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Fabrication and Drive Test of a Peristaltic Thermopnumatic PDMS Micropump  

Jeong Ok Chan (Center for Promotion of the COE program, Ritsumeikan University)
Park Sin Wook (Division of Electrical and Computer Engineering, Ajou University)
Yang Sang Sik (Division of Electrical and Computer Engineering, Ajou University)
Publication Information
Journal of Mechanical Science and Technology / v.19, no.2, 2005 , pp. 649-654 More about this Journal
Abstract
This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the thermopneumatic force. The micropump consists of the three peristaltic-type actuator chambers with microheaters on the glass substrate and a microchannel connecting the chambers and the inlet/outlet port. The micropump is fabricated by the spin-coating process, the two-step curing process, the JSR (negative PR) molding process, and etc. The diameter and the thickness of the actuator diaphragm are 2.5 mm and $30{\mu}m$, respectively. The meniscus motion in the capillary tube is observed with a video camera and the flow rate of the micro pump is calculated through the frame analysis of the recorded video data. The maximum flow rate of the micropump is about $0.36\;{\mu}L/sec$ at 2 Hz for the zero hydraulic pressure difference when the 3-phase input voltage is 20 V.
Keywords
PDMS (Polydimethylsiloxane) Micropump; Peristaltic Micropump; Thermopneumatic Force; Flow Rate;
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