• Journal of Electrical Engineering and Technology
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• 제12권5호
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• pp.2007-2013
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• 2017

In order to give hydrophobic surface properties on carbon steel, the fluorinated amorphous carbon films were prepared by using linear 2.45GHz microwave PECVD device. Two different process approaches have been tested. One is direct deposition of a-C:H:F films using admixture of $Ar/CH_4/CF_4$ working gases and the other is surface treatment using $CF_4$ plasma after deposition of a-C:H film with $Ar/CH_4$ binary gas system. $Ar/CF_4$ plasma treated surface with high $CF_4$ gas ratio shows best hydrophobicity and durability of hydrophobicity. Nanometer scale surface roughness seems one of the most important factors for hydrophobicity within our experimental conditions. The properties of a-C:H:F films and $CF_4$ plasma treated a-C:H films were investigated in terms of surface roughness, hardness, microstructure, chemical bonding, atomic bonding structure between carbon and fluorine, adhesion and water contact angle by using atomic force microscopy (AFM), nano-indentation, Raman analysis and X-ray photoelectron spectroscopy (XPS).

• 한국수소및신에너지학회논문집
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• 제23권1호
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• pp.93-99
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• 2012

The investigation of clean and environment-friendly coal utilization technology is actively progressed due to high oil price and serious climate change caused by greenhouse gas emissions. In this study, the plasma gasification was performed using a 6kW microwave plasma unit under various reaction conditions: the particle sizes of coal ($45{\mu}m-150{\mu}m$), $O_2$/fuel ratio (0 - 1.3), and steam/fuel ratio (0 - 1.5). The $H_2$ composition decreases with decreasing coal particle size. With increasing $O_2$/fuel ratio, the $H_2$ composition in the syngas decreased while the $CO_2$ composition increased. As the steam/fuel ratio increased from 0 to 1.5, the $H_2$ composition in the syngas increased while the $CO_2$ composition decreased. From the results, it was proven that the variation of syngas composition greatly affected by $O_2$/fuel ratio than steam/fuel ratio. The $H_2$ composition in the syngas, carbon conversion, and cold gas efficiency increased with increasing plasma power.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2008년 영문 학술대회
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• pp.546-549
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• 2008

Institute of Space and Astronautical Science of Japan Aerospace Exploration Agency(ISAS/JAXA) successfully developed and operated the microwave discharge ion engines onboard Hayabusa asteroid explorer. The ${\mu}10$ ion engines feature the cathode-less plasma generation in both the ion generators and neutralizers with the results of long life and high reliability in space. Based on the space achievements of ${\mu}10$ ion engines with 8mN thrust, 3,000sec Isp and 350W consumption power, several programs are currently under developments: ${\mu}20$, ${\mu}10$HIsp and ${\mu}1$. The first is a 20-cm diameter microwave discharge ion engine, aiming to achieve 30mN/kW in the thrustto-power ratio for the asteroid sample return mission larger than Hayabusa. The second is a high Isp version of ${\mu}10$, and exhausts the plasma beam over 10,000sec Isp using 15kV acceleration voltage for deep space missions to such as Jupiter and Mercury. The third is ${\mu}1$ to be adapted to small satellites for drag-free.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.284-284
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• 2010

Currently, hydrogen has been produced by Steam Reforming or partial oxidation reforming processes mainly from oil, coal, and natural gas and results in the production of $CO_2$. However, these are influenced greatly on the green house effect of the earth. so it is important to find the new way to produce hydrogen utilizing water without producing any environmentally harmful by-products. In our research, we use microwave water plasma and photocatalyst to improve dissociation rate of water. At low pressure plasma, electron have high energy but density is low, so temperature of reactor is low. This may cause of recombination in the generated hydrogen and oxygen from splitting water. If it want to high dissociation rate of water, it is necessary to control of recombination of the hydrogen and oxygen using photocatalyst. We utilize the photocatalytic material($TiO_2$, ZnO) coated plasma reactor to use UV in the plasma. The quantity of hydrogen generated was measured by a Residual Gas Analyzer.

