• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.2
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• pp.829-834
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• 2011

Exposure process is the most important technology to fabricate highly integrated circuit. Up to now, mask type lithography process has been generally used. However, it is not efficient for small quantity and/or frequently changing products. Therefore, maskless lithography technology is raised in exposure process. In this study, relations between multi-beam energy and overlay were analyzed. Exposure experiment of generating pattern was performed. It was from presented scan line by multi- beam simulation. As a result, optimal scan line distance was proposed by simulation, and micro pattern accuracy could be improved by exposure experiment using laser direct imaging system.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.9
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• pp.6227-6235
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• 2015

The HUD has recently been downsized due to the development of micro display and LED technology as a see through information display device, gradually expands the application areas. In this paper, using a DLP micro display device designed a compact head-up display(HUD) optical system for biocular observation of the image exhibition area 5 inches. It was analyzed for each design element of the optical system in order to design a compacted HUD. DLP, projection optical system and concave image combiner were discussed the design approach and the characteristics. Through a connection structure analysis of each optical system, detailed design specifications were set up and designed the optical system in detail. Put a folded configuration in the form of a white diffuse reflector between the projection lens and concave image combiner was designed to be independent, respectively. Distance of the projected image is adjustable up to approximately 2m ~ infinity and observation distance is 1m. Resolution could be recognized by 1 ~ 2pixels in HD($1,280{\times}720pixels$) class, various characters and symbols could be read. In addition, color navigation map, daytime video camera and thermal imaging cameras can be displayed.