• 조명전기설비학회논문지
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• 제29권11호
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• pp.28-34
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• 2015

By incorporating a 966nm near infrared laser, we demonstrated bidirectional current triggering of between 0 and 10mA in a two-terminal planar device based on a highly resistive vanadium dioxide ($VO_2$) thin film grown by a pulsed laser deposition method. A two-terminal planar device, which had an electrode separation of $100{\mu}m$ and a $50{\mu}m-wide$ $VO_2$ conducting layer, was fabricated through ion beam-assisted milling and photolithographic techniques. A bias voltage range for stable bidirectional current triggering was determined by investigating the current-voltage curves of the $VO_2-based$ device in a current-controlled mode. Bidirectional current triggering of up to 10mA was realized by directly illuminating the $VO_2$ film with a focused infrared laser beam, and the transient responses of triggered currents were analyzed when the laser was modulated at various pulse widths and repetition rates. A switching contrast between off- and on-state currents was evaluated as ~3571, and the rising and falling times were measured as ~40 and ~20ms, respectively.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.38-42
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• 2002

In the recent, electro-rheological fluid has been used for micro polishing of the 3-dimensional micro-aspherical lens and some sectional parts with defects on the wide flat wafer. The ER fluid has the properties that its viscosity has drastic changed under some electric fields. Therefore, ER fluid can be applicable to the micro polishing fur some parts using these properties. In this paper, the experimental device has been constructed using the precision milling machine in order to micro polishing far some sectional parts of a 4 inches wafer It is consisted of a small steel electrode, a wafer fixture, DC10mA and 5KV power supply unit, and a controller unit. Using the ER experimental device, possibility of amending for wide flat wafer and micro polishing of some micro part has been analyzed.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.77-77
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• 2011

These days, a growing demand for memory device is filled up with the flash memory and the dynamic random access memory (DRAM). Although DRAM is a reasonable solution for current demand, the universal novel memory with high density, high speed and nonvolatility, needs to be developed. Among various new memories, the magnetic random access memory (MRAM) device is considered as one of good candidate memories because of excellent features including high density, high speed, low operating power and nonvolatility. The etching of MTJ stack which is composed of magnetic materials and insulator such as MgO is one of the vital process for MRAM. Recently, MgO has attracted great interest in the MTJ stack as tunneling barrier layer for its high tunneling magnetoresistance values. For the successful realization of high density MRAM, the etching process of MgO thin films should be investigated. Until now, there were some works devoted to the investigations on etch characteristics of MgO thin films. Initially, ion milling was applied to the etching of MgO thin films. However, ion milling has many disadvantages such as sidewall redeposition and etching damage. High density plasma etching containing the magnetically enhanced reactive ion etching and high density reactive ion etching have been employed for the improvement of etching process. In this work, inductively coupled plasma reactive ion etching (ICPRIE) system was adopted for the improvement of etching process using MgO thin films and etching gas mixes of $CH_4$/Ar and $CH_4$/$O_2$/Ar have been employed. The etch rates are measured by a surface profilometer and etch profiles are observed using field emission scanning emission microscopy (FESEM). The effects of gas concentration and etch parameters such as coil rf power, dc-bias voltage to substrate, and gas pressure on etch characteristics will be systematically explored.

• 한국기계가공학회지
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• 제18권9호
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• pp.72-80
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• 2019

