• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.29 no.11
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• pp.28-34
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• 2015

By incorporating a 966nm near infrared laser, we demonstrated bidirectional current triggering of between 0 and 10mA in a two-terminal planar device based on a highly resistive vanadium dioxide ($VO_2$) thin film grown by a pulsed laser deposition method. A two-terminal planar device, which had an electrode separation of $100{\mu}m$ and a $50{\mu}m-wide$ $VO_2$ conducting layer, was fabricated through ion beam-assisted milling and photolithographic techniques. A bias voltage range for stable bidirectional current triggering was determined by investigating the current-voltage curves of the $VO_2-based$ device in a current-controlled mode. Bidirectional current triggering of up to 10mA was realized by directly illuminating the $VO_2$ film with a focused infrared laser beam, and the transient responses of triggered currents were analyzed when the laser was modulated at various pulse widths and repetition rates. A switching contrast between off- and on-state currents was evaluated as ~3571, and the rising and falling times were measured as ~40 and ~20ms, respectively.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.38-42
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• 2002

In the recent, electro-rheological fluid has been used for micro polishing of the 3-dimensional micro-aspherical lens and some sectional parts with defects on the wide flat wafer. The ER fluid has the properties that its viscosity has drastic changed under some electric fields. Therefore, ER fluid can be applicable to the micro polishing fur some parts using these properties. In this paper, the experimental device has been constructed using the precision milling machine in order to micro polishing far some sectional parts of a 4 inches wafer It is consisted of a small steel electrode, a wafer fixture, DC10mA and 5KV power supply unit, and a controller unit. Using the ER experimental device, possibility of amending for wide flat wafer and micro polishing of some micro part has been analyzed.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.77-77
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• 2011

These days, a growing demand for memory device is filled up with the flash memory and the dynamic random access memory (DRAM). Although DRAM is a reasonable solution for current demand, the universal novel memory with high density, high speed and nonvolatility, needs to be developed. Among various new memories, the magnetic random access memory (MRAM) device is considered as one of good candidate memories because of excellent features including high density, high speed, low operating power and nonvolatility. The etching of MTJ stack which is composed of magnetic materials and insulator such as MgO is one of the vital process for MRAM. Recently, MgO has attracted great interest in the MTJ stack as tunneling barrier layer for its high tunneling magnetoresistance values. For the successful realization of high density MRAM, the etching process of MgO thin films should be investigated. Until now, there were some works devoted to the investigations on etch characteristics of MgO thin films. Initially, ion milling was applied to the etching of MgO thin films. However, ion milling has many disadvantages such as sidewall redeposition and etching damage. High density plasma etching containing the magnetically enhanced reactive ion etching and high density reactive ion etching have been employed for the improvement of etching process. In this work, inductively coupled plasma reactive ion etching (ICPRIE) system was adopted for the improvement of etching process using MgO thin films and etching gas mixes of $CH_4$/Ar and $CH_4$/$O_2$/Ar have been employed. The etch rates are measured by a surface profilometer and etch profiles are observed using field emission scanning emission microscopy (FESEM). The effects of gas concentration and etch parameters such as coil rf power, dc-bias voltage to substrate, and gas pressure on etch characteristics will be systematically explored.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.9
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• pp.72-80
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• 2019

In this task, the tool dynamometer design and manufacture, and the Ansys S/W structural analysis program for tool attachment that satisfies the cutting force measurement requirements of the tool dynamometer system are used to determine the cutting force generated by metal cutting using 3-axis static structural analysis and the LabVIEW system. The cutting power in a cutting process using a milling tool for processing metals provides useful information for understanding the processing, optimization, tool status monitoring, and tool design. Thus, various methods of measuring cutting power have been proposed. The device consists of a strain-gauge-based sensor fitted to a new design force sensing element, which is then placed in a force reduction. The force-sensing element is designed as a symmetrical cross beam with four arms of a rectangular parallel line. Furthermore, data duplication is eliminated by the appropriate setting the strain gauge attachment position and the construction of a suitable Wheatstone full-bridge circuit. This device is intended for use with rotating spindles such as milling tools. Verification and machining tests were performed to determine the static and dynamic characteristics of the tool dynamometer. The verification tests were performed by analyzing the difference between strain data measured by weight and that derived by theoretical calculations. Processing test was performed by attaching a tool dynamometer to the MCT to analyze data generated by the measuring equipment during machining. To maintain high productivity and precision, the system monitors and suppresses process disturbances such as chatter vibration, imbalances, overload, collision, forced vibration due to tool failure, and excessive tool wear; additionally, a tool dynamometer with a high signal-to-noise ratio is provided.

• Current Research on Agriculture and Life Sciences
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• v.32 no.2
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• pp.91-97
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• 2014

In order to analyze the structural factors and milling performance of farmhouse rice milling machines in Korea, this study classified 29 models of the farmhouse rice milling machines sold in Korea into hulling and polishing devices, examined the structural features for each device, and then analyzed the performance factors based on the results. With regard to hulling devices, impeller rotational speed was investigated as a major structural factor. The hulling devices at an impeller rotational speed of 4,800 rpm were most frequently used and accounted for the largest proportion, 65.5%. At this rotational speed, the hulling rate was the highest, 99.45%, and the brown rice cracked rate was the lowest. Thus, the best impeller rotational speed for the hulling performance was analyzed as 4,800 rpm (p<0.05). With regard to polishing devices, rotor speed was investigated as a major structural factor. The polishing devices with a rotor linear velocity of 2 m/s were most commonly used and accounted for the largest proportion, 60.1%. At this linear velocity, the hulling rate was the highest with 75.07%, and the dispassion rate and broken rice rate were the lowest with 0.02 and 7.06%, respectively. Thus, the best rotor linear velocity for the polishing performance was analyzed as 2 m/s (p<0.05).

