Etching Characteristics of Fine Ta Patterns with Electron Cyclotron Resonance Chlorine Plasma
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- 한국마이크로전자및패키징학회:학술대회논문집
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- 한국마이크로전자및패키징학회 2000년도 Proceedings of 5th International Joint Symposium on Microeletronics and Packaging
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- pp.97-102
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- 2000