• 한국재료학회지
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• 제20권7호
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• pp.374-378
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• 2010

$MgTiO_3$ thin films were prepared by r.f. magnetron sputtering in order to prepare miniaturized NPO type MLCCs. $MgTiO_3$ films showed a polycrystalline structure of ilmenite characterized by the appearance of (110) and (202) peaks. The intensity of the peaks decreased with an increase in the chamber pressure due to the decrease of crystallinity which resulted from the decrease of kinetic energy of the sputtered atoms. The films annealed at $600^{\circ}C$ for 60min. showed a fine grained microstructure without micro-cracks. The grain size and roughness of the $MgTiO_3$ films decreased with the increase of chamber pressure. The average surface roughness was 1.425~0.313 nm for $MgTiO_3$ films prepared at 10~70 mTorr. $MgTiO_3$ films showed a dielectric constant of 17~19.7 and a dissipation factor of 2.1~4.9% at 1MHz. The dielectric constant of the films is similar to that of bulk ceramics. The dielectric constant and the dissipation factor decreased with the increase of the chamber pressure due to the decrease of grain size and crystallinity. The leakage current density was $10^{-5}\sim10^{-7}A/cm^2$ at 200kV/cm and this value decreased with the increase of the chamber pressure. The small grain size and smooth surface microstructure of the films deposited at high chamber pressure resulted in a low leakage current density. $MgTiO_3$ films showed a near zero temperature coefficient and satisfied the specifications for NPO type materials. The dielectric properties of the $MgTiO_3$ thin films prepared by sputtering suggest the feasibility of their application for MLCCs.

• 한국항공우주학회지
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• 제41권2호
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• pp.150-155
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• 2013

본 논문에서는 기존의 복잡한 구조를 가지는 비폭발식 분리장치를 단순화시켜 니크롬 와이어와 케블라 로프를 이용한 새로운 개념의 비폭발식 분리 메커니즘을 설계/제작하고 기초성능 평가(사전하중, 분리시간, 충격 실험 등)를 위한 실험을 수행하였다. 그 결과 니크롬 와이어의 회전횟수에 따라 다양한 사전하중 하에서 작동이 가능한 것을 확인하였고, 최대 6.0kN의 사전하중 하에서 110G의 충격을 발생시키며 680ms의 짧은 시간에 분리되는 것을 확인하여 제안된 분리장치의 유용성을 확인하였다. 추후 발사환경 및 우주환경 시험을 통하여 제안된 분리장치의 우주인증을 수행하고 다양한 사전하중에서 작동 신뢰도를 확보하여 태양 전지 패널의 전개뿐만이 아니라 페어링 분리 등 다양한 용도에 사용이 가능하도록 개발하고자 한다.

• 한국표면공학회지
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• 제38권6호
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• pp.207-211
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• 2005

In this work a multi-layered nanostructured TiAIN/CrN superlattice coatings was synthesized using closed-field unbalanced magnetron sputtering method and the relationships between their superlattice period (1), micro-structure, hardness and elastic modulus were investigated. In addition, wear test at $500^{\circ}C$ and oxidation resistance test at $900^{\circ}C$ were performed to investigate high temperature properties of these thin films. The coatings were characterized in terms of microstructure and mechanical properties by transmission electron microscopy (TEM) and nano-indentation test. Results from TEM analysis showed that superlattice periods was inversely proportional to the jig rotation speed. The maximum hardness and elastic modulus of 37 GPa and 375 GPa were observed at superalttice period of 6.1 nm and 4.4 nm, respectively. An higher value of microhardness from TiAIN/CrN thin films than either TiAIN (30 GPa) or CrN (26 GPa) was noted while the elastic modulus was approximately an average of TiAIN and CrN films. These enhancement effects in superlattice films could be attributed to the resistance to dislocation glide across interface between the CrN and TiAIN layers. Much improved plastic deformation resistance ($H^3/E^2$) of 0.36 from TiAIN/CrN coatings was observed, compared with 0.15 and 0.16 from TiAIN and CrN, respectively. Also the wear resistance at $500^{\circ}C$ was largely increased than those of single TiAIN and CrN coatings and TiAIN/CrN coatings showed much reduced weight gain after exposure at $900^{\circ}C$ for 20 hours.