• 한국진공학회지
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• 제11권1호
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• pp.68-75
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• 2002

본 연구에서는 운전압력을 1 mTorr~760 Torr까지 변화시키며 발생되는 마이크로파 공기 플라즈마의 특성을 관찰하였다. 마이크로파 공기 플라즈마 발생을 위하여 마이크로파의 전송선로인 도파관은 $TE_{01}$ mode로 설계 및 제작하였으며, 가정용 전자렌지에 사용되는 마그네트론을 이용하여 AC-type microwave source를 제작하였다. 입력 전력은 370 W로 일정하게 유지하였으며, 이때 발생하는 플라즈마의 특성 관찰은 고속주사 정전탐침과 OES (Optical Emission Spectroscopy)를 이용하였다. 최소 절연파괴 전기장의 세기(breakdown E-field)를 가지는 압력인 500 mTorr를 기준으로 발생 플라즈마의 특성은 많은 변화를 보였으며 이 압력은 입력주파수($\omega$)와 충돌주파수($V_c$)가 일치하는 조건이었다. 이때 공기의 유효충돌 단면적은 $9.23\times10^{-l6}\textrm{cm}^2$으로 계산되었다. 운전압력 500 mTorr 이하의 영역에서 절연파괴 전기장의 세기는 약 $5.7\times10^4$V/m-Torr의 값을 갖으며 압력에 반비례하여 감소하였고, 500 mTorr에서 전기장은 12.5 kV/m로 최저 값을 갖고, 500 mTorr 이상의 영역에서는 약 43 V/m-Torr로 압력에 비례하여 증가하였다. OES 측정결과 마이크로파 공기 플라즈마에서 발생되는 주요 이온의 성분은 산소, 아르곤, 질소였으며, 특히 500 mTorr 이하의 영역에서는 산소와 아르곤 이온의 발생이 지배적이었다. 공기내의 산소(O(II))의 이온온도는 압력이 증가함에 따라 약 1.2 eV에서 0.5 eV로 감소하는 경향을 보였다. 정전 탐침 측정 결과는 500 mTorr 이하의 영역에서 플라즈마 밀도가 증가하는 경향을 보였으며 500 mTorr 이상의 영역에서 플라즈마 밀도는 비교적 낮았다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.544-545
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• 2013

Recently, low-temperature atmospheric-pressure plasmas have been investigated [1,2] for biomedical applications and surface treatments. Experiments for improving hydrophilicity of stainless steel (SUS 304) plate with atmospheric microwave argon and H2O2 mixture plasma jet [3] were carried out and experimental measurements and plasma simulations were conducted for investigating the characteristics of plasma for the process. After 30 s of low power (under 10 W) and low temperature (under $50^{\circ}C$) plasma treatment, the water contact angle decreased rapidly to around $10^{\circ}$ from $75^{\circ}$ and was maintained under $30^{\circ}$ for a day (24 hours). The surface free energy, calculated from the contact angles, increased. The chemical properties of the surface were examined by X-ray Photoelectron Spectroscopy (XPS) and the surface morphology and roughness were examined by Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) respectively. The characteristics of plasma sources with several frequencies were investigated by Optical Emission Spectroscopy (OES) measurement and one-dimensional Particle-in-Cell (PIC) simulation and zero-dimensional global simulation [4]. The relation between plasma components and the efficacy of the surface modification were discussed.

• 한국표면공학회지
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• 제46권1호
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• pp.29-35
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• 2013

The effect of DC bias on the growth of nanocrystalline diamond films on silicon substrate by microwave plasma chemical vapor deposition has been studied varying the substrate temperature (400, 500, 600, and $700^{\circ}C$), deposition time (0.5, 1, and 2h), and bias voltage (-50, -100, -150, and -200 V) at the microwave power of 1.2 kW, working pressure of 110 torr, and gas ratio of Ar/1%$CH_4$. In the case of low negative bias voltages (-50 and -100 V), the diamond particles were observed to grow to thin film slower than the case without bias. Applying the moderate DC bias is believed to induce the bombardment of energetic carbon and argon ions on the substrate to result in etching the surfaces of growing diamond particles or film. In the case of higher negative voltages (-150 and -200 V), the growth rate of diamond film increased with the increasing DC bias. Applying the higher DC bias increased the number of nucleation sites, and, subsequently, enhanced the film growth rate. Under the -150 V bias, the height (h) of diamond films exhibited an $h=k{\sqrt{t}}$ relationship with deposition time (t), where the growth rate constant (k) showed an Arrhenius relationship with the activation energy of 7.19 kcal/mol. The rate determining step is believed to be the surface diffusion of activated carbon species, but the more subtle theoretical treatment is required for the more precise interpretation.

