• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.04b
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• pp.35-38
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• 2000

In this study, the rise throughput and the stability in fabrication of device can be obtained by applying of CMP process to STI structure in 0.l8um semiconductor device. Through reverse moat pattern process, reduced moat density at high moat density, STI CMP process with low selectivity could be to fit polish uniformity between low moat density and high moat density. Because this reason, in-situ motor current end point detection method is not fit to the current EPD technology with the reverse moat pattern. But we use HSS without reverse moat pattern on STI CMP and take end point current sensing signal.[1] To analyze sensing signal and test extracted signal, we can to adjust wafer difference within $110{\AA}$.

• Journal of architectural history
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• v.32 no.3
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• pp.21-30
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• 2023

The Wolseong Wooden moat is a unique example. Which is a vertical wall made of wood. It shows a changing point how to make the wall by digging a hole and stacking stones vertically. This study tried to to make a assumption about the construction process of the wooden structure found in the Wolseong pit moat. I sorted out wooden elements and then analyzing these features and compared with the results of the excavation. After I made 3D modelling in the order to it was made. This moat is not only a function of digging up the ground to trap water, but also a technique of building structures to maintain walls. It is a valuable material that can show the woodworking engineering techniques of the Silla Dynasty.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.04b
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• pp.14-17
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• 2000

The rise throughput and the stability in fabrication of device can be obtained by applying of CMP process to STI structure in 0.18um semiconductor device. To employ in STI CMP, the reverse moat process has been added thus the process became complex and the defects were seriously increased. Removal rates of each thin films in STi CMP was not equal hence the devices must to be effected, that is, the damage was occured in the device dimension in the case of excessive CMP process and the nitride film was remained on the device dimension in the case of insufficient CMP process than these defects affect the device characteristics. We studied the current sensing method in STI-CMP with the reverse moat pattern.

• Journal of the Korean Institute of Traditional Landscape Architecture
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• v.28 no.2
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• pp.37-44
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• 2010

Our country traditionally employed a defensive system against the aggression by foreign powers by using a town castle and mountain castle. The moat was one of such a defensive system; however, there is few research work on a moat in comparison with its long history. This study was carried out to see the process of the changes of the Wolseong Fortress at Gyuongju, focused on the moat of the scale and nature of the construction methods to analyze such a Wolseong Fortress at Gyuongju as a result of consideration through bibliographical study, on-site investigation, and interviews, etc. This research discovered some facts as follows: the moats of Wolseong fortress at Gyeongju are roughly divided into three types; the first one is a natural moat flowing curved by the south side of Wolseong using the natural stream[Namcheon]as it is; the second one is a pond-type moat made by digging up plane non-rectangular pond along stereobate of castle wall with lakefront built with stream pebbles, and the last one is masonry moat at the east side of Wolseong with chisel-trimmed granites orderly piled in a plane triangular form. Among these, the pond-type moat was identified at the east-north-west side of Wolseong and the pond slopes from east to west as a separate one constructed with the terraces.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.25-28
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• 2001

Recently, STI(Shallow Trench Isolation) process has attracted attention for high density of semiconductor device as a essential isolation technology. Without applying the conventional complex reverse moat process, CMP(Chemical Mechanical Polishing) has established the Process simplification. However, STI-CMP process have various defects such as nitride residue, torn oxide defect, damage of silicon active region, etc. To solve this problem, in this paper, we discussed to determine the control limit of process, which can entirely remove oxide on nitride from the moat area of high density as reducing the damage of moat area and minimizing dishing effect in the large field area. We, also, evaluated the reliability and reproducibility of STI-CMP process through the optimal process conditions.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.501-504
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• 1999

In the shallow trench isolation(STI) chemical mechanical polishing(CMP) process, the key issues are the optimized thickness control within- wafer-non-uniformity, and the possible defects such as nitride residue and pad oxide damage. These defects after STI CMP process were discussed to accomplish its optimum process condition. To understand its optimum process condition, overall STI related processes including reverse moat etch, trench etch, STI filling and STI CMP were discussed. It is represented that the nitride residue can be occurred in the condition of high post CMP thickness and low trench depth. In addition there are remaining oxide on the moat surface after reverse moat etch. It means that reverse moat etching process can be the main source of nitride residue. Pad oxide damage can be caused by over-polishing and high trench depth.

• Journal of the Korean Institute of Traditional Landscape Architecture
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• v.35 no.1
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• pp.25-35
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• 2017

