• Title/Summary/Keyword: MoSi

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Characteristic of Copper Films on Molybdenum Substrate by Addition of Titanium in an Advanced Metallization Process (Mo 하지층의 첨가원소(Ti) 농도에 따른 Cu 박막의 특성)

  • Hong, Tae-Ki;Lee, Jea-Gab
    • Korean Journal of Materials Research
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    • v.17 no.9
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    • pp.484-488
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    • 2007
  • Mo(Ti) alloy and pure Cu thin films were subsequently deposited on $SiO_2-coated$ Si wafers, resulting in $Cu/Mo(Ti)/SiO_2$ structures. The multi-structures have been annealed in vacuum at $100-600^{\circ}C$ for 30 min to investigate the outdiffusion of Ti to Cu surface. Annealing at high temperature allowed the outdiffusion of Ti from the Mo(Ti) alloy underlayer to the Cu surface and then forming $TiO_2$ on the surface, which protected the Cu surface against $SiH_4+NH_3$ plasma during the deposition of $Si_3N_4$ on Cu. The formation of $TiO_2$ layer on the Cu surface was a strong function of annealing temperature and Ti concentration in Mo(Ti) underlayer. Significant outdiffusion of Ti started to occur at $400^{\circ}C$ when the Ti concentration in Mo(Ti) alloy was higher than 60 at.%. This resulted in the formation of $TiO_2/Cu/Mo(Ti)\;alloy/SiO_2$ structures. We have employed the as-deposited Cu/Mo(Ti) alloy and the $500^{\circ}C-annealed$ Cu/Mo(Ti) alloy as gate electrodes to fabricate TFT devices, and then measured the electrical characteristics. The $500^{\circ}C$ annealed Cu/Mo($Ti{\geq}60at.%$) gate electrode TFT showed the excellent electrical characteristics ($mobility\;=\;0.488\;-\;0.505\;cm^2/Vs$, on/off $ratio\;=\;2{\times}10^5-1.85{\times}10^6$, subthreshold = 0.733.1.13 V/decade), indicating that the use of Ti-rich($Ti{\geq}60at.%$) alloy underlayer effectively passivated the Cu surface as a result of the formation of $TiO_2$ on the Cu grain boundaries.

Influence of Oxidation Inhibitor on Carbon-Carbon Composites : 7. Studies on Work of Adhesion and Fracture Toughness of Carbon-Carbon Composites (산화억제제를 첨가한 탄소/탄소 복합재료의 물성에 관한 연구 : 7. 탄소/탄소 복합재료외 부착력과 파괴인성)

  • 박수진;서민강;이재락
    • Polymer(Korea)
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    • v.25 no.3
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    • pp.435-440
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    • 2001
  • The objective of this study was to examine the effect of oxidation inhibitor contents on the work of adhesion, fracture toughness, and impact strength of the unidirectional carbon-carbon composites (C/C composites). The molybdenum disilicide ($MoSi_2$) used as an oxidation inhibitor was impregnated with phenolic resins to improve the anti-oxidation properties of the composites in different concentrations of 4, 12 and 20 wt%. Based on Wilhelmy equation, the work of adhesion of C/C composites was calculated by contact angle methods. Fracture toughness and impact strength were pressured by three-point bending test for the critical intensity factor ($K_IC$) and Izod test method, respectively. As a result, the composites made with $MoSi_2$ resulted in an increasing of both fracture toughness and impact strength. Especially, the composites made with 12 wt% $MoSi_2$ content showed the highest value of London dispersive component, $W_A\;^L$, in work of adhesion, resulting from improving the interfacial adhesion force among fibers, filler, and matrix in this system.

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Fabrication and Mechanical Properties of $MoSi_2$ Based Composites ($MoSi_2$ 복합재료의 제조 및 기계적 특성)

  • Park, Yi-Hyun;Lee, Sang-Pill;Lee, Sung-Eun;Jin, Joon-Ok;Kim, Sa-Woong;Lee, Jin-Kyung;Yoon, Han-Ki
    • Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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    • 2003.05a
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    • pp.289-293
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    • 2003
  • This study dealt with the characterization of $MoSi_2$ based composites containing three types of additive materials such as SiC, $NbSi_2\;and\;ZrO_2$ particles have been investigated, based on the detailed examination of their microstructures and fracture surfaces. The effects of reinforcing materials on the high temperature strength of $MoSi_2$ based composites have been also examined. $MoSi_2$ based composites were fabricated by the hot press process under the vacuum atmosphere. The volume fraction of reinforcing materials in the composite system was fixed as 20 %. The microstructures and the mechanical properties of $MoSi_2$ based composites were investigated by means of SEM, EDS, XRD and three point bending test.

