• Title/Summary/Keyword: Micropattern

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Fabrication of Micropattern by Microcontact Printing (미세접촉인쇄기법을 이용한 미세패턴 제작)

  • 조정대;이응숙;최대근;양승만
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.1224-1226
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    • 2003
  • In this work, we developed a high resolution printing technique based on transferring a pattern from a PDMS stamp to a Pd and Au substrate by microcontact printing Also, we fabricated various 2D metallic and polymeric nano patterns with the feature resolution of sub-micrometer scale by using the method of microcontact printing (${\mu}$CP) based on soft lithography. Silicon masters for the micro molding were made by e-beam lithography. Composite poly(dimethylsiloxane) (PDMS) molds were composed of a thin, hard layer supported by soft PDMS layer. From this work, it is certificated that composite PDMS mold and undercutting technique play an important role in the generation of a clear SAM nanopattern on Pd and Au substrate.

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Development of Ultra-Precision Machining Technology for V-Shape Micropatterns with 32" Large Surface Area (32" 대면적 V-형상 미세 패턴을 위한 초정밀 가공기술 개발)

  • Lee, Sung-Gun;Kim, Hyun-Chul
    • Journal of the Korean Society for Precision Engineering
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    • v.28 no.3
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    • pp.315-322
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    • 2011
  • High-accuracy micropatterns such as V-shaped microgrooves are increasingly in demand for various engineering areas. And the technical trend goes for large surface areas in precision machining technology. So micropatterns with large surface areas are expected to play an increasingly important role in today's manufacturing technology In this study, we focused on developing machining technologies. First, a machine vision system for precise tool setting is developed. Second, an on-machine measurement (OMM) system for large-area measurement is implemented. And also software for tool path generation and simulation is developed. With these technologies we fabricated large-surface micropatterns in an electroless nickel-plated workpiece with single-crystal diamond tools and a 32-in, $675mm{\times}450mm$ mold with tens of V-and pyramid-shaped micropatterns.

Fluorescence Micropatterning Based on the Polymeric Photobase Generator Containing Oxime-Urethane Groups by Dansylation

  • Choi, Won San;Kim, Hak Soo;Chae, Kyu Ho
    • Rapid Communication in Photoscience
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    • v.2 no.1
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    • pp.24-27
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    • 2013
  • A polymeric photobase generator containing oxime-urethane groups is applied to a fluorescence micropatterning material. Polymer bearing oxime-urethane groups was prepared by copolymerization of methyl methacrylate with methacryloyloxyethyl benzophenoneoxime urethane (MBU). The reaction of amino groups in the irradiated copolymer film with dansyl chloride (Dns-Cl) was monitored by using UV absorption, IR absorption and fluorescence spectroscopy. The fluorescence spectrum of the Dns-Cl-treated irradiated copolymer film shows a strong fluorescence with a fluorescence maximum wavelength at 510 nm. A blue fluorescent micropattern with a line width of $2{\sim}3{\mu}m$ was obtained. Treatment of the irradiated copolymer film with Dns-Cl and rhodamine B mixture led to the formation of green, red, and orange-colored fluorescence micropatterns. Thus, various colored micropatterns on a single polymer film can be obtained by selective excitation of each dye molecules.

Fabrication of Functional Nanomaterials by Peptide Self-Assembly

  • Park, Chan-Beom
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.05a
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    • pp.8.1-8.1
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    • 2009
  • The self-assembly of peptide-based building blocks into nanostructures is an attractive route for fabricating novel materials because of their capacity for molecular recognition and functional flexibility as well as the mild conditions required in the fabrication process. Among various peptide-based building blocks forming nanostructures, the simplest building blocks are aromatic dipeptides like diphenylalanine, which can readily self-assemble into nanotubes in aqueous solutions at ambient conditions. Recently, we have developed a high-temperature solid-phase self-assembly process for diphenylalanine. Through this novel process, we succeeded in the growth of vertically well-aligned, uniform nanowires from amorphous peptide thin film. To demonstrate the versatility of our approach, we also fabricated a micropattern of peptide nanowires by combining our solid-phase growth method and simple soft lithographic techniques. We believe that our studies on peptide self-assembly will provide a new horizon for peptide-based nanofabrication.

