• Journal of Electrical Engineering and Technology
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• v.12 no.5
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• pp.2007-2013
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• 2017

In order to give hydrophobic surface properties on carbon steel, the fluorinated amorphous carbon films were prepared by using linear 2.45GHz microwave PECVD device. Two different process approaches have been tested. One is direct deposition of a-C:H:F films using admixture of $Ar/CH_4/CF_4$ working gases and the other is surface treatment using $CF_4$ plasma after deposition of a-C:H film with $Ar/CH_4$ binary gas system. $Ar/CF_4$ plasma treated surface with high $CF_4$ gas ratio shows best hydrophobicity and durability of hydrophobicity. Nanometer scale surface roughness seems one of the most important factors for hydrophobicity within our experimental conditions. The properties of a-C:H:F films and $CF_4$ plasma treated a-C:H films were investigated in terms of surface roughness, hardness, microstructure, chemical bonding, atomic bonding structure between carbon and fluorine, adhesion and water contact angle by using atomic force microscopy (AFM), nano-indentation, Raman analysis and X-ray photoelectron spectroscopy (XPS).

• Transactions of the Korean hydrogen and new energy society
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• v.23 no.1
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• pp.93-99
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• 2012

The investigation of clean and environment-friendly coal utilization technology is actively progressed due to high oil price and serious climate change caused by greenhouse gas emissions. In this study, the plasma gasification was performed using a 6kW microwave plasma unit under various reaction conditions: the particle sizes of coal ($45{\mu}m-150{\mu}m$), $O_2$/fuel ratio (0 - 1.3), and steam/fuel ratio (0 - 1.5). The $H_2$ composition decreases with decreasing coal particle size. With increasing $O_2$/fuel ratio, the $H_2$ composition in the syngas decreased while the $CO_2$ composition increased. As the steam/fuel ratio increased from 0 to 1.5, the $H_2$ composition in the syngas increased while the $CO_2$ composition decreased. From the results, it was proven that the variation of syngas composition greatly affected by $O_2$/fuel ratio than steam/fuel ratio. The $H_2$ composition in the syngas, carbon conversion, and cold gas efficiency increased with increasing plasma power.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.03a
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• pp.546-549
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• 2008

Institute of Space and Astronautical Science of Japan Aerospace Exploration Agency(ISAS/JAXA) successfully developed and operated the microwave discharge ion engines onboard Hayabusa asteroid explorer. The ${\mu}10$ ion engines feature the cathode-less plasma generation in both the ion generators and neutralizers with the results of long life and high reliability in space. Based on the space achievements of ${\mu}10$ ion engines with 8mN thrust, 3,000sec Isp and 350W consumption power, several programs are currently under developments: ${\mu}20$, ${\mu}10$HIsp and ${\mu}1$. The first is a 20-cm diameter microwave discharge ion engine, aiming to achieve 30mN/kW in the thrustto-power ratio for the asteroid sample return mission larger than Hayabusa. The second is a high Isp version of ${\mu}10$, and exhausts the plasma beam over 10,000sec Isp using 15kV acceleration voltage for deep space missions to such as Jupiter and Mercury. The third is ${\mu}1$ to be adapted to small satellites for drag-free.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.284-284
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• 2010

Currently, hydrogen has been produced by Steam Reforming or partial oxidation reforming processes mainly from oil, coal, and natural gas and results in the production of $CO_2$. However, these are influenced greatly on the green house effect of the earth. so it is important to find the new way to produce hydrogen utilizing water without producing any environmentally harmful by-products. In our research, we use microwave water plasma and photocatalyst to improve dissociation rate of water. At low pressure plasma, electron have high energy but density is low, so temperature of reactor is low. This may cause of recombination in the generated hydrogen and oxygen from splitting water. If it want to high dissociation rate of water, it is necessary to control of recombination of the hydrogen and oxygen using photocatalyst. We utilize the photocatalytic material($TiO_2$, ZnO) coated plasma reactor to use UV in the plasma. The quantity of hydrogen generated was measured by a Residual Gas Analyzer.

• Journal of the Korean Vacuum Society
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• v.11 no.1
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• pp.68-75
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• 2002

It is observed the characteristic of the microwave air plasma in the wide range of the operating pressure, 1 mTorr ~ 760 Torr. The microwave air plasma was generated by an AC-type microwave source manufactured with a magnetron taken from a commertial microwave oven and the input power was fixed at 370 W. Characteristics of the plasmas were observed by an injection Langmuir probe and an OES(Optical Emission Spectroscopy). The breakdown electric field is drastically changed at 500 mTorr. For < 500 mTorr, the ratio of the breakdown electric field and the pressure decreased inversely to the pressure, $5.7\times10^4$V/m-Torr.However, the ratio increased linearly as 43 V/m-Torr for the operating pressure, > 500 mTorr. The minimum breakdown electric field was observed about 12. kV/m at 500 mTorr. It corresponds that the input frequency equals to the collision frequency. The effective collision cross section of the air at this pressure was calculated as $9.23\times10^{-l6}\textrm{cm}^2$.The results of the OES measurement revealed that the main ions were composed of the oxygen, argon, and nitrogen for > 500 mTorr. In contrast, only oxygen and argon ions were dominated for < 500 mTorr. ion temperature of oxygen (O(II)) in the air was decreased from about 1.2 eV to 0.5 eV as the pressure increased. Langmuir probe data shows that the plasma density for < 500 mTorr was higher that for > 500 mTorr.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.544-545
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• 2013

