• Title/Summary/Keyword: Micro-tensile test

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Improvement of Sensitivity to In-plane Strain/Deformation Measurement by Micro-ESPI Technique (마이크로 ESPI 기법에 의한 면내 변형 측정 민감도 향상)

  • Kim D.I.;Huh Y.H.;Kee C.D.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1442-1445
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    • 2005
  • Several test methods, including micro strain/deformation measurement techniques, have been studied to more reliably measure the micro properties in micro/nano materials. Therefore, in this study, the continuous measurement of in-plane tensile strain in micro-sized specimens of thin film materials was introduced using the micro-ESPI technique. TiN and Au thin films 1 and $0.47\;\mu{m}$ thick, respectively, were deposited on the silicon wafer and fabricated into the micro-sized tensile specimens using the electromachining process. The micro-tensile loading system and micro-ESPI system were developed to measure the tensile strain during micro-tensile test. The micro-tensile stress-strain for these materials was determined using the algorithm for continuous strain measurement. Furthermore, algorithm for enhancing the sensitivity to measurement of in-plane tensile strain was suggested. According to the algorithm for enhancement of sensitivity, micro-tensile strain data between interfringe were calculated. It is shown that the algorithm for enhancement of the sensitivity suggested in this study makes the sensitivity to the in-plane tensile strain increase.

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Micro Scale Mechanical property of Polymeric materials for FPD(Flat Panel display) (FPD에 사용되는 고분자 재료의 기계적 물성특성 연구)

  • Lee N.K.;Lee H.J.;Lee H.W.;Chong E.G.;Choi D.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.220-224
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    • 2005
  • The technology trend of Flat Panel Display (FPD) equipments have been demanded that there are compact and multi-function. Therefore, nano/micro scale patterned on polymeric materials of Back Light Unit (BLU) in Liquid Crystal Display (LCD) that has been investigated. This paper describes a series of Horizontal Type Micro Tensile Tester that were carried out to investigate the load strain distance performance of typical polymeric material sheets. The polymeric materials film that micro size shaped specimens for tensile test are used by Cold-Isostatic-Press (CIP). Test equipment is Horizontal type Micro Tensile Tester that is presented to measure the micro scale mechanical property of thin film for FPD. This paper presents which easy testing tools measure for micro patterned on polyethylene (PET) specimens.

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Micro-tensile Test for Micron-sized SCS Thin Film (단결정 실리콘 박막의 미소인장 물성 평가)

  • Lee, Sang-Joo;Han, Seung-Woo;Kim, Jae-Hyun;Lee, Hak-Joo
    • Proceedings of the KSME Conference
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    • 2008.11a
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    • pp.45-48
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    • 2008
  • The mechanical behavior of small-sized materials has been investigated for many industrial applications, including MEMS and semiconductors. It is challenging to obtain accurate mechanical properties measurements for thin films due to several technical difficulties, including measurement of strain, specimen alignment, and fabrication. In this work, we used the micro-tensile testing unit with the real-time DIC (Digital Image Correlation) strain measurement system. This system has advantages of real time strain monitoring up to 50 nm resolution during the micro-tensile test, and ability to measure the young's modulus and Poisson's ratio at the same time. The mechanical properties of SCS (Single Crystal Silicon) are measured by uniaxial tension test from freestanding SCS which are $2.5{\mu}m$ thick, $200-500{\mu}m$ wide specimens on the (100) plane. Young's modulus, Poisson's ratio and tensile strength in the <110> direction are measured by micro-tensile testing system.

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Fabrication of Single Crystal Silicon Micro-Tensile Test Specimens and Thin Film Aluminum Markers for Measuring Tensile Strain Using MEMS Processes (MEMS 공정을 이용한 단결정 실리콘 미세 인장시편과 미세 변형 측정용 알루미늄 Marker의 제조)

  • 박준식;전창성;박광범;윤대원;이형욱;이낙규;이상목;나경환;최현석
    • Transactions of Materials Processing
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    • v.13 no.3
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    • pp.285-289
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    • 2004
  • Micro tensile test specimens of thin film single crystal silicon for the most useful structural materials in MEMS (Micro Electro Mechanical System) devices were fabricated using SOI (Silicon-on-Insulator) wafers and MEMS processes. Dimensions of micro tensile test specimens were thickness of $7\mu\textrm{m}$, width of 50~$350\mu\textrm{m}$, and length of 2mm. Top and bottom silicon were etched using by deep RIE (Reactive Ion Etching). Thin film aluminum markers on testing region of specimens with width of $5\mu\textrm{m}$, lengths of 30~$180\mu\textrm{m}$ and thickness of 200 nm for measuring tensile strain were fabricated by aluminum wet etching method. Fabricated side wall angles of aluminum marker were about $45^{\circ}~50^{\circ}$. He-Ne laser with wavelength of 633nm was used for checking fringed patterns.

