• Proceedings of the Korean Ceranic Society Conference
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• 2003.10a
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• pp.174.2-174
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• 2003

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3168-3172
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• 2007

As the minimum feature size decreases, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT and designed a particle deposition system which consists of scanning mobility particle sizer (SMPS) and deposition chamber. Charged monodisperse particles are generated using SMPS and deposited on the wafer by electrostatic force. The experimental results agreed with the simulation results well in terms of particle number and deposition area according to particle size, flow rate and deposition voltage.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.416-421
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• 2000

We have developed a simple model for describing the non-spherical particle growth phenomena using modified 1-dimensional sectional method. In this model, we solve simultaneously particle volume and surface area conservation sectional equations which consider particles' irregularities. From the correlation between two conserved properties of sections, we can predict the evolution of the aggregates' morphology. We compared this model with a simple monodisperse-assumed model and more rigorous two dimensional sectional model. For the comparison, we simulated silica and titania particle formation and growth in a constant temperature reactor environment. This new model shows a good agreement with the detailed two dimensional sectional model in total number concentration, primary particle size. The present model can also successfully predict particle size distribution and morphology without costing very heavy computation load and memory needed for the analysis of two dimensional aerosol dynamics.

• Polymer(Korea)
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• v.24 no.3
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• pp.287-298
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• 2000

In preparing micron-sized monodisperse polystyrene beads by dispersion polymerization, the conversion, and the particle size and its distribution were affected by the reaction temperature, concentration of the monomer, solvent and initiator, molecular weight and concentration of the steric stabilizer, amount of oxygen existing in the reactor, and an appropriate combination of these starting materials. Ethanol as a dispersing agent, styrene as a monomer, PVP as a steric stabilizer, AIBN as an initiator, DVB as a cross-linking agent and toluene as a co-solvent were the basic materials for the synthesis. The reaction rate and the conversion were increased with the reaction temperature and the amount of DVB from 1 to 4%, and the conversion was saturated after 10 hours of the reaction time. The optimum reaction recipe for the preparation of the monodisperse PS beads was 25% styrene monomer, 0.5% DVB, 25% toluene, 10-15% PVP, and 2 and 4% AIBN, thereby, 3.9~4 ${\mu}{\textrm}{m}$ and 3.4~9.3 ${\mu}{\textrm}{m}$ of polystyrene beads, respectively, were successfully synthesized.

• Polymer(Korea)
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• v.30 no.1
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• pp.50-55
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• 2006

When the monodisperse polystyrene(PS)/HDDA polymer particles were synthesized via one-step polymerization using polystyrene seed particles by dispersion polymerization, the effects of 1) the molecular weight of seed polymer particles, 2) the ratio of the absorbed HDDA to the seed polymer particles (swelling ratio) and 3) seeded polymerization rate on the surface morphology of PS/HDDA polymer particles were investigated. It was observed that the creation of the crater shaped defect on the surface of PS/HDDA polymer particles was irrespective of the molecular weight of seed polymer ant swelling ratio. But its surface morphology could be controlled by the change of the seeded polymerization rate.

• Applied Chemistry for Engineering
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• v.7 no.4
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• pp.777-786
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• 1996

Uniform sized-porous poly(acrylonitrile-ethylene glycol dimethacrylate) (PAN) microgels were synthesized by seed polymerization using monodisperse polystyrene seed particles. The effect of weight ratios of monomer/seed (M/S) and diluent/monomer (DIM), concentration of crosslinking agent and the type of diluent was investigated on the formation of PAN microgels. The particle size distribution of PAN microgels was found to be monodisperse in that the weight ratio of M/S is less than 50. More porous microgels were formed and the interstices between small sized interior microspheres present inside of PAN microgels were also smaller with increasing crosslinking agent concentration. Well-developed pore structure was found to be in that weight ratio of D/M is 1 and toluene is used as a diluent.

• Applied Chemistry for Engineering
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• v.21 no.1
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• pp.34-39
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• 2010

Methacryloxypropyltrimethoxysilane (MPTMS) was used for the surface modification of silica nanoparticles in the toluene dispersion system for 8 h (MPSN). Then, methacryloxypropyl-modified silica nanoparticles were successfully prepared by solutioun polymerization in the ethanol solution at $60^{\circ}C$ for 14 h with adding AIBN initiator. The modification of ultra-fine particles (SiOx-PAA nanospheres) was investigated via EA, XPS, FTIR, TGA, SEM and TEM. The mean diameter of the bare silica nanoparticles, MPSN and SiOx-PAA monodisperse nanoparticles was about 25, 30 and 35 nm, respectively.

• Macromolecular Research
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• v.17 no.10
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• pp.750-756
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• 2009

Stable, spherical, polystyrene particles were synthesized in ab initio dispersion polymerization by using the poly(methacrylic acid)[PMAA] macro-RAFT agent. The presence of the PMAA macro-RAFT agent on the polystyrene (PS) particles was confirmed by NMR and FTIR spectroscopy. The PS particle size was influenced by the concentration of the RAFT agent and monomer due to the initial nucleation. When the concentration of the PMAA macro-RAFT agent was increased from 2 to 10 wt% relative to the monomer, the average particle size decreased from 2.31 to 1.36 ${\mu}m$, the conversion decreased from 93.3 to 88.9%, the weight-average molecular weight increased from 46,300 to 150,200 g $mol^{-1}$ and the PDI decreased from 2.79 to 1.94, respectively. In particular, the incorporation of 10 wt% of PMAA macro-RAFT agent produced monodisperse PS spheres of 1.36 ${\mu}m$ with a coefficient of variation (CV) of 6.44%. Thus, the PMAA macro-RAFT agent worked as a reactive steric stabilizer providing monodisperse, micron-sized, PS particles.

• Journal of Powder Materials
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• v.23 no.6
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• pp.442-446
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• 2016

The sol-gel method is the simplest method for synthesizing monodispersed silica particles. The purpose of this study is to synthesize uniform, monodisperse spherical silica nanoparticles using tetraethylorthosilicate (TEOS) as the silica precursor, ethanol, and deionized water in the presence of ammonia as a catalyst. The reaction time and temperature and the concentration of the reactants are controlled to investigate the effect of the reaction parameters on the size of the synthesized particles. The size and morphology of the obtained silica particles are investigated using transmission electron microscopy and particle size analysis. The results show that monodispersed silica particles over a size range of 54-504 nm are successfully synthesized by the sol-gel method without using any additional process. The nanosized silica particles can be synthesized at higher TEOS/$H_2O$ ratios, lower ammonia concentrations, and especially, higher reaction temperatures.

• Korean Journal of Materials Research
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• v.4 no.8
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• pp.927-933
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• 1994

The effect of particle shape and size on the settling characteristics in monodisperse suspensions of non-spherical particles was investigated. The slope index n values which was obtained from the plot of logarithm of settling rate vs. voidage were increased with the decrease of particle size because different amount of liquid could be adsorbed on irregular particle shape and/or size at same volume concentration. From the experimental results, an equation, $n_{i}=n(a+b/d_{v})$ where n is value of spherical particles, dv is minimum particle diameter and a, b are constants for characteristic of particles.