• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.5
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• pp.80-86
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• 1998

Material characterizations were performed for In$_{0.53}Ga_{0.47}As/In$_{0.52}Al_{0.48}$/As MQWs grown on InP substrates by low-temperature modlecular beam epitaxy. MQW samples were grwon at different temperatures of 200.deg.C, 300.deg. C and 500.deg. C, and doped with 10$^{18}$ cm$^{3}$ Be. High resolution x-ray diffraction measurement showed the change in crystal qualities according to growth temperature. Hall measurement showed the changes in carrier concentrations and mobilities for different growth temperatures. The optical properties of MQW samples were investigated with photoluminescence and fourier-transform infrared spectroscopy measurements.

• Journal of the Korean Vacuum Society
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• v.1 no.1
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• pp.134-138
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• 1992

The GaAs/AlAs double barrier structures was grown by MBE(Mo1ecular Beam Epitaxy). Mesa diode was fabricated and I-V characteristics of the diode were measured by semiconductor parameter analyser at room temperature. TEM pictures show the double barrier structure with abrupt interface. PVCR(Peak to Valley Current Ratio) proves to be independent of barrier thickness. These results show that increase in barrier thickness leads to larger valley current by non-resonant tunneling.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.70-70
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• 2010

일차원 나노구조를 갖는 재료는 크기효과 뿐만 아니라 단결정성, 일차원성으로 인해 새로운 물리적, 화학적 성질과 높은 표면적-부피비 등으로 인하여 많은 관심의 대상이 되고 있다. 일차원 나노구조 중에 특히 GaAs 나노와이어의 경우, 미래의 전자 소자 혹은 광자 소자로서의 잠재력 때문에 많은 연구가 이루어지고 있다. GaAs 나노와이어는 MOCVD(Metal-Organic Chemical Vapor Deposition), CBE(Chemical Beam Epitaxy), MBE(Molecular Beam Epitaxy)등의 방법으로 성장시킬 수 있다. 본 연구에서는 아크 방전법으로 합성한 단일벽 탄소나노튜브 템플릿 위에 GaAs를 MBE로 성장시켜 다공성의 GaAs-탄소나노튜브 복합체를 제작하였다. GaAs는 성장온도를 $400^{\circ}{\sim}600^{\circ}C$ 사이로 변화시켜 성장시켰다. 성장온도가 $500^{\circ}C$ 미만일 경우에는 GaAs가 탄소나노튜브 위에서 입상구조로 성장이 되었으며 $500^{\circ}C$ 이상에서는 탄소나노튜브 위에 나노와이어가 성장되었다. 또한, 제작된 GaAs-탄소나노튜브 복합체를 전자 소스로서의 응용가능성을 보기 위해 전계 방출 특성을 측정하였다.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.53-53
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• 2003

최근 높은 유전상수와 잔류 분극, 비선형 등의 다양한 유전적인 특성으로 인해 산화물 박막이 많은 관심을 가지고 연구되어지고 있다. 많은 산화물 박막중에서도 BaTiO3/SiTiO3 (BTO/STO) 인 공격자는 STO나 BTO 또는 (Ba$_{0.5}$ Sr$_{0.5}$)TiO$_3$ (BST)등의 고용체들과 비교했을 때 아주 뛰어난 유전적인 성질을 나타내고 있다. 특히 1000 $\AA$ 이하의 낮은 두께에서도 높은 유전상수와 비선형도를 가진다는 사실이 선행된 실험에서 밝혀졌는데 BTO와 STO를 각각 2 unit cell (8 $\AA$)로 고정 시킨 후 다층 박막으로 제작했을 때 가장 큰 유전 특성을 얻을 수 있었다. 이런 뛰어난 유전적인 성질은 BTO와 STO 각 층의 두께와 주기 변화에 따른 박막 내부의 인위적인 stress와 그에 따른 격자 변형과 아주 밀접한 관계가 있음으로 생각되어진다. 따라서 이런 두 계면에서의 stress와 격자 변형을 더욱 정착하게 분석하기 위해서는 각 층을 원자 단위로 정확하게 두께 제어를 하고 증착되어지는 과정중에서의 growth mode를 확인하는 것이 무엇보다 중요한 일이다.

• Applied Science and Convergence Technology
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• v.25 no.4
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• pp.81-84
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• 2016

InP/InGaP quantum structures (QSs) grown on GaAs substrates by a migration-enhanced molecular beam epitaxy method were studied as a function of growth temperature (T) using photoluminescence (PL) and emission-wavelength-dependent time-resolved PL (TRPL). The growth T were varied from $440^{\circ}C$ to $520^{\circ}C$ for the formation of InP/InGaP QSs. As growth T increases from $440^{\circ}C$ to $520^{\circ}C$, the PL peak position is blue-shifted, the PL intensity increases except for the sample grown at $520^{\circ}C$, and the PL decay becomes fast at 10 K. Emission-wavelength-dependent TRPL results of all QS samples show that the decay times at 10 K are slightly changed, exhibiting the longest time around at the PL peak, while at high T, the decay times increase rapidly with increasing wavelength, indicating carrier relaxation from smaller QSs to larger QSs via wetting layer/barrier. InP/InGaP QS sample grown at $460^{\circ}C$ shows the strongest PL intensity at 300 K and the longest decay time at 10 K, signifying the optimum growth T of $460^{\circ}C$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.34-34
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• 2010

