Browse > Article

Studies on the Development of TiAIN/CrN Multi-layered Thin Films by Unbalanced Magnetron Sputtering Process  

Kim, Gwang-Seok (Center for Advanced Plasma Surface Technology Materials Engineering Department, Hankuk Aviation University)
Kim, Bom-Sok (Center for Advanced Plasma Surface Technology Materials Engineering Department, Hankuk Aviation University)
Lee, Sang-Yul (Center for Advanced Plasma Surface Technology Materials Engineering Department, Hankuk Aviation University)
Publication Information
Journal of the Korean institute of surface engineering / v.38, no.6, 2005 , pp. 207-211 More about this Journal
Abstract
In this work a multi-layered nanostructured TiAIN/CrN superlattice coatings was synthesized using closed-field unbalanced magnetron sputtering method and the relationships between their superlattice period (1), micro-structure, hardness and elastic modulus were investigated. In addition, wear test at $500^{\circ}C$ and oxidation resistance test at $900^{\circ}C$ were performed to investigate high temperature properties of these thin films. The coatings were characterized in terms of microstructure and mechanical properties by transmission electron microscopy (TEM) and nano-indentation test. Results from TEM analysis showed that superlattice periods was inversely proportional to the jig rotation speed. The maximum hardness and elastic modulus of 37 GPa and 375 GPa were observed at superalttice period of 6.1 nm and 4.4 nm, respectively. An higher value of microhardness from TiAIN/CrN thin films than either TiAIN (30 GPa) or CrN (26 GPa) was noted while the elastic modulus was approximately an average of TiAIN and CrN films. These enhancement effects in superlattice films could be attributed to the resistance to dislocation glide across interface between the CrN and TiAIN layers. Much improved plastic deformation resistance ($H^3/E^2$) of 0.36 from TiAIN/CrN coatings was observed, compared with 0.15 and 0.16 from TiAIN and CrN, respectively. Also the wear resistance at $500^{\circ}C$ was largely increased than those of single TiAIN and CrN coatings and TiAIN/CrN coatings showed much reduced weight gain after exposure at $900^{\circ}C$ for 20 hours.
Keywords
TiAIN/CrN thin films; Superlattice; Nono-indentotion test; Oxidation; High temperature wear test; Unbalanced mognetron sputterings;
Citations & Related Records
연도 인용수 순위
  • Reference
1 S. Veprek, M. Jilek, Vacuum, 67 (2002) 443-449   DOI   ScienceOn
2 J. Musil, Surf. & Coat. Technol., 125 (2000) 322-330   DOI   ScienceOn
3 J. Musil, P. Karankova, J. Kasl, Surf. & Coat. Technol., 139 (2001) 101   DOI   ScienceOn
4 W. D. Sproul, Surf. & Coat. Technol., 86-87 (1996) 170-176   DOI   ScienceOn
5 P. Holubar, M. Jilek, M. Sima, Surf. & Coat. Technol., 133-134 (2000) 145-151   DOI   ScienceOn
6 A. A. Voevodin, J. P. O'Neill, J. