• 한국세라믹학회지
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• 제28권1호
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• pp.1-10
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• 1991

Zirconium dioxide(ZrO2) thin films have been deposited by chemical vapor deposition technique involving the application of gas mixture of ZrCl4, and H2O into silicon wafers. The relationships between the deposition rate and various reaction parameters such as the deposition time, the gas flow rate, the deposition temperature, and the composition of reactant gases were studied. The film was identified as nearly stoichiometric monoclinic ZrO2. The apparent activation energy is about 19Kcal/mole at surface chemical reaction controlled region. The deposition rate is mainly influenced by the H2O-forming reacting between CO2 and H2.

• 한국세라믹학회지
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• 제27권8호
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• pp.1064-1070
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• 1990

ZrO2 fine powders were prepared by hydrolysis, adding 0.1, 0.2, 0.3, 0.4, 0.5, 0.6mol/1H2O/ethanol to 0.1 mol/l Zr(OC3H7)4/ethanol. When hydrolized by adding 0.1mol/l Zr(OC3H7)4/ethanol to 0.1, 0.2mol/l H2O/ethanol., spherical monodispersed ZrO2 fine powders were obtained. And in this condition average sizes were about 0.5, 0.3${\mu}{\textrm}{m}$, respectively. The more H2O/ethanol concentration increased, the more the particle size decreased and the particles were agglomerated strongly. Prepared powders were amorphous and hydrates. The calcined powders with 43$0^{\circ}C$ and 100$0^{\circ}C$ were showed tetragonal and monoclinic phase, respectively.

• Transactions on Electrical and Electronic Materials
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• 제8권4호
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• pp.153-156
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• 2007

Structural and electrical properties of the fully crystallized-bismuth magnesium niobate ($Bi_2Mg_{2/3}Nb_{4/3}O_7$, BMN) films with 15 mol% excess bismuth deposited on Pt bottom electrode by pulsed laser deposition are characterized for various deposition temperatures. The BMN films were crystallized with a monoclinic structure from $300^{\circ}C$ and the surface roughness slightly decreases with increasing deposition temperature. The capacitance density of the films increases with increasing deposition temperature and especially, films deposited at $400^{\circ}C$ exhibit a capacitance density of approximately $620nF/cm^2$. The crystallized BMN films with approximately 170 nm thickness exhibit breakdown strength above 600 kV/cm (${\leq}10V$) irrespective of deposition temperature and a leakage current density of approximately $2{\times}10^{-8}A/cm^2$ at 590kV/cm (at 10 V).

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2003년도 추계학술대회 발표 논문집
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• pp.45-49
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• 2003

본 논문에서는 gate 산화막을 위한 Hf oxide 박막을 $Hf(dmae)_4$ (dmae=dimethylaminoethoxide) 전구체로 Direct Liquid Injection Metal Organic Chemical Vapor Deposition (DLI-MOCVD)방법을 이용하여 p-type Si(100) 기판 위에 증착하였다. 이 전구체를 이용하여 $150^{\circ}C$의 낮은 증착 온도에서도 낮은 carbon 농도와 roughness를 가지는 양질의 박막을 증착할 수 있었다. 증착된 박막은 비정질 구조를 나타내었지만 annealing 온도를 증가시킴에 따라서 결정성(monoclinic phase)을 나타내었다. $500{\AA}$으로 증착한 박막을 C-V 와 I-V curve를 통하여 전기적 특성을 평가하였다. 열처리 온도가 증가함에 따라 유효유전상수(k)는 증가하지만 열처리 온도가 $900^{\circ}C$ 이상이 되면 계면층의 형성에 의해 유효유전상수는 감소하게 되고 이에 따라 누설 전류도 감소하게 된다. 산소분위기 $800^{\circ}C$에서 annealing한 $HfO_2$ 박막의 유전상수는 20.1이고, 누설 전류 밀도는 SV에서 $2.2\times10^{-6}A/\textrm{cm}^2$ 로 좋은 전기적 특성을 가진다.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2002년도 동계연구발표회 논문개요집
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• pp.86-87
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• 2002

Fe과 Mo이 교대로 정렬해 있는 이중 페로브스카이트 구조를 갖는 $A_{2-x}$FeMo $O_{6}$(A=Ca, Sr, Ba) 화합물들은 망간 산화물들에 비해 높은 $T_{c}$ (310-420K)의 준강자성 상태를 갖는다.$^{1.3}$ 이 화합물들은 F $e^{3+}$ (S=5/2) 와 M $o^{5+}$(S=1/2) 스핀들 사이의 커다란 반강자성 상호작용으로 이론적으로 4$\mu$$_{B}$/f.u.의 $M_{s}$ 값을 갖는다. A-site의 평균 이온 반경( $r_{A}$)이 증가함에 따라 이 화합물들의 결정구조는 Monoclinic(A=Ca)에서 Tetragonal(Sr)과 Cubic(Ba)으로 점진적으로 변화한다.$^3$(중략)(중략)략)략)

