• Bulletin of the Korean Chemical Society
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• v.18 no.7
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• pp.771-772
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• 1997

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.9
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• pp.48-53
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• 1998

We have fabricated electrostatic lens with novel structure by mixing surface- and bulk-micromachining technology. Polysilicon was used for both the structure and sacrificial layer, and the structure layer was passivated with thermal oxide in order not to be attacked during the silicon wet etching. Compared with conventional electrostatic lens used in microcolumn, this device has the advantages in ; 1) hole alignment, throughput, reliability, damage of lens, 2) the possibility of arrayed lithography through the integration of microcolumn.

• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.456-460
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• 1999

Experimental studies of laser micromachining on Mo diaphragm using piezo Q-switched Nd:YAZ laser have been performed. Application of miniaturized micorcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope (SEM) application have recently extensively examined. The conventional microcolumn fabrication technique would give a limitation on the minimization of aberration, In this paper, we obtained 20~30 $\mu \textrm m$aperture of laser micromachining on Mo diaphragm using piezo Q-swithed Nd:YAG laser. The geometrical figures, such as the diameter and the preciseness of the drilled aperture are dependent upon the total energy of the laser pulse train, laser pulse width, and the diameter of laser spot in addition to the materials-dependent parameters.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.10
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• pp.981-985
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• 2007

We present a MEMS-based portable Direct Methanol Fuel Cell (micro-DFMC), featured by a platinum sputtered microcolumn electrode and a built-in fuel chamber containing a limited amount of methanol fuel. Also presented is a micro-DMFC stack structure having a common electrolyte sandwiched by the microcolumn electrodes. The single cells with ME16 and PE16 electrodes show the maximum power densities of $31.04{\pm}0.29{\mu}W/cm^2$ and $9.75{\pm}0.29{\mu}W/cm^2$, respectively; thus indicating the microcolumn electrode (ME16) generates the power density (3.2 times) higher than the planar electrode (PE16). The single cell tests of ME16 and ME4 electrodes (Fig.8) show the maximum power of $31.04{\pm}0.29{\mu}W/cm^2$, and $25.23{\pm}2.7{\mu}W/cm^2$, respectively; thus demonstrating the increased window frame reduces the normalized standard power deviation (standard deviation over the average power). The normalized deviation of 0.11 in ME4 cell has been reduced to 0.01 in ME16 cell due to the increased window frames. The maximum power density of 4-cell stack is 15.7 times higher than that of the single cell. 4-cell stack produces the power capacity of 20.3mWh/g during 980min operation at the voltage of 450mV with the load resistance of $800{\Omega}$.

• Bulletin of the Korean Chemical Society
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• v.29 no.11
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• pp.2281-2283
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• 2008

• Journal of the Korean Chemical Society
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• v.39 no.6
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• pp.471-476
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• 1995

• Journal of the Korean Chemical Society
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• v.40 no.6
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• pp.462-465
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• 1996

• Journal of the Korea Academia-Industrial cooperation Society
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• v.9 no.6
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• pp.1607-1613
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• 2008

We investigated the miniaturized free electron laser(FEL) module based on microcolumn. The miniaturized FEL is composed of two parts: electron generation part and radiation emission part. The radiation emission part, called wiggler, consists of a grid plate. While the electrons are passing through the wiggler, electron trajectory shows sinusoidal curve caused by the periodically applied voltage on the grid, and then it give rise to radiation emission. We analyzed the wiggler parameters, grid width, depth, period, applied voltage and the pair wiggler space using 2-D simulation tool.

• Proceedings of the KIEE Conference
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• 1996.11a
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• pp.413-415
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• 1996

This paper presents a technique for fabricating an electro-optical microlens for microcolumn e-beam system. The device, named Self-Aligned Microlens (SAM) was realized by mixing surface and bulk micromachining technology. The microbridges were formed on both sides of silicon wafer symmetrically. The alignment error between the electrodes could be controlled within a few micrometers with also reducing the numbers of anodic bonding.

• Journal of Korean Neurosurgical Society
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• v.62 no.3
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• pp.288-295
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• 2019

In 2011, the International League against Epilepsy (ILAE) proposed a first international consensus of the classification of focal cortical dysplasia (FCD). This FCD classification had been widely used in worldwide. In this review paper, the authors would like to give helpful comments for better understanding of the current FCD classification. Especially, the basic concepts of FCD type I, such as "radial", "tangential" and "microcolumn" will be discussed with figures. In addition, the limitations, genetic progress and prospect of FCD will be suggested.