• 한국정밀공학회지
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• 제25권1호
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• pp.122-129
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• 2008

Two-photon stereolithography is recognized as a promising process for the fabrication of three-dimensional (3D) microstructures with 100 nm resolution. Generally, beam-scanning system has been used in the conventional process of two-photon stereolithography, which is limited to the fabrication of micro-prototypes in small area of several tens micrometers. For the applications to 3D high-functional micro-devices, the fabrication area of the process is required to be enlarged. In this paper, large-area two-photon stereolithography (L-TPS) employing stage scanning system has been developed. Continuous scanning method is suggested to improve the fabrication speed and parameter study is conducted. An objective lens of high numerical aperture (N.A.) and high strength material were employed in this system. Through this work, 3D microstructures of $600*600*100\;{\mu}m$ were fabricated.

• 한국정밀공학회지
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• 제23권3호
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• pp.156-162
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• 2006

Direct fabrication of nano patterns has been studied employing a nano-stereolithography (NSL) process. The needs of nano patterning techniques have been intensively increased for diverse applications for nano/micro-devices; micro-fluidic channels, micro-molds. and other novel micro-objects. For fabrication of high-aspect-ratio (HAR) patterns, a thick spin coating of SU-8 process is generally used in the conventional photolithography, however, additional processes such as pre- and post-baking processes and expansive precise photomasks are inevitably required. In this work, direct fabrication of HAR patterns with a high spatial resolution is tried employing two-photon polymerization in the NSL process. The precision and aspect ratio of patterns can be controlled using process parameters of laser power, exposure time, and numerical aperture of objective lens. It is also feasible to control the aspect ratio of patterns by truncation amounts of patterns, and a layer-by-layer piling up technique is attempted to achieve HAR patterns. Through the fabrication of several patterns using the NSL process, the possibility of effective patterning technique fer various N/MEMS applications has been demonstrated.

• 대한기계학회논문집A
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• 제29권6호
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• pp.904-912
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• 2005

The flow in a microchannel is usually characterized as a low Reynolds number (Re) so that good mixing is quite difficult to be achieved. In this regard, we developed a novel chaotic micromixer, named Barrier Embedded Kenics Micromixer (BEKM). In the BEKM, the higher level of chaotic mixing can be achieved by combining two general chaotic mixing mechanisms: (i) splitting/reorientation by helical elements inside the microchannel and (ii) stretching/folding via periodically located barriers on the channel wall. The fully three-dimensional geometry of BEKM was realized by a micro-stereolithography technology, in this study, along with a Kenics micromixer and a circular T-pipe. Mixing performances of three micromixers were experimentally characterized in terms of an average mixing color intensity of phenolphthalein. Experimental results show that BEKM has better mixing performance than other two micromixers. Chaotic mixing mechanism, proposed in this study, could be integrated as a mixing component with Micro-Total-Analysis-System, Lab-on-a-chip and so on.

• Tribology and Lubricants
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• 제37권1호
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• pp.1-6
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• 2021

This paper presents the experimental results of hydrophobic surfaces developed using a stereolithography-based additive-manufacturing technique. The additive manufacturing technique can be used to manufacture objects with complex geometries from computer-aided design data. Several additive manufacturing methods, such as selective laser sintering, fused deposition modeling, stereolithography apparatus (SLA), and inkjet-based system, have been developed. The SLA is a form of three-dimensional printing technology used to create prototypes, patterns, and production parts in successive layers through photochemical processes. Light causes chemical monomers and oligomers to cross-link together to form objects composed of polymers. Moreover, this method is economical for fabricating surfaces with high output resolution and quality. Here, we fabricate various surfaces using different shapes using an SLA. The surfaces with micro-patterns are fabricated for 10 cases, including the biomimetic surface. The fabricated surfaces with various micro-patterns are evaluated for hydrophobicity performance based on the static contact angle. The contact angle is measured three times for each case, and the averaged value is used. The results indicate that the arrangements in a staggered structure have a larger contact angle than those in a line when the same micro-pattern is applied. Moreover, the mimetic surfaces exhibit more hydrophobic characteristics than those of artificial micro-patterns.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.367-368
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• 2012

• 한국정밀공학회지
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• 제33권4호
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• pp.265-270
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• 2016

Recently, many studies have been conducted on the nano-scale fabrication technology using twophoton- absorbed polymerization induced by a femtosecond laser. The nano-stereolithography process has many advantages as a technique for direct fabrication of true three-dimensional shapes in the range over several microns with sub-100 nm resolution, which might be difficult to obtain by using general nano/microscale fabrication technologies. Therefore, two-photon induced nano-stereolithography has been recently recognized as a promising candidate technology to fabricate arbitrary 3D structures with sub-100 nm resolution. Many research works for fabricating novel 3D nano/micro devices using the two-photon nano-stereolithography process, which can be utilized in the NT/BT/IT fields, are rapidly advancing.

• 센서학회지
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• 제10권4호
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• pp.232-238
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• 2001

본 논문에서는 Stereolithography 기술을 이용하여 마이크로 펌프를 제작했다. 펌프는 구동에 PZT를 사용하고, diffuser/nozzle 개념의 non-movable 밸브를 사용하여 제작했다. 펌프의 크기는 챔버$14mm{\psi}$, diffuser/nozzle의 크기는 좁은 쪽의 구멍은 $0.5mm{\psi}$, 넓은 쪽의 구멍은 $1mm{\psi}$로 제작하고, 챔버의 깊이는 1.2mm이다. 펌프는 주파수 100Hz, 인가 전압 $90{\sim}250Vp-p$ 사이에서 구동시켜, 그 동작을 확인했다. 측정 결과, 펌핑 용액이 에탄올 일 때, 인가 전압 200V, 100Hz로 구동했을 때, 53mm의 수두차를 나타냈다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.878-881
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• 2005

A Stereolithography technology is based on stacking of sliced layer from STL file that is converted from 3-dimensional CAD data. A microstereolithography technology is evolved from conventional stereolithography to fabricate microstructures. In this technology, we have to consider influence of resin flow to make refresh surface. To generate new resin surface, stage has to be moved downward deeply and upward to desired position. At this time, resin flow affects to refresh surface of resin. And resin viscosity is the key factor in simulation of resin flow. By setting optimal refresh time for resin surface, total fabrication time is reduced and there is no damage to fabricated layers. In this research, we simulate resin flow using CFD software and derive optimal stage moving time and dwelling time.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.583-584
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 추계학술대회 논문집
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• pp.215-216
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• 2009