• 한국세라믹학회지
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• 제29권2호
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• pp.119-126
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• 1992

3 mol% Y2O3-doped ZrO2 powders were prepared by hydrolysis with 0.1, 0.2, 0.3, 0.4, 0.5, 0.6 mol/ιH2O/ethanol into 0.1 mol/ι zirconium and yttrium alkoside/ethanol. Spherical monodispersed yttria-partially stabilized zirconia particles with an average diameter of about 0.5 ${\mu}{\textrm}{m}$ were prepared by hydrolysis with 0.2 mol/ιH2O/ethanol. The as-prepared powder was amorphous and with heating it transformed into cubic up to 80$0^{\circ}C$ and into tetragonal over 100$0^{\circ}C$. 3 mol% Y2O3-doped ZrO2 powders calcined over and up to 80$0^{\circ}C$ were a mixture of tetragonal and monoclinic and only tetragonal as determined by X-ray diffraction, respectively.

• 한국세라믹학회지
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• 제33권7호
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• pp.779-784
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• 1996

The spinel/cubic stabilized zirconia composites were fabricated via, The reaction sintering of monoclinic zirco-nia(baddeleyite) added with MgAl powder. During heating Mg and Al were oxidizedfirst and subsequently the oxides formed spinel (MgAl2O4) and finally remained MgO stabilized the zirconia, Because the oxides formed during the oxidation process would have very fine grain size (order of submicron) mainly due to the effects of attrition milling the reaction sintering was more effective in densification and improvement of strength and fracture toughness than conventional sintering with direct addition of MgO. The sintering behavior phase transformation during firing and mechanical properties of sintered body were investigated with emphasis on the relations between spinel formation due to MgAl addition and sintering and mechanical properties.

• 한국세라믹학회지
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• 제27권6호
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• pp.707-712
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• 1990

The basic zirconium sulfate was prepared from ZrOCl2.8H2O and H2SO4 in the 9$0^{\circ}C$ aqueous solution. The pH and amount of unreacted zirconium in the solution that reacton had completed was 0.2 and 10%. As the pH was increased to 1.4 by NH4OH theresulting precipitates were the mixtures of the basic zirconium sulfate and the zirconium hydroxide although the precipitates were recovered completely. The thermal decomposition behavior of this sample has been examined by thermal analysis(TG-DTA), X-ray diffraction study, infrared spectroscopy and sulfur analysis. As a result, it was found that the precipitates have perfectly been decomposed at 85$0^{\circ}C$ accompanying to the release of a molecule of water below 25$0^{\circ}C$ and 85% sulfate at about $600^{\circ}C$. The thermally decomlposed products were initially amorphous phase, which were become metastable tetragonal phase with increment of temperature and finally transformed to the stable monoclinic phase at 100$0^{\circ}C$.

• 한국세라믹학회지
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• 제27권5호
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• pp.613-618
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• 1990

The pure and 6mol% MgO-doped ZrO2 powders were prepared by hot petroleum drying method. The power characterization of homogeneous fine powder was indentified by the method of thermal analysis, BET and electron microscope. The transformation, content of t-ZrO2, crystallite size and apparent strain were measured by X-ray diffraction technique. The prepared powders were transformed in order of amorphouslongrightarrowmetastable cubic ZrO2longrightarrowmetastable tetragonal ZrO2longrightarrowstable monoclinic ZrO2 by a adequate heat treatment. The stabilization of metastable phase can be discussed in terms of energetial concept ; the difference of surface energy and internal strain in particle.

• 한국산학기술학회:학술대회논문집
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• 한국산학기술학회 2001년도 춘계학술대회 발표논문집
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• pp.287-289
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• 2001

The morphology of silica supported MoO$_3$ catalysts, which was prepared by impregnation of ammonium heptamolybdate with various weight loadings up to 35 wt%, was studied using x-ray diffraction. In addition to the orthorhombic phase, the behavior of the rarely studied hexagonal phase was characterized. For high loading catalysts, excess ammonium ions present in the monoclinic and triclinic precursors are capable of occupying interstitial sites of microcrystalline MoO$_3$ during moderate temperature calcinations and in doing so enhance the MoO$_3$-SiO$_2$ interaction. This results in a "well dispersed" morphology at high loadings. Sintering at high temperature is due to loss of ammonium from the oxide framework. Ammonia reimpregnation, which leads back to the well dispersed hexagonal phase, may offer a simple regeneration process for spent Mo containing catalysts.