• Journal of the Korean Magnetics Society
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• v.24 no.1
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• pp.1-10
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• 2014

$Co_2Z$-type barium ferrites ($Ba_3Co_2Fe_{24}O_{41}$) were synthesized using variation method. First, M-type, $Co_2Y$-type and $Co_2Z$-type synthesized by hydrothermal method. Second, M- and Y-type precursors for synthesis of $Co_2Z$ hexaferrite by hydrothermal and ball milling method. the morphology, structure and magnetic properties of the barium ferrite particles were characterized using XRD, FESEM, VSM, impedance. As a result, Single phase of M-type and $Co_2Y$-type were obtained. Manufactured powders of M+Y ball milling, M+Y hydrothermal were similar to single phase of $Co_2Z$-type hexaferrite, all powders were obtained theoretical magnetization (50 emu/g). The largest initial permeability were obtained $Co_2Z$ hexaferrite synthesized by reagent precusor, With increasing calcination temperature was lowered the initial permeability. In another synthesis didn't almost that little change could be found.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.322-325
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• 2005

The shrinking critical dimensions of modern technology place a heavy requirement on optimizing feature shapes at the micro- and nano scale. In addition, the use of ion beams in the nano-scale world is greatly increased by technology development. Especially, Focused ion Beam (FIB) has a great potential to fabricate the device in nano-scale. Nevertheless, FIB has several limitations, surface swelling in low ion dose regime, precipitation of incident ions, and the re-deposition effect due to the sputtered atoms. In recent years, many approaches and research results show that the re-deposition effect is the most outstanding effect to overcome or reduce in fabrication of micro and nano devices. A 2D string based simulation software AMADEUS-2D $(\underline{A}dvanced\;\underline{M}odeling\;and\;\underline{D}esign\;\underline{E}nvironment\;for\;\underline{S}putter\;Processes)$ for ion milling and FIB direct fabrication has been developed. It is capable of simulating ion beam sputtering and re-deposition. In this paper, the 2D FIB simulation is demonstrated and the characteristics of ion beam induced direct fabrication is analyzed according to various parameters. Several examples, single pixel, multi scan box region, and re-deposited sidewall formation, are given.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.4
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• pp.87-93
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• 2021

The mold industry is competitive, and mold should be processed under optimal conditions for efficient processing. However, the cutting conditions of the ball-end mill, which are a major factor in mold processing, are mostly set empirically, and considerable research is required for increasing the tool life and processing accuracy. In this study, a tool dynamometer and an eddy current sensor were used along with NI-DAQ, a data acquisition device, to obtain characteristic values of the cutting force and tool deformation during the ball end-mill machining of inclined surfaces at a machining center. The cutting force and tool deformation were measured in an experiment. It was found that the tool received the greatest cutting force at the end of the machining process, and the deformation of the tool increased rapidly. Furthermore, the cutting force tended to increase with the angle and number of rotations. The deformation increased rapidly during the machining of a 45° inclined surface.

• Design & Manufacturing
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• v.11 no.3
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• pp.19-24
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• 2017

In these days, increase requirement of TEM (Transmission Electro Microscope) in not only scientific field but also industrial field. Because TEM can measure inner-structure of specimen a variety of materials like metal, bio. etc. When use TEM, specimen should be thin about 50nm. So making for thin specimen, use Ion milling device that include specimen holder. The holder generally made of Aluminium Aluminium holder is worn away easily. For this reason, using time of ion milling with aluminum holder is too short. To solve the problem, we replace aluminium holer to molybdenum alloy holder. In this paper, we design molybdenum alloy holer for CAM and modify CAD modeling for effective machining process. So we array a specimen 3 by 4 and setup orientation for one-shot machining process. Next we make a CAM program for machining. we making a decision two machining strategy that chose condition of tool-path method, step-down, step-over. etc. And then conduct machining using CNC milling machining center. To make clear difference between case.1 and case.2, we fixed machining conditions like feed-rate, main spindle rpm, etc. After machining, we confirm the condition of workpiece and analysis the problems case by case. Finally, case.2 work piece that superior than case.1 cutting with WEDM because that method can not ant mechanical effect on workpiece.

• Journal of the Microelectronics and Packaging Society
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• v.24 no.1
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• pp.1-8
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• 2017

Fe-9.8Si-6.0Al mother alloy was manufactured using by Fe-3.5Si recycled scrap and Si powder. And then, soft magnetic alloy powder of $D_{50}$ size and sphere type were prepared by gas atomization process. To obtain the soft magnetic powder of a high aspect ratio, in the first, we conducted the ball milling process for 8 hours. And heat treatment was performed under $650^{\circ}C$, 2 hours and $N_2$ atmosphere condition for reducing the residual stress of the powder. Based on these process, we made around $50{\mu}m$ diameter Fe-9.8Si-6.0Al powder, which morphology and shape was a similar to the commercial Fe-Si-Al powder. Finally, the soft magnetic sheets were prepared by tape casting process using by those powders. The permeability of the tape casting sheet was measured, and we confirmed the possibility of reusing to the soft magnetic materials of Fe-Si electric sheet scrap.