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Micropatterning of Peptides to Solid Surface by Deep-UV Lithography using N-hydroxysuccinimidyl phenol azide (N-hydroxysuccinimidyl phenyl azide와 광반응을 이용한 펩타이드의 마이크로형태 고정화)

  • 김진희;김현정;김종원;장준근;민병구;최태부
    • Journal of Biomedical Engineering Research
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    • v.19 no.5
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    • pp.441-448
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    • 1998
  • Defined spatial localization of biomolecules on the polymer surface Is potentially powerful method to generate biocompatible surface. Photolithography and photochemistry can be used to immobilize peptides only al a given region of the surface. In this study, peptide RGDS, one of the endothelial cells recognition sites of fibronectin, was covalently immobilized on the polystyrene coated surface with micropattern. It was performed by photochemical reactivity of a synthesized N-hydroxysuccinimidyl phenyl azide. The micropatterning was confirmed by staining with fluorescent dye, aminoacetamido fluorescein. Endothelial cell adhesion was observed only on the RGDS immobilized areas.

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Micro-pattern Fabrication of Amorphous Alloy by Laser Beam Machining (비정질 합금의 마이크로 패턴 레이저 가공)

  • Kim, Haan;Park, Jong Wuk
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.21 no.4
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    • pp.77-83
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    • 2022
  • Amorphous alloys exhibit excellent mechanical properties; therefore, application technology development is being attempted in various fields. However, industrial use of application technology is limited owing to the limitations in fabrication. In this study, micropattern fabrication of an amorphous alloy was conducted using laser beam machining. Although microhole fabrication is possible without the deformation of the amorphous phase through nanosecond pulsed laser beam machining, there are limitations in the generation of recast layers and spatters. In cover plate laser beam machining (c-LBM), a cover plate is used to reduce the thermal deformation and processing area. Therefore, it is possible to fabricate holes at the level of several micrometers. In this study, it was confirmed that recast layers are hardly generated in c-LBM. Furthermore, square-shaped micropatterns were successfully fabricated using c-LBM.

Spin-coated ultrathin multilayers and their micropatterning using microfluidic channels

  • Hongseok Jang;Kim, Sangcheol;Jinhan Cho;Kookheon Char
    • Korea-Australia Rheology Journal
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    • v.15 no.1
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    • pp.1-7
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    • 2003
  • A new method is introduced to build up organic/organic multilayer films composed of cationic poly(allylamine hydrochloride) (PAH) and negatively charged poly (sodium 4-styrenesulfonate) (PSS) using the spinning process. The adsorption process is governed by both the viscous force induced by fast solvent elimination and the electrostatic interaction between oppositely charged species. On the other hand, the centrifugal and air shear forces applied by the spinning process significantly enhances desorption of weakly bound polyelectrolyte chains and also induce the planarization of the adsorbed polyelectrolyte layer. The film thickness per bilayer adsorbed by the conventional dipping process and the spinning process was found to be about 4 ${\AA}$ and 24 ${\AA}$, respectively. The surface of the multilayer films prepared with the spinning process is quite homogeneous and smooth. Also, a new approach to create multilayer ultrathin films with well-defined micropatterns in a short process time is Introduced. To achieve such micropatterns with high line resolution in organic multilayer films, microfluidic channels were combined with the convective self-assembly process employing both hydrogen bonding and electrostatic intermolecular interactions. The channels were initially filled with polymer solution by capillary pressure and the residual solution was then removed by the .spinning process.