Recently, low-temperature atmospheric-pressure plasmas have been investigated [1,2] for biomedical applications and surface treatments. Experiments for improving hydrophilicity of stainless steel (SUS 304) plate with atmospheric microwave argon and H2O2 mixture plasma jet [3] were carried out and experimental measurements and plasma simulations were conducted for investigating the characteristics of plasma for the process. After 30 s of low power (under 10 W) and low temperature (under $50^{\circ}C$) plasma treatment, the water contact angle decreased rapidly to around $10^{\circ}$ from $75^{\circ}$ and was maintained under $30^{\circ}$ for a day (24 hours). The surface free energy, calculated from the contact angles, increased. The chemical properties of the surface were examined by X-ray Photoelectron Spectroscopy (XPS) and the surface morphology and roughness were examined by Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) respectively. The characteristics of plasma sources with several frequencies were investigated by Optical Emission Spectroscopy (OES) measurement and one-dimensional Particle-in-Cell (PIC) simulation and zero-dimensional global simulation [4]. The relation between plasma components and the efficacy of the surface modification were discussed.

• Journal of the Korean institute of surface engineering
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• v.46 no.1
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• pp.29-35
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• 2013

The effect of DC bias on the growth of nanocrystalline diamond films on silicon substrate by microwave plasma chemical vapor deposition has been studied varying the substrate temperature (400, 500, 600, and $700^{\circ}C$), deposition time (0.5, 1, and 2h), and bias voltage (-50, -100, -150, and -200 V) at the microwave power of 1.2 kW, working pressure of 110 torr, and gas ratio of Ar/1%$CH_4$. In the case of low negative bias voltages (-50 and -100 V), the diamond particles were observed to grow to thin film slower than the case without bias. Applying the moderate DC bias is believed to induce the bombardment of energetic carbon and argon ions on the substrate to result in etching the surfaces of growing diamond particles or film. In the case of higher negative voltages (-150 and -200 V), the growth rate of diamond film increased with the increasing DC bias. Applying the higher DC bias increased the number of nucleation sites, and, subsequently, enhanced the film growth rate. Under the -150 V bias, the height (h) of diamond films exhibited an $h=k{\sqrt{t}}$ relationship with deposition time (t), where the growth rate constant (k) showed an Arrhenius relationship with the activation energy of 7.19 kcal/mol. The rate determining step is believed to be the surface diffusion of activated carbon species, but the more subtle theoretical treatment is required for the more precise interpretation.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.25 no.8
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• pp.857-863
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• 2014

In determining interaction between plasma and electromagnetic wave, plasma frequency and collision frequency are two key parameters. They are derived from electron density and temperature, which vary in an extremely wide range, depending on a plasma generator. Because the parameters are usually unknown, traditional researches have utilized simplified electron density model and constant electron temperature approximation. Introduction of plasma fluid model to electromagnetics is suggested to utilize relatively precise time dependent variables for given generator. Dielectric barrier discharge(DBD) generator is selected due to its simple geometry which allows us to use one dimensional analysis. Time dependent property is analyzed when microwave is launched toward parallel plate DBD plasma. Afterwards, attenuation tendency with the change of electron density and temperature is demonstrated.

• Research in Plant Disease
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• v.27 no.1
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• pp.8-16
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• 2021

This study was conducted to check the sterilization efficacy of microwave plasma (MWP) against the watermelon seeds infected with Acidovorax citrulli 11-251. Watermelon seeds were artificially vacuum inoculated to produce A. citrulli 11-251 infected seeds. Aac ImmunoStrip and scanning electron microscope (SEM) results suggests that, seeds (coat and endosperm) were infected under the concentration of 1×107/30 min. MWP sterlization process was carried out at 50 W (3 min, 5 min, and 10 min), 80 W (3 min, 5 min, and 10 min), and 100 W (3 min, 5 min, and 10 min). According to the results, MWP sterilized the artificially inoculated seed coats by 95.96% at 80 W/10 min and seed endosperms by 100% at 100 W/10 min respectively. Although, seeds were sterlized by MWP, germination rate of seeds were low as compared to non treated (negative control) seeds. Moreover, cell membrane of A. citrulli 11-251 was damaged while observed in SEM after sterilized with MWP. Further studies regarding the appropriate sterilization condition by MWP against A. citrulli infected seeds for germination will be conducted in our next study.

• Journal of the Korean Society of Safety
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• v.29 no.4
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• pp.23-27
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• 2014

The use of electromagnetic energy and non-equilibrium plasma for enhancing ignition and combustion stability is receiving increased attention recently. The conventional technologies have adapted the electrical devices to make the electromagnetic field, which resulted in various safety issues such as high-maintenance, additional high-cost system, electric shock and explosion. Therefore, an electrodeless microwave technology has an advantage for economic and reliability compared with conventional one because of no oxidation. However, the application of microwave has been still limited because of lack of interaction mechanism between flame and microwave. In this study, an experiment was performed with jet diffusion flames induced by microwaves to clarify the effect of microwave on the combustion stability and pollutant emissions. The results show that microwave induced flames enhanced the flame stability and blowout limit because of abundance of radical pool. However, NOx emission was increased monotonically with microwave intensity except 0.2 kW, and soot emission was reduced at the post flame region.