• 한국전자파학회논문지
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• 제25권8호
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• pp.857-863
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• 2014

전자기파와 플라즈마의 상호 작용을 결정하는 주요 변수는 플라즈마 주파수와 충돌 주파수이며, 이 둘은 각각 전자 밀도와 전자 온도로부터 계산할 수 있다. 이 두 값은 플라즈마 발생기 종류에 따라 결정되는 시간 의존적인 변수이다. 기존의 전파 흡수 특성 연구에서는 수치 해석적 모형의 부재로 인하여 플라즈마의 시간적/공간적 변화를 간략화하거나, 상수로 가정하여 수행하였다. 본 연구에서는 플라즈마 유체 모델을 도입하여 얻어진 시간 의존적 변수 값을 전자기파감쇠량 계산에 이용함으로써 해석의 정확도를 높이는 방식을 제안하였다. 해석 대상인 유전체 장벽 방전 플라즈마는 구조적인 단순함으로 인하여 1차원 분석만으로 플라즈마 분포의 시간적 변화를 반영할 수 있다. 본 논문은 한 주기 내에서 전자 밀도와 전자 온도를 추출하여 마이크로파 입사 시 시간적 흡수 특성 변화를 분석하였다. 또한, 전자 밀도와 전자 온도의 변화에 따라 감쇠량을 계산하여 감쇠 경향성을 분석하였다.

• 식물병연구
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• 제27권1호
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• pp.8-16
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• 2021

본 연구에서는 마이크로웨이브 플라즈마(microwave plasma)를 이용하여 종자에 감염된 Acidovorax citrulli 11-251의 살균효과를 확인하였다. 감압처리를 통하여 수박 종자에 A. citrulli 11-251를 인공접종하여 이병 종자를 제작하였으며, Aac ImmunoStrip및 scanning electron microscope 확인 결과, 종피 및 종자 내부에 1×107/30분 처리한 조건에서 감염되었음을 확인하였다. 플라즈마 처리는 50 W (3분, 5분, 10분), 80 W (3분, 5분, 10분), 100 W (3분, 5분, 10분) 조건으로 실험 결과, 인공감염종자를 플라즈마 처리 시 대조구와 비교해보면 종피의 경우 80W/10분, 99.56%의 살균 효과를 보였고, 종자 내부는 80 W, 100W/10분, 100%의 높은 살균 효과를 보였다. 인공접종 종자를 사용하여 플라즈마 살균장치의 종자살균 효과를 확인하였다. 하지만 발아율은 무처리구보다 플라즈마 처리 시 급격히 떨어지는 것을 확인하였다. 주사전자현미경 관찰 결과, 플라즈마 처리가 A. citrulli 11-251의 세포막을 파괴하는 것을 확인하였다. 또한, A. citrulli가 접종된 수박 종자를 이용하여 플라즈마 처리 시 살균 및 발아율을 높일 수 있는 최적 조건에 대한 추가 실험이 수행될 예정이다.

• 한국안전학회지
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• 제29권4호
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• pp.23-27
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• 2014

The use of electromagnetic energy and non-equilibrium plasma for enhancing ignition and combustion stability is receiving increased attention recently. The conventional technologies have adapted the electrical devices to make the electromagnetic field, which resulted in various safety issues such as high-maintenance, additional high-cost system, electric shock and explosion. Therefore, an electrodeless microwave technology has an advantage for economic and reliability compared with conventional one because of no oxidation. However, the application of microwave has been still limited because of lack of interaction mechanism between flame and microwave. In this study, an experiment was performed with jet diffusion flames induced by microwaves to clarify the effect of microwave on the combustion stability and pollutant emissions. The results show that microwave induced flames enhanced the flame stability and blowout limit because of abundance of radical pool. However, NOx emission was increased monotonically with microwave intensity except 0.2 kW, and soot emission was reduced at the post flame region.