• 한국재료학회지
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• 제16권4호
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• pp.218-224
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• 2006

RF sputtering process was applied to produce thin hydroxyapatite(HAp) films on Ti-6Al-4V alloy substrates. The effects of different heat treatment conditions on the hardness between HAp thin films and Ti-6Al-4V alloy substrates were studied. Before deposition, the Ti-6Al-4V alloy substrates were heat treated for 1h at $850^{\circ}C\;under\;3.0{\times}10^{-3}torr$, and after deposition, the HAp thin films were heat treated for 1h at $400^{\circ}C,\;600^{\circ}C\;and\;800^{\circ}C$ under the atmosphere, and analyzed FESEM-EDX, FTIR, XRD, nano-indentor, micro-vickers hardness, respectively. Experimental results represented that the surface defects of thin films decreased by relaxation of internal stress and control of substrate structure followed by heat treatment of substrates before the deposition, and the HAp thin films on the heat-treated substrates had higher hardness than none heattreated substrates before the deposition, and the hardness properties of HAp thin films and Ti-6Al-4V alloy substrates appeared independent behavior, and the hardness of HAp thin films decreased by formation of $VTiO_3(OH),\;{\theta}-Al_{0.32}V_2O_5,\;Al_{0.33}V_2O_5$.

• Tribology and Lubricants
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• 제39권5호
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• pp.197-202
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• 2023

Recently, research on experimental and analytical techniques utilizing microfluidic devices has been pursued. For example, lab-on-a-chip devices that integrate micro-devices onto a single chip for processing small sample quantities have gained significant attention. However, during sample preparation, unnecessary gases can be introduced into the internal channels, thus, impeding device flow and compromising specific function efficiency, including that of analysis and separation. Several methods have been proposed to mitigate this issue, however, many involve cumbersome procedures or suffer from complexities owing to intricate structures. Recently, some approaches have been introduced that utilize hydrophobic device structures to remove gases within channels. In such cases, the permeability of gases passing through the structure becomes a crucial performance factor. In this study, a method involving the deposition and sintering of diluted Ag-ink onto a silicon wafer surface is presented. This is followed by unstructured nano-pattern creation using a Metal Assisted Chemical Etching (MACE) process, which yields a nanostructured surface with unstructured pillar shapes. Subsequently, gas permeability in the spaces formed by these surface structures is investigated. This is achieved by experiments conducted to incorporate a pressure chamber and measure gas permeability. Trends are subsequently analyzed by comparing the results with existing theories. Finally, it can be confirmed that the significance of this study primarily lies in its capability to effectively evaluate gas permeability through unstructured pillar-like nanostructures, thus, providing quantitative values for the appropriate driving pressure and expected gas removal time in practical device operation.

• 한국전산구조공학회논문집
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• 제20권3호
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• pp.287-292
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• 2007

