marker and saves the data. This system has dynamic accuracy with 0.7% average error and 4.2% maximum error, and the sampling rate to 6 .approx. 10 Hz, and this system can analyse the trajectory and speed of the marker. The results of this study can be used for operator's motion analysis, task analysis, and hand movement characteristic analysis.

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포크레인용 다관절 매니퓰레이터 어태치먼트 운동학 해석 및 모션제어 (A Study on Motion Control and Kinematics Analysis of Articulated Manipulator Attachment for Excavator)

  • 김희진;김상현;장기원;한성현
    • 한국산업융합학회 논문집
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    • 제22권6호
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    • pp.807-819
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    • 2019
  • In this paper, it is proposed a new approach to motion control and kinematics analysis of articulated manipulator attachment with five degree of freedom for excavator. Unlike the well-established theory for the control of linear systems, there is little general control theory relatively for a robust control of nonlinear systems. The control technique is essential for providing a stable and robust performance for application of articulated manipulator control. The proposed control algorithm is one of robust control methods based on error informations of the position and velocity error informations using stability analysis of dynamic model. Through simulation test, the proposed control scheme is illustrated to be a efficient control technique for real-time control.

2차원 자가 보정 알고리즘에서의 불확도 전파 (Error propagation in 2-D self-calibration algorithm)

  • 유승봉;김승우
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.434-437
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    • 2003
  • Evaluation or the patterning accuracy of e-beam lithography machines requires a high precision inspection system that is capable of measuring the true xy-locations of fiducial marks generated by the e-beam machine under test. Fiducial marks are fabricated on a single photo mask over the entire working area in the form of equally spaced two-dimensional grids. In performing the evaluation, the principles of self-calibration enable to determine the deviations of fiducial marks from their nominal xy-locations precisely, not being affected by the motion errors of the inspection system itself. It is. however, the fact that only repeatable motion errors can be eliminated, while random motion errors encountered in probing the locations of fiducial marks are not removed. Even worse, a random error occurring from the measurement of a single mark propagates and affects in determining locations of other marks, which phenomenon in fact limits the ultimate calibration accuracy of e-beam machines. In this paper, we describe an uncertainty analysis that has been made to investigate how random errors affect the final result of self-calibration of e-beam machines when one uses an optical inspection system equipped with high-resolution microscope objectives and a precision xy-stages. The guide of uncertainty analysis recommended by the International Organization for Standardization is faithfully followed along with necessary sensitivity analysis. The uncertainty analysis reveals that among the dominant components of the patterning accuracy of e-beam lithography, the rotationally symmetrical component is most significantly affected by random errors, whose propagation becomes more severe in a cascading manner as the number of fiducial marks increases

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Human Gender and Motion Analysis with Ellipsoid and Logistic Regression Method

  • Ansari, Md Israfil;Shim, Jaechang
    • Journal of Multimedia Information System
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    • 제3권2호
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    • pp.9-12
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    • 2016
  • This paper is concerned with the effective and efficient identification of the gender and motion of humans. Tracking this nonverbal behavior is useful for providing clues about the interaction of different types of people and their exact motion. This system can also be useful for security in different places or for monitoring patients in hospital and many more applications. Here we describe a novel method of determining identity using machine learning with Microsoft Kinect. This method minimizes the fitting or overlapping error between an ellipsoid based skeleton.

Accuracy and Reliability of The Spine-Pelvis Monitor to Record Three-Dimensional Characteristics of The Spine-Pelvic Motion

  • Kim, Jung-Yong;Yoon, Kyung-Chae;Min, Seung-Nam;Yoon, Sang-Young
    • 대한인간공학회지
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    • 제31권2호
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    • pp.345-352
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    • 2012
  • Objective: The aim of this study is to evaluate the accuracy and reliability of Spine-Pelvis Monitor(SPM) that was developed to measure 3-dimensional motion of spine and pelvis using tilt sensor and gyro sensor. Background: The main cause of low back pain is very much associated with the task using the low back and pelvis, but no measurement technique can quantify the both spine and pelvis. Method: For testing the SPM, 125 angles from three anatomical planes were measured three times in order to evaluate the accuracy and reliability. The accuracy of SPM in measuring dynamic motion was evaluated using digital motion analysis system. The motion pattern captured by two measuring methods was compared with each other. In result, the percentage error and Cronbach coefficient alpha were calculated to evaluate the accuracy and reliability. Results: The percentage error was 0.35% in flexion-extension on sagittal plane, 0.43% in lateral bending on coronal plane, and 0.40% in twisting on transverse plane. The Cronbach coefficient alpha was 1.00, 0.99 and 0.99 in sagittal, coronal and transvers plane, respectively. Conclusion: The SPM showed less than 1% error for static measurement, and showed reasonably similar pattern with the digital motion system. Application: The results of this study showed that the SPM can be the measuring method of spine pelvis motion that enhances the kinematic analysis of low back dynamics.

디지털 영상인식 방법을 통한 자세평가 및 운동가동범위 측정시스템 개발 (Development of Posture Evaluation System through Digital Recognition Method)

  • 문영진;이순호;백진호;이종각;이건범
    • 한국운동역학회지
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    • 제14권3호
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    • pp.49-65
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    • 2004
  • The purpose of this study is development of posture evaluation and Range of Motion(ROM) system by using digital vision analysis method. The results of this study are as follows. First, Scoliosis evaluation through this research measurement system represent 3mm error in 7 cervical point and deepest lumbar point, 0.7mm error in other point. This mean this research measurement system have a reliability for scoliosis evaluation. Second, for spine line evaluation on high fat subject, we need reconstrection spine line after measurement for fat thickness in 7 cervical point and deepest lumbar point. Third, In pedioscope error test, it present 0.01848cm in X axis and 0.01757cm in Y axis. This results mean pedioscope have a reliability foot evaluation. Forth, Posture evaluation and Range of Motion measurement system by using digital vision analysis method can fast measure in range of motion and foot evaluation and posture. therefore we can expect this system application in young people posture clinic center and hospital and so on.

Evaluation of energy response of space steel frames subjected to seismic loads

  • Ozakgul, Kadir
    • Structural Engineering and Mechanics
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    • 제54권4호
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    • pp.809-827
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    • 2015
  • In this paper, seismic energy response of inelastic steel structures under earthquake excitations is investigated. For this purpose, a numerical procedure based on nonlinear dynamic analysis is developed by considering material, geometric and connection nonlinearities. Material nonlinearity is modeled by the inversion of Ramberg-Osgood equation. Nonlinearity caused by the interaction between the axial force and bending moment is also defined considering stability functions, while the geometric nonlinearity caused by axial forces is described using geometric stiffness matrix. Cyclic behaviour of steel connections is taken into account by employing independent hardening model. Dynamic equation of motion is solved by Newmark's constant acceleration method in the time history domain. Energy response analysis of space frames is performed by using this proposed numerical method. Finally, for the first time, the distribution of the different energy types versus time at the duration of the earthquake ground motion is obtained where in addition error analysis for the numerical solutions is carried out and plotted depending on the relative error calculated as a function of energy balance versus time.