The purpose of this study is to re-exam of the modern values of a moat to utilize it with various functions such as a military defense on the outskirts of the castle, dividing the space by its boundary, controlling the micro-climate in the worsening modern environment with temperature rise due to climate change and habitat reduction of animals, and providing the habitat of animals to modern urban space, etc. The scope of the study is focusing on the castles with the moat installed to prevent the enemy from accessing directly to the wall using a pond or water path for military defense on the outskirts of the castle or to divide it into boundaries. In the Orient, the Nakan Eupseong, Haemi Eupseong, Gyeongju Wolseong in Korea and the Forbidden City in China, and Nijo Castle and Osaka Castle in Japan were selected. In the West, Edinburgh Castle in Britain, Blois Castle in France, Chillon Castle in Switzerland, and Frederiksborg Castle in Denmark were selected for the study. As a research method, literature research and field research were conducted. For the Orient, it was conducted in parallel with the literature research and field research. For the western, it was mainly conducted with literature research. For the literature research, the origin of the moat, the concept of the moat, the function of the moat, the history and culture of the western moat are based on the data from the related institutions and previous studies. For the Orient field research, exploring was conducted in two to three times from Jan. 2016 to Dec. 2016 in each of the target areas of Nakan Eupseong, Haemi Eupseong, Gyeongju Wolseong in Korea and the Forbidden City in China, and Nijo Castle and Osaka Castle in Japan. The contents of the research were analyzed through interviews, photographs, measurements, and observations on the function, size, and characteristics of the moat of each target. The results of this study are as follows. The moat was a structure installed to set a boundary for military defense facilities on the outskirts of a castle and it played an important role as a part of the city in the ancient times of Asia and the West through the Middle Ages. The role of the moat is gradually disappearing due to the disappearance of the purpose of military defense. However, moats are excluded from modern landscape planning, despite the fact that a moat filled with water is a hydrophilic space with great historical and cultural value such as various cultural activities and providing habitats for animals. By reflecting on the moats various functions in modern cities and utilizing it, it is expected to be utilized to bring pleasant air into the city where the circulation of air is blocked and energize the city as a hydroponic element.

• Journal of the Korean Institute of Traditional Landscape Architecture
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• v.28 no.3
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• pp.29-38
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• 2010

A moat is a pond or waterway paved on the outside of a fortress that is one of the facilities to prevent enemy from approaching the fortress wall or classify it as the boundary space, and this study was undertaken to find out the characteristics of the moat that was existed in the East and the West from ancient time to medieval time with the following result. First, the moat in the East was installed of natural moat and artificial moat at the same time while the moat in the West had the fortress built in naturally advantageous site to use natural most substantially more. Second, the moats of Korea were smaller in scale compared to other countries (Japan, China and the Western countries). Third, the fortresses in the East were built to protect towns or royal palace while the West had the fortress to protect the residence of kings, lords, great wealthy persons and the like, and they were used jointly with the natural moat and artificial moat to defend against the infiltration of enemy. Fourth, the Pungsujiri in the Orient is one of the numerous ideologies forming the supplementary ideologic system of Korean people that could not be denied as the perception that influences on Korean people after the Silla Dynasty, and this Pungsujiri was considered when determining the location of the castle. The moat surrounding the castle had the role to keep the good energy in the castle from escaping away. Fifth, the Ha-Ha technique in the west was designed to prevent the external power from infiltration by digging the ditch on the place applicable to the boundary of the garden site, rather than the fence. While walking around along the water-side path without knowing the existence of this ditch, when the road is discovered with the cut off in the ditch, people had the exclamation without actually recognizing such astonishment. It was originally the dike for military purpose during the medieval time that was designed to look into the garden without physical boundary surrounded with the vertical fence in the garden that by having the deep ditch like shape on the boundary line of the garden which was designed to form the farm by preventing various types of cattle from coming inside the garden and bring in the garden element for farms, forestry, agricultural land and the like.

• Earthquakes and Structures
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• v.23 no.1
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• pp.87-100
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• 2022

Limiting the displacement of seismic isolators causes a pounding phenomenon under severe earthquakes. Therefore, the ASCE 7-16 has provided minimum criteria for the design of the isolated building. In this research the seismic response of isolated buildings by Triple Friction Pendulum Isolator (TFPI) under the impact, expected, and unexpected mass eccentricity was evaluated. Also, the effect of different design parameters on the seismic behavior of structural and nonstructural elements was found. For this, a special steel moment frame structure with a surrounding moat wall was designed according to the criteria, by considering different response modification coefficients (RI), and 20% mass eccentricity in one direction. Then, different values of these parameters and the damping of the base isolation were evaluated. The results show that the structural elements have acceptable behavior after impact, but the nonstructural components are placed in a moderate damage range after impact and the used improved methods could not ameliorate the level of damage. The reduction in the RI and the enhancement of the isolator's damping are beneficial up to a certain point for improving the seismic response after impact. The moat wall reduces torque and maximum absolute acceleration (MAA) due to unexpected enhancement of mass eccentricity. However, drifts of some stories increase. Also, the difference between the response of story drift by expected and unexpected mass eccentricity is less. This indicates that the minimum requirement displacement according to ASCE 7-16 criteria lead to acceptable results under the unexpected enhancement of mass eccentricity.

• KIEE International Transactions on Electrophysics and Applications
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• v.2C no.5
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• pp.262-267
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• 2002

In this paper, we first studied the factors affecting the motor current (MC) signal, which was strongly affected by the systematic hardware noises depending on polishing such as pad conditioning and arm oscillation of platen and recipe, head motor. Next, we studied the end point detection (EPD) for the chemical mechanical polishing (CMP) process of shallow trench isolation (STI) with reverse moat structure. The MC signal showed a high amplitude peak in the fore part caused by the reverse meal. pattern. We also found that the EP could not be detected properly and reproducibly due to the pad conditioning effect, especially when conventional low selectivity slurry was used. Even when there was no pad conditioning effect, the EPD method could not be applied, since the measured end points were always the same due to the characteristics of the reverse moat structure with an open nitride layer.