• 정보저장시스템학회논문집
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• 제2권1호
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• pp.1-6
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• 2006

An optical ROM card system which using an optical probe array generated by Talbot effect was proposed as new robust storage solution. To improve the optical density and to decrease the power consumption of the system, it is very important to make the spot sizes of optical probes smaller as well as to increase the optical efficiency from the light source to optical probes. In this study, a microlens illuminated aperture array for generating high efficiency optical probe away with small beam spot was designed and fabricated using monolithic lithography integration method. The maximum intensity of optical probes of microlens illuminated aperture array increased about 12 times of that of aperture array, and the full width half maximum of the optical probe at Talbot plane generated by microlens illuminated aperture array was $0.77{\mu}m$.

• 소성∙가공
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• 제15권1호
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• pp.21-26
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• 2006

A optical head unit for nano optical probe array was developed. The optical probe array is generated by Talbot effect. The shape and thickness of microlens array(MLA) were designed to minimize the spot size at the foci of MLA. To increase the optical efficiency of the system and obtain the large tolerance for fabrication, aperture size was theoretically optimized. Then microlens illuminated aperture array(MLIAA) as an optical head unit was fabricated using a ultra violet(UV) molding process on aluminum aperture array. In this process, Al aperture array was fabricated separately using the photolithography and reactive ion etching(RIE) process. Optical properties of the generated optical probes were measured and compared at Talbot distance from the aperture array having a diameter of $1{\mu}m$ and MLIAA.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 금형가공,미세가공,플라스틱가공 공동 심포지엄
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• pp.29-34
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• 2005

A optical head unit for nano optical probe away was developed. The optical probe array is generated by Talbot effect. The shape and thickness of microlens array(MLA) were designed to minimize the spot size at the foci of MLA. To increase the optical efficiency of the system and obtain the large tolerance for fabrication, aperture size was theoretically optimized. Then microlens illuminated aperture array(MLIAA) as an optical head unit was fabricated using a ultra violet(UV) molding process on aluminum aperture array. In this process, Al aperture array was fabricated separately using the photolithography and reactive ion etching(RIE) process. Optical properties of the generated optical probes were measured and compared at Talbot distance from the aperture array having a diameter of $1{\mu}m$ and MLIAA.