Evaluation of Micro-Tensile Properties for Nano-coating Material TiN (나노 코팅재 TiN 의 마이크로 인장 특성 평가)

  • Huh, Yong-Hak;Kim, Dong-Iel;Hahn, Jun-Hee;Kim, Gwang-Seok;Yeon, Soon-Chang;Kim, Yong-Hyub
    • Proceedings of the KSME Conference
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    • 2004.04a
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    • pp.240-245
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    • 2004
  • Tensile properties of hard coating material, TiN, were evaluated using micro-tensile testing system. TiN has been known as a hard coating material commonly used today. Micro-tensile testing system consisted of a micro tensile loading system and a micro-ESPI(Electronic Speckle Pattern Interferometry) system. Micro-tensile loading system had a maximum load capacity of 500mN and a resolution of 4.5 nm in stroke. TiN thin film $1{\mu}m$ thick was deposited on the Si wafer pre-deposited of $Si_3N_4$ film substrate by the closed field unbalanced magnetron sputtering (CFUBMS) process. Three kinds of micro-tensile specimen with the respective width of $50{\mu}m$, $100{\mu}m$ and $500{\mu}m$ were fabricated by MEMS process. The mechanical properties including tensile strength and elastic modulus were determined using the micro-tensile testing system and compared by those obtained by nano-indentation

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Development of Micro Tensile Tester for High Functional Materials (고기능 소재용 마이크로 인장시험기 개발)

  • 최현석;한창수;최태훈;이낙규;임성주;박훈재;김승수;나경환
    • Transactions of Materials Processing
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    • v.11 no.7
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    • pp.561-568
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    • 2002
  • Micro tensile test is the most direct and convenient method to measure material properties such as Young's modulus and fracture strength. It, however, needs more accurate measurement system, mote stable and repetitive alignment and more sensitive gripping than conventional tensile test. Many researchers have put their effort on overcoming these difficulties for tile development of micro tensile tester, fabricating micro specimens of functional materials and measuring their properties. This paper will review the related vigorous researches over the world in the recent decade and explain how to apply them to a design of the fester which is under our own development.

High-Temperature Fracture Strength of a CVD-SiC Coating Layer for TRISO Nuclear Fuel Particles by a Micro-Tensile Test

  • Lee, Hyun Min;Park, Kwi-Il;Park, Ji-Yeon;Kim, Weon-Ju;Kim, Do Kyung
    • Journal of the Korean Ceramic Society
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    • v.52 no.6
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    • pp.441-448
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    • 2015
  • Silicon carbide (SiC) coatings for tri-isotropic (TRISO) nuclear fuel particles were fabricated using a chemical vapor deposition (CVD) process onto graphite. A micro-tensile-testing system was developed for the mechanical characterization of SiC coatings at high temperatures. The fracture strength of the SiC coatings was characterized by the developed micro-tensile test in the range of $25^{\circ}C$ to $1000^{\circ}C$. Two types of CVD-SiC films were prepared for the micro-tensile test. SiC-A exhibited a large grain size (0.4 ~ 0.6 m) and the [111] preferred orientation, while SiC-B had a small grain size (0.2 ~ 0.3 mm) and the [220] preferred orientation. Free silicon (Si) was co-deposited onto SiC-B, and stacking faults also existed in the SiC-B structure. The fracture strengths of the CVD-SiC coatings, as measured by the high-temperature micro-tensile test, decreased with the testing temperature. The high-temperature fracture strengths of CVD-SiC coatings were related to the microstructure and defects of the CVD-SiC coatings.

Effect of Martensite Fraction on the Tensile Properties of Dual-phase Steels Containing Micro-alloying Elements (미량합금 원소가 첨가된 2상 조직강의 인장 특성에 미치는 마르텐사이트 분율의 영향)

  • Lim, Hyeon-Seok;Kim, Ji-Yeon;Hwang, Byoungchul
    • Journal of the Korean Society for Heat Treatment
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    • v.30 no.3
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    • pp.106-112
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    • 2017
  • In this study dual-phase steels with different ferrite grain size and martensite fraction were fabricated by varying micro-alloying elements and intercritical anneling temperatures, and then the tensile properties were investigated in terms of yield and tensile strengths, elongation, and yield ratio. The addition of micro-alloying elements reduced ferrite grain size, and the increased intercritial transformation tempeature increased the martensite fracton. The tensile test results showed that yield and tensile strengths of all the steel specimens increased with increasing the martensite fraction. However, the elongation and yield ratio were differently changed according to variations in the morphology and carbon content of martensite, ferrite grain size, and precipitates resulting from the addition of micro-alloying elements and intercritical annealing.

Temperature Effect on Tensile Strength of Filled Natural Rubber Vulcanizates (가황 천연고무의 인장강도에 미치는 온도의 영향)

  • Ko, Young-Chon;Park, Byung-Ho
    • Elastomers and Composites
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    • v.36 no.4
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    • pp.255-261
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    • 2001
  • This study was related with the effect of elevated temperature on the tensile strength of edge-cut samples. There was a different tensile strength behavior of uncut samples and pre-cut samples under different test temperatures. Tensile strength of uncut sample decreases with increasing test temperature. When pro-cut size(C) is larger than critical cut size($C_{cr}$), tensile strength or pre-cut specimen at $80^{\circ}C$ is higher than that of pre-cut specimen at room temperature (RT). Test specimens under $80^{\circ}C$ condition exhibited more secondary cracks at the crack tip region compared to room temperature conditions. However, secondary cracks of pre-cut specimens are not clearly developed at $110^{\circ}C$. Differences in tensile strength induced by different test temperature seem to be responsible for the strain-induced crystallization and micro-cracking patterns.

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