• 제목/요약/키워드: Mo Film

검색결과 674건 처리시간 0.027초

The Mechanical Property of Electroplated Cu Film

  • Cho, Chul-Ho;Ha, Seung-Mo;Ahn, Yoo-Min;Kim, Dae-Kun;Lee, Jae-Ho
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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    • pp.139-140
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    • 2002
  • This paper discusses the effect of plating condition on the mechanical property of electroplated Cu film. Current density, the amount of the organic additives was found to affect the residual stress of electroplated copper film. The result show that, in the case of residual stress, the copper film deposited at higher additive result in lower residual stress and plating current by $15mA/cm^2$ induced a better result than any other ones.

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Characterization of F- and Al-codoped ZnO Transparent Conducting Thin Film prepared by Sol-Gel Spin Coating Method

  • Nam, Gil Mo;Kwon, Myoung Seok
    • 한국세라믹학회지
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    • 제53권3호
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    • pp.338-342
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    • 2016
  • ZnO thin film co-doped with F and Al was prepared on a glass substrate via simple non-alkoxide sol-gel spin coating. For a fixed F concentration, the addition of Al co-dopant was shown to reduce the resistivity mainly due to an increase in electrical carrier density compared with ZnO doped with F only, especially after the second post-heat-treatment in a reducing environment. There was no effective positive contribution to the reduction in resistivity due to the mobility enhancement by the addition of Al co-dopant. Optical transmittance of the ZnO thin film co-doped with F and Al in the visible light domain was shown to be higher than that of the ZnO thin film doped with F only.

스퍼터로 성장된 알루미늄 박막의 공정 변수와 박막 두께에 따른 물성 (Film Properties of Al Thin Films Depending on Process Parameters and Film Thickness Grown by Sputter)

  • 오일권;윤창모;장진욱;김형준
    • 한국재료학회지
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    • 제26권8호
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    • pp.438-443
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    • 2016
  • We developed an Al sputtering process by varying the plasma power, process temperature, and film thickness. We observed an increase of hillock distribution and average diameter with increasing plasma power, process temperature, and film thickness. Since the roughness of a film increases with the increase of the distribution and average size of hillocks, the control of hillock formation is a key factor in the reduction of Al corrosion. We observed the lowest hillock formation at 30 W and $100^{\circ}C$. This growth characteristic of sputtered Al thin films will be useful for the reduction of Al corrosion in the future of the electronic packaging field.

Resistance Switching Phenomena in Fe203 Thin Films Using

  • Lee, Sung-Yong;Lee, Jun-Young;So, Byung-Soo;Bae, Seung-Muk;Hwang, Jin-Ha;Lee, Ho-Min;Lee, Sun-Sook;Chung, Taek-Mo;Kim, Chang-Gyoun;An, Ki-Seok;Kim, Yeong-Cheol
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2007년도 춘계학술대회
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    • pp.251-251
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    • 2007
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Synthesis of Cobalt Oxide Film by Thermal Decomposition for Potential Various Applications

  • Han, Seong Ho;Park, Bo Keun;Son, Seong Uk;Kim, Chang Gyoun;Chung, Taek-Mo
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.365.1-365.1
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    • 2014
  • Cobalt oxide has excellent various properties such as high catalytic activity, antiferromagnetism, and electrochromism. So cobalt oxides offer a great potential for their applications in the various areas such as optical gas sensor, catalysts for oxidation reaction, electrochromic devices, high temperature solar selective absorbers, magnetic materials, pigment for glasses and ceramics, and negative electrodes for lithium-ion batteries. We have synthesized novel cobalt complexes by simple reaction of cobalt bistrimethylsilylamide as a starting material with a lot of conventional ligands as potential cobalt oxide precursors. The studies include the facile preparation, structural characterization, and spectroscopic analysis of the new precursors. We are making efforts to grow cobalt oxide thin films using cobalt complexes newly synthesized in this study using deposition techniques.

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Film Cassette의 세균 오염도와 소독에 관한 연구 (A Study on Contamination and Disinfection of Film Cassette)

  • 권대철;정경모;최지원
    • 대한방사선기술학회지:방사선기술과학
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    • 제23권2호
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    • pp.55-61
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    • 2000
  • In July 2000, a bacteria infection on film cassette contact surface was examined at the diagnostic radiology department of the S. hospital. The objective of this study was to assess the contamination level on film cassette contact surface as a predictor of patient to prevent from nosocomial infection. The study showed that the laboratory result was identified non-pathologic bacterial in the four different cassette size of the contact surface. The study concludes that presence of a bacterial infection wilt prevent a using antiseptic technique on film cassette contact surface. Also the education of nosocomial infection for radiographer will be required.

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열교환 부품용 발열체 형성기술 (The Formation Technique of Thin Film Heaters for Heat Transfer Components)

  • 조남인;김민철
    • 반도체디스플레이기술학회지
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    • 제2권4호
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    • pp.31-35
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    • 2003
  • We present a formation technique of thin film heater for heat transfer components. Thin film structures of Cr-Si have been prepared on top of alumina substrates by magnetron sputtering. More samples of Mo thin films were prepared on silicon oxide and silicon nitride substrates by electron beam evaporation technology. The electrical properties of the thin film structures were measured up to the temperature of $500^{\circ}C$. The thickness of the thin films was ranged to about 1 um, and a post annealing up to $900^{\circ}C$ was carried out to achieve more reliable film structures. In measurements of temperature coefficient of resistance (TCR), chrome-rich films show the metallic properties; whereas silicon-rich films do the semiconductor properties. Optimal composition between Cr and Si was obtained as 1 : 2, and there is 20% change or less of surface resistance from room temperature to $500^{\circ}C$. Scanning electron microscopy (SEM) and Auger electron spectroscopy (AES) were used for the material analysis of the thin films.

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비정질 AsSeS 박막의 홀로그래픽 데이터 격자형성 (Holographic Grating Formation of Amorphous AsSeS Thin Film)

  • 구용운;이송희;남기현;구상모;정홍배
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.447-448
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    • 2008
  • In this paper, we investigated the diffraction grating efficiency on AsSeS and Ag-doped amorphous chalcogenide Ag/AsSeS thin film for used to volume hologram. The film thickness was 0.5um and diffraction efficiency was obtained from (P:P) polarized He-Ne (632.8nm)laser beam on AsSeS and Ag/AsSeS thin films. As a results, diffraction grating was not formed at AsSeS thin film but at Ag-doped AsSeS thin film, diffraction grating was formed well compare with the former.

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