In this task, the tool dynamometer design and manufacture, and the Ansys S/W structural analysis program for tool attachment that satisfies the cutting force measurement requirements of the tool dynamometer system are used to determine the cutting force generated by metal cutting using 3-axis static structural analysis and the LabVIEW system. The cutting power in a cutting process using a milling tool for processing metals provides useful information for understanding the processing, optimization, tool status monitoring, and tool design. Thus, various methods of measuring cutting power have been proposed. The device consists of a strain-gauge-based sensor fitted to a new design force sensing element, which is then placed in a force reduction. The force-sensing element is designed as a symmetrical cross beam with four arms of a rectangular parallel line. Furthermore, data duplication is eliminated by the appropriate setting the strain gauge attachment position and the construction of a suitable Wheatstone full-bridge circuit. This device is intended for use with rotating spindles such as milling tools. Verification and machining tests were performed to determine the static and dynamic characteristics of the tool dynamometer. The verification tests were performed by analyzing the difference between strain data measured by weight and that derived by theoretical calculations. Processing test was performed by attaching a tool dynamometer to the MCT to analyze data generated by the measuring equipment during machining. To maintain high productivity and precision, the system monitors and suppresses process disturbances such as chatter vibration, imbalances, overload, collision, forced vibration due to tool failure, and excessive tool wear; additionally, a tool dynamometer with a high signal-to-noise ratio is provided.

• Current Research on Agriculture and Life Sciences
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• 제32권2호
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• pp.91-97
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• 2014

우리나라 농가용 도정기의 구조요인과 도정성능을 분석하기 위하여, 판매되고 있는 농가용 도정기 29개 모델을 이용하여 제현장치와 정미장치로 분류하였고, 각 장치별로 구조적 특징을 조사하였고 그 결과를 바탕으로 성능요인을 분석하였다. 제현장치는 임펠러 회전속도가 주요 구조적 요인으로 조사되었으며, 4,800 rpm의 임펠러 회전속도가 65.5%로 가장 많이 사용하고 있는 것으로 나타났다. 이 회전속도에서 탈부율이 99.45%로 가장 높게 나타났고, 현미동할립율이 가장 낮게 나타나 제현성능에 가장 좋은 임펠러의 회전속도는 4,800 rpm인 것으로 분석되었다(p<0.05). 정미장치는 로터 선속도가 주요 구조적 요인으로 조사되었으며, 2 m/s의 로터 선속도가 60.1%로 가장 많이 사용하고 있는 것으로 나타났다. 이선속도에서 도정수율이 75.07%로 가장 높게 나타났고, 유실곡비율과 싸라기율이 각각 0.02%, 7.06%로 가장 낮게 나타나 정미성능에 가장 좋은 로터의 선속도는 2 m/s인 것으로 분석되었다(p<0.05).

• 한국자기학회지
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• 제24권1호
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• pp.1-10
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• 2014

$Co_2Z$-type hexaferrite 시편을 다양한 합성법을 이용하여 제조하였다. 수열합성법을 이용하여 M-type, $Co_2Y$-type, $Co_2Z$-type을 제조하였으며, 제조된 M-type과 $Co_2Y$-type을 출발물질로 하여 고상반응법(ball milling)과 수열합성법(hydrothermal)으로 $Co_2Z$-type을 제조하였다. 제조된 시편의 결정구조와 미세구조 자기적 성질은 XRD, FESEM, VSM, impedance analyzer를 이용하여 조사하였다. M-type과 $Co_2Y$-type은 단일상의 결정구조를 얻을 수 있었다. 여러 합성법 중에 M+Y ball milling, M+Y hydrothermal에서 제조한 시편이 $Co_2Z$-type hexaferrite의 단일상과 대체로 일치하는 것을 알 수 있었으며, $Co_2Z$-type의 모든 시편들은 이론적인 포화 자화값(50 emu/g)과 비슷한 값을 나타내었다. 소결한 시편들의 투자율은 시약을 precusor로 하여 제조한 $Co_2Z$-type의 투자율이 가장 높았으며, 열처리 온도가 증가함에 따라 투자율은 낮아졌다. 다른 합성법에서는 열처리 온도에 따른 변화가 거의 나타나지 않는 것을 확인할 수 있었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.322-325
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• 2005