일반적으로 고전적인 탄성이론에서 매크로 스케일의 구조물의 물성은 구조물의 사이즈에 영향을 받지 않는다. 그 이유는 구조물 전체 체적에 대한 표면의 비율이 매우 작기 때문에 표면의 효과를 무시할 수 있기 때문이다. 그러나, 구조물 전체의 부피에 대한 표면의 비율이 커지게 되면 표면의 효과가 매우 중요한 역할을 하게 되며 지배적으로 나타나게 된다. 특히 나노 박막이나 나노 빔 등 나노 스케일의 구조물에서는 표면효과의 영향을 반드시 고려하여야만 한다. 분자 동역학 시뮬레이션은 이러한 나노 스케일의 구조물 역학적 해석을 위해서 그간 사용되어 온 일반적인 방법이었으나, 과도하게 요구되는 계산시간과 전산자원의 한계로 인해 여전히 수 나노 초 동안에 $10^6{\sim}10^9$개의 원자들에 대한 시뮬레이션이 가능한 정도이다. 따라서 실제적으로 MEMS/NEMS 분야에서 사용되는 서브마이크 스케일에서 마이크로 스케일의 구조물의 분자동역학 시뮬레이션을 통한 해석은 가능하나 설계를 목적으로 했을 때는 현실적이지 못하다. 따라서 본 연구에서는 이러한 분자 동역학 시뮬레이션 기법의 단점을 보완하고자 나노 스케일의 매우 작은 구조물에서 지배적으로 나타나는 표면효과를 고려할 수 있는 연속체 기반의 모델을 제시하고자 한다. 특히 본 논문에서는 박막구조물의 해석을 위하여 고전적인 Kirchhoff 평판이론을 바탕으로 표면효과를 고려할 수 있도록 하는 연속체 모델을 제안하고 이를 바탕으로 유한요소해석을 수행하여 그 해석 결과를 분자 동역학 시뮬레이션 결과와 비교하였다.

• 한국세라믹학회지
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• 제52권6호
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• pp.410-416
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• 2015

Recently, a new $Y_2O_3$ coating deposited using the EB-PVD method has been developed for erosion resistant applications in fluorocarbon plasma environments. In this study, surface crack formation in the $Y_2O_3$ coating has been analyzed in terms of residual stress and elastic modulus. The coating, deposited on silicon substrate at temperatures higher than $600^{\circ}C$, showed itself to be sound, without surface cracks. When the residual stress of the coating was measured using the Stoney formula, it was found to be considerably lower than the value calculated using the elastic modulus and thermal expansion coefficient of bulk $Y_2O_3$. In addition, amorphous $SiO_2$ and crystalline $Al_2O_3$ coatings were similarly prepared and their residual stresses were compared to the calculated values. From nano-indentation measurement, the elastic modulus of the $Y_2O_3$ coating in the direction parallel to the coating surface was found to be lower than that in the normal direction. The lower modulus in the parallel direction was confirmed independently using the load-deflection curves of a micro-cantilever made of $Y_2O_3$ coating and from the average residual stress-temperature curve of the coated sample. The elastic modulus in these experiments was around 33 ~ 35 GPa, which is much lower than that of a sintered bulk sample. Thus, this low elastic modulus, which may come from the columnar feather-like structure of the coating, contributed to decreasing the average residual tensile stress. Finally, in terms of toughness and thermal cycling stability, the implications of the lowered elastic modulus are discussed.

• 한국응용과학기술학회지
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• 제35권4호
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• pp.1057-1072
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• 2018

세리아 입자의 합성을 위하여 분무열분해 시 유기 첨가제인 EG(ethylene glycol)과 CA(citric acid)를 첨가하여 중공성 및 다공성을 갖는 $CeO_2$ 마이크로 크기의 입자를 제조하였으며 첨가량에 따른 특성을 비교하였다. 분무열분해과정, 후소성 및 볼밀링 과정을 적절히 조합하여 만든 6가지 경로에 의해 나노 크기의 세리아 입자를 합성하였다. 6가지 경로 중 EG 및 CA가 0.05M 첨가된 Ce(III)가 전구체 수용액을 이용하여 분무열분해${\rightarrow}$후소성${\rightarrow}$볼밀링${\rightarrow}$후소성의 경로에 의해 얻어진 $CeO_2$ 입자에 대해 TEM 분석으로 측정한 입자의 평균 크기 24 nm(편차=3.8 nm)는 Debye-Scherrer식에 의해 계산된 1차 입자의 크기(20 nm)와 가장 유사한 크기를 나타내었다. 제조된 나노입자분말의 형태적 및 구조적 특성을 알아보기 위하여 SEM(Scanning Electron Microscopy), XRD(X-Ray Diffractometer) 및 TEM(Transmission Electron Microscopy)을 통하여 특성을 분석하였다.