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Comparative Study on Performance of Grid-Connected Photovoltaic Modules in Tropical Monsoon Climate under Thailand condition (태국 열대몬순기후 조건에서 PV모듈 기술별 성능특성 비교 연구)

  • Kim, Seung Duck;Koh, Byung Euk;Park, Jin Hee;Cheon, Dae In
    • New & Renewable Energy
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    • v.10 no.3
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    • pp.39-46
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    • 2014
  • The performances of three different types of photovoltaic (PV) module technologies namely, copper-indium-diselenide (CIGS), mono-crystalline silicon (mo-Si) and amorphous silicon (a-Si) have been comparatively studied in the grid-connected system for more than a year under the tropical monsoon climate of Thailand. The yields, performance ratios and system efficiencies for the respective PV module technologies have been calculated and a comparison is presented here. The performance ratios of the initial operation year for CIGS showed highest among the compared technologies under Thailand climate conditions by marking 97.0% while 89.6% for a-Si and 81.5% for mo-Si. Although mo-Si has shown highest efficiencies all over the period, under the testing conditions, the operating efficiency of mo-Si was down-graded from its reference value mainly due to high operating temperature and the efficiency of the tested CIGS module was also found as high as that of mo-Si in the study. Accordingly, outdoor assessment shows that CIGS modules have demonstrated high performance in terms of yields and performance ratios in Thailand climate conditions.

Fabrication of $MoSi_2$-TiC Composite Powders by Mechanical Alloying (기계적 압금화에 의한 $MoSi_2$-TiC 복합분말의 제조)

  • 윤종열
    • Journal of Powder Materials
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    • v.6 no.2
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    • pp.178-185
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    • 1999
  • MoSi$_2$-TiC composite powders were fabricated by in-situ reaction through mechanical alloying. Also the monolithic MoSi$_2$ as well as TiC were synthesiced by mechanical alloying for comparison. An abrupt increase of vial surface temperature was detected due to a sudden reaction between elemental powders during milling. The reaction time for synthesis of composite powders decreased with increasing the content of (Ti+C) powder. It was found that a significant decrease of Ti grain size was observed with increasing the milling time. And the synthesis reaction of MoSi$_2$-TiC composite powders were largely dependent on the reaction between Ti and C powders.

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Neutron Diffraction Analysis of Tungsten-Molybdenum-Disilicide Powders Formed by Self-propagating High Temperature Synthesis

  • Choi, Y.;Kim, Y.S.
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09b
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    • pp.1325-1326
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    • 2006
  • Tungsten-molydiside $W_xMo_{1-x}Si_2$ was synthesized by self-propagating high temperature synthesis (SHS). The SHS product with the initial composition of (0.5Mo+0.5W+2Si) contains 23.9% $MoSi_2$, 40.89% $WSi_2$ with remaining 9.11% Mo, 9.16% Si and 16.94%W. Lattice parameters of the $MoSi_2$ and $WSi_2$ determined by Rietvelt analysis were a=0.3206 nm, c=0.7841 nm and a=0.3212 nm, c=0.7822 nm, respectively.

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FABRICATION OF Mo-Si-B INTERMETALLIC COMPOUND POWDERS UNDER DIFFERENT HEAT TREATMENT CONDITIONS

  • JUNG HYO PARK;SEONG LEE;DONGHOON KIM;YOUNGMOO KIM;SUNG HO YANG;SUNG HO LEE
    • Archives of Metallurgy and Materials
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    • v.63 no.3
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    • pp.1509-1512
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    • 2018
  • In this research, we investigated the effects of reduction atmospheres on the creation of the Mo-Si-B intermetallic compounds (IMC) during the heat treatments. For outstanding anti-oxidation and elevated mechanical strength at the ultrahigh temperature, we fabricated the uniformly dispersed IMC powders such as Mo5SiB2 (T2) and Mo3Si (A15) phases using the two steps of chemical reactions. Especially, in the second procedure, we studied the influence of the atmospheres (e.g. vacuum, argon, and hydrogen) on the synthesis of IMCs during the reduction. Furthermore, the newly produced IMCs were observed by SEM, XRD, and EDS to identify the phase of the compounds. We also calculated an amount of IMCs in the reduced powders depending on the atmosphere using the Reitveld refinement method. Consequently, it is found that hydrogen atmosphere was suitable for fabrication of IMC without other IMC phases.

The Oxidation of Polymethylsiloxane/MoSi$_2$/SiC/Si-Derived Ceramic Composite Coatings

  • Moon, Jae-Jin;Lee, Dong-Bok;Kim, Deug-Joong
    • Journal of the Korean institute of surface engineering
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    • v.36 no.1
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    • pp.85-88
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    • 2003
  • By utilization of preceramic polymer of polymethylsiloxane (PMS), a $MoSi_2$SiOC/SiC ceramic composite was fabricated. The prepared composite displayed superior high temperature oxidation resistance by forming $SiO_2$ on the surface. The thin $SiO_2$ layer had some surface cracks, but they had not adversely deteriorated the oxidation resistance. The composite fabrication method employed in this study can be applied to protect any possible substrate material from aggressive oxidative attack, if the composite were coated on the substrate material.