The shrinking critical dimensions of modern technology place a heavy requirement on optimizing feature shapes at the micro- and nano scale. In addition, the use of ion beams in the nano-scale world is greatly increased by technology development. Especially, Focused ion Beam (FIB) has a great potential to fabricate the device in nano-scale. Nevertheless, FIB has several limitations, surface swelling in low ion dose regime, precipitation of incident ions, and the re-deposition effect due to the sputtered atoms. In recent years, many approaches and research results show that the re-deposition effect is the most outstanding effect to overcome or reduce in fabrication of micro and nano devices. A 2D string based simulation software AMADEUS-2D $(\underline{A}dvanced\;\underline{M}odeling\;and\;\underline{D}esign\;\underline{E}nvironment\;for\;\underline{S}putter\;Processes)$ for ion milling and FIB direct fabrication has been developed. It is capable of simulating ion beam sputtering and re-deposition. In this paper, the 2D FIB simulation is demonstrated and the characteristics of ion beam induced direct fabrication is analyzed according to various parameters. Several examples, single pixel, multi scan box region, and re-deposited sidewall formation, are given.

• 한국기계가공학회지
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• 제20권4호
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• pp.87-93
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• 2021

The mold industry is competitive, and mold should be processed under optimal conditions for efficient processing. However, the cutting conditions of the ball-end mill, which are a major factor in mold processing, are mostly set empirically, and considerable research is required for increasing the tool life and processing accuracy. In this study, a tool dynamometer and an eddy current sensor were used along with NI-DAQ, a data acquisition device, to obtain characteristic values of the cutting force and tool deformation during the ball end-mill machining of inclined surfaces at a machining center. The cutting force and tool deformation were measured in an experiment. It was found that the tool received the greatest cutting force at the end of the machining process, and the deformation of the tool increased rapidly. Furthermore, the cutting force tended to increase with the angle and number of rotations. The deformation increased rapidly during the machining of a 45° inclined surface.

• Design & Manufacturing
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• 제11권3호
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• pp.19-24
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• 2017

In these days, increase requirement of TEM (Transmission Electro Microscope) in not only scientific field but also industrial field. Because TEM can measure inner-structure of specimen a variety of materials like metal, bio. etc. When use TEM, specimen should be thin about 50nm. So making for thin specimen, use Ion milling device that include specimen holder. The holder generally made of Aluminium Aluminium holder is worn away easily. For this reason, using time of ion milling with aluminum holder is too short. To solve the problem, we replace aluminium holer to molybdenum alloy holder. In this paper, we design molybdenum alloy holer for CAM and modify CAD modeling for effective machining process. So we array a specimen 3 by 4 and setup orientation for one-shot machining process. Next we make a CAM program for machining. we making a decision two machining strategy that chose condition of tool-path method, step-down, step-over. etc. And then conduct machining using CNC milling machining center. To make clear difference between case.1 and case.2, we fixed machining conditions like feed-rate, main spindle rpm, etc. After machining, we confirm the condition of workpiece and analysis the problems case by case. Finally, case.2 work piece that superior than case.1 cutting with WEDM because that method can not ant mechanical effect on workpiece.

• 마이크로전자및패키징학회지
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• 제24권1호
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• pp.1-8
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• 2017

Fe-9.8Si-6.0Al mother alloy was manufactured using by Fe-3.5Si recycled scrap and Si powder. And then, soft magnetic alloy powder of $D_{50}$ size and sphere type were prepared by gas atomization process. To obtain the soft magnetic powder of a high aspect ratio, in the first, we conducted the ball milling process for 8 hours. And heat treatment was performed under $650^{\circ}C$, 2 hours and $N_2$ atmosphere condition for reducing the residual stress of the powder. Based on these process, we made around $50{\mu}m$ diameter Fe-9.8Si-6.0Al powder, which morphology and shape was a similar to the commercial Fe-Si-Al powder. Finally, the soft magnetic sheets were prepared by tape casting process using by those powders. The permeability of the tape casting sheet was measured, and we confirmed the possibility of reusing to the soft magnetic materials of Fe-Si electric sheet scrap.