We report on the influence of heat treatments on the electrical properties of ZnO films grown by molecular-beam epitaxy. We note that the electrical resistance of the ZnO films is significantly changed by the heat treatments: the electrical resistance increases with the increase of ambient temperature, but above a critical temperature the resistance decreases with the increase of temperature, irrespective of ambient gases. On the other hand, it is found that the large amount of photocurrent is generated in the ZnO films, exposed to white sources: the photocurrent decreases with the increase of the obtained resistance, and the current increases with the decrease of the resistance. Also, it is shown that the X-ray diffraction linewidth of the ZnO films is significantly decreased by the heat treatments. These indicate that the increase/decrease of the electrical resistance is ascribed to the annihilation/formation of the residual donor-type defects in the ZnO films by the heat treatments. It is suggested that the increase of the electrical resistance is due to the annihilation of Zni-complex defects, while the decrease of the electrical resistance is due to the formation of VO-complex defects.

• Korean Journal of Materials Research
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• v.9 no.5
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• pp.515-519
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• 1999

We have investigated the photoreflectance characteristics for In\ulcornerGaAs/GaAs heterojunction structure grown by molecular beam epitaxy (MBE). The E\ulcorner bandgap energy of In\ulcornerGa\ulcornerAs at room temperature was observed at about 1.3 eV. From this result, the indium composition x value was calculated. The shoulder peaks were observed higher than E\ulcorner peaks, and peak positions were shifted toward 12 meV to 70 meV higher energy with increasing doping concentrations. The shoulder peaks can be observed by In segregation and re-evaporation. However, we think that indium re-evaporation cause th shift of shoulder peaks after epilayer growth.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.452-455
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• 2003

[ $ZrO_2$ ] dielectric layers were grown on the p-type Si (100) substrate by metalorganic molecular beam epitaxy(MOMBE). Zrconium t-butoxide, $Zr(O{\cdot}t-C_4H_9)_4$ was used as a Zr precursor and Argon gas was used as a carrier gas. The thickness of the layers was measured by scanning electron microscopy (SEM) and the properties of the $ZrO_2$ layers were evaluated by X-ray diffraction, high frequency capacitance-voltage measurement. and HF C-V measurements have shown that $ZrO_2$ layer grown by MOMBE has a high dielectric constant (k=18-19). The growth rate is affected by various process variables such as substrate temperature, bubbler temperature, Ar, and $O_2$ gas flows.

• Journal of the Korean Vacuum Society
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• v.21 no.6
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• pp.322-327
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• 2012

The strain effects of ZnSe epilayer on ZnSe/GaAs heterojunction structure grown by molecular beam epitaxy have been investigated by using electroreflectance (ER) spectroscopy. The ER measurements were performed as a function of modulation voltage, dc bias voltage, and temperature. From the room temperature ER spectrum, we observed a heavy-hole (HH: 2.609 eV) and light-hole (LH: 2.628 eV) transitions due to a compressive strain. With increasing the bias voltage, the amplitude of HH transition signal decreased and the amplitude of LH transition signal was almost the same. From the temperature dependence of ER spectra, we have studied the interaction between the strain and the thermal expansion coefficient.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.247-247
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• 2011

플라즈마 분자선 에피택시(plasma-assisted molecular beam epitaxy)법을 이용하여 다공질 실리콘(porous silicon)에 ZnO 박막을 성장하였다. 성장 후, 아르곤 분위기에서 10분 간 다양한 온도(500~700$^{\circ}C$)로 열처리하였다. 다공질 실리콘 및 열처리 온도가 ZnO 박막의 특성에 미치는 영향을 scanning electron microscopy (SEM), X-ray diffraction (XRD), photoluminescence (PL)을 이용하여 분석하였다. 실리콘 기판에 성장된 ZnO 박막은 일반적은 섬구조(island structure)로 성장된 반면, 다공질 실리콘에 성장된 ZnO 박막은 산맥과 같은 구조(mountain range-like structure)로 성장되었다. 열처리 온도가 증가함에 따라 ZnO 박막의 grain size는 증가하였다. 실리콘 기판 위에 성장된 ZnO 박막은 wurtzite 구조를 나타내는 여러 개의 회절 피크가 관찰된 반면, 다공질 실리콘에 성장된 ZnO 박막은 c-축 배향성(c-axis preferred orientation)을 나타내는 ZnO (002) 회절 피크만이 나타났다. 다공질 실리콘에 성장된 ZnO 박막의 구조적 및 광학적 특성이 실리콘 기판에 성장된 ZnO 박막의 특성보다 우수하게 나타났다. 뿐만 아니라, 열처리 온도가 증가함에 따라 다공질 실리콘에 성장된 ZnO 박막의 PL 강도비(intensity ratio)가 실리콘 기판에 성장된 ZnO 박막의 강도비보다 월등하게 증가하였다.