• 한국정보통신학회:학술대회논문집
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• 한국정보통신학회 2022년도 추계학술대회
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• pp.276-279
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• 2022

4차 산업혁명은 지식의 생산속도가 빠르고 지식산업의 비중이 매우 증가하는 지식사회로의 전환을 의미하며 이와 관련하여 디지털 혁명이 지속되고 있다. 신기술에 의한 산업구조의 재편과 직업·직무의 변화는 교육의 변화를 가져오고 있고 디지털 기술의 발전으로 인해 경계가 없고 개별적이며 역동적인 교육이 새로운 교육의 표준이 되어 가고 있다. 이런 배경에서 정규 과정 학위보다는 신기술에 관한 나노 학위(Nano Degree)나 핵심강좌에 집중된 마이크로 디그리(microdegree)에 대한 관심도 많이 증가하고 있다. 대표적으로 미국의 유다시티(Udacity)는 직업과 연계된 온라인 나노디그리 과정을 개설해 운영하고 있고, 주요 기업들과 협업하여 기업에 필요한 핵심 교육과정을 개발 및 교육함으로 기업의 인재 확보를 효율적으로 지원하고 있다. 이렇게 온라인 직업 및 직무 교육이 활성화되면서 이제 개인 스스로가 직업능력개발에 대한 목표를 세우고 포트폴리오 방식의 지속가능한 학습을 이어갈 수 있는 환경이 갖추어 졌다. 그러나 효과적인 직업 교육을 위해서는 자동화된 개인 맞춤형 교육컨텐츠 설계가 선행되어야 한다. 이를 위해 본 논문에서는 온라인 학습시대에 직업준비를 위한 개인 맞춤형 career and course map 추천 시스템을 제안하고자 한다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.44-45
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• 2010

We are currently conducting studies on culturing and biocompatibility assessment of various cells such as neural stem cells and induced pluripotent stem cells(IPS cells) on carbon nanotube (CNT), on nerve regeneration electrodes, and on silicon wafers with a focus on developing nerve integrated CNT based bio devices for interfacing with living organisms, in order to develop brain-machine interfaces (BMI). In addition, we are carried out the chemical modification of carbon nanotube (mainly SWCNTs)-based bio-nanosensors by the plasma ion irradiation (plasma activation) method, and provide a characteristic evaluation of a bio-nanosensor using bovine serum albumin (BSA)/anti-BSA binding and oligonucleotide hybridization. On the other hand, the researches in the case of "novel plasma" have been widely conducted in the fields of chemistry, solid physics, and nanomaterial science. From the above-mentioned background, we are conducting basic experiments on direct irradiation of body tissues and cells using a micro-spot atmospheric pressure plasma source. The device is a coaxial structure having a tungsten wire installed inside a glass capillary, and a grounded ring electrode wrapped on the outside. The conditions of plasma generation are as follows: applied voltage: 5-9 kV, frequency: 1-3 kHz, helium (He) gas flow: 1-1.5 L/min, and plasma irradiation time: 1-300 sec. The experiment was conducted by preparing a culture medium containing mouse fibroblasts (NIH3T3) on a culture dish. A culture dish irradiated with plasma was introduced into a $CO_2$-incubator. The small animals used in the experiment involving plasma irradiation into living tissue were rat, rabbit, and pick and are deeply anesthetized with the gas anesthesia. According to the dependency of cell numbers against the plasma irradiation time, when only He gas was flowed, the growth of cells was inhibited as the floatation of cells caused by gas agitation inside the culture was promoted. On the other hand, there was no floatation of cells and healthy growth was observed when plasma was irradiated. Furthermore, in an experiment testing the effects of plasma irradiation on rats that were artificially given burn wounds, no evidence of electric shock injuries was found in the irradiated areas. In fact, the observed evidence of healing and improvements of the burn wounds suggested the presence of healing effects due to the growth factors in the tissues. Therefore, it appears that the interaction due to ion/radicalcollisions causes a substantial effect on the proliferation of growth factors such as epidermal growth factor (EGF), nerve growth factor (NGF), and transforming growth factor (TGF) that are present in the cells.