A One-Component Negative Photoresist Based on an Epoxy Terpolymer Containing Oxime-Urethane Groups as a Photobase Generator

  • Chae, Kyu-Ho;Park, Jin-Hee
    • Macromolecular Research
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    • v.12 no.4
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    • pp.352-358
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    • 2004
  • For their application as one-component photoresists, we prepared epoxy terpolymers containing oxime-urethane and benzophenone groups by the radical polymerization of glycidyl methacrylate (GMA), metha-cryloxyethyl benzophenoneoxime urethane (MBU), and N-(4-benzoyl)phenylmaleimide (BPMI). The terpolymer composition was optimized to provide the most photosensitive photoresist. The photo-decomposition reaction of the oxime-urethane groups in the terpolymer was monitored by UV absorption spectroscopy, and the photo-crosslinking reaction of the epoxy terpolymer was observed by measuring the normalized thickness. The photosensitivity of the epoxy terpolymer increased as the amount of BPMI and MBU units increased up to 16 and 24 mol%, respectively. Among the terpolymers we prepared, terpolymer T-II(contents of GMA, MBU, BPMI are 75, 19, 6.1 mole%, respectively) exhibited the highest photosensitivity ( $D_{c}$ $^{0.5}$ = 430 mJ/$\textrm{cm}^2$) and had a moderate contrast (${\gamma}$$^{p}$ = 1.23). Negative-tone micropatterns having a line width of ca. 10 ${\mu}{\textrm}{m}$ were obtained by developing the system with chloroform.m.

Thermally Stable Photoreactive Polymers as a Color Filter Resist Bearing Acrylate and Cinnamate Double Bonds

  • Cho, Seung-Hyun;Lim, Hyun-Soon;Jeon, Byung-Kuk;Ko, Jung-Min;Lee, Jun-Young;Ki, Whan-Gun
    • Macromolecular Research
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    • v.16 no.1
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    • pp.31-35
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    • 2008
  • Photoreactive polymers as a color filter resist containing both photoreactive acrylate and cinnamate double bonds were synthesized usin two step reactions. The chemical structures of the synthesized polymers were confirmed by $^1H$-NMR and FT-IR spectroscopy. The photoreactive polymers were quite soluble in most common organic solvents and produced excellent quality thin films by spin-coating. The photocuring kinetics of the acrylate and cinnamate double bonds were examined by FT-IR and UV- Vis spectroscopy, which confirmed the excellent photoreactivity of both the acrylate and cinnamate double bonds in the polymers. Upon UV irradiation, photocuring was almost completed within approximately 5 min, irrespective of the type of the prepolymers. The polymers also exhibited superior thermal stability, showing little change in transmittance in the visible region even after heating to $250^{\circ}C$ for one hour. Photolithographic micropatterns could be obtained with a resolution of a few microns.

Constructing a Three-Dimensional Endothelial Cell Layer in a Circular PDMS Microchannel

  • Choi, Jong Seob;Piao, Yunxian;Kim, Kyung Hoon;Seo, Tae Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.274.2-274.2
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    • 2013
  • We described a simple and efficient fabrication method for generating microfluidic channels with a circular-cross sectional geometry by exploiting the reflow phenomenon of a thick positive photoresist. Initial rectangular shaped positive photoresist micropatterns on a silicon wafer, which were fabricated by a conventional photolithography process, were converted into a half-circular shape by tuning the temperature to around $105^{\circ}C$. Through optimization of the reflow conditions, we could obtain a perfect circular micropattern of the positive photoresist, and control the diameter in a range from 100 to 400 ${\mu}m$. The resultant convex half-circular photoresist was used as a template for fabricating a concave polydimethylsiloxane (PDMS) through a replica molding process, and a circular PDMS microchannel was produced by bonding two half-circular PDMS layers. A variety of channel dimensions and patterns can be easily prepared, including straight, S-curve, X-, Y-, and T-shapes to mimic an in vivo vascular network. To inform an endothelial cell layer, we cultured primary human umbilical vein endothelial cells (HUVECs) inside circular PDMS microchannels, and demonstrated successful cell adhesion, proliferation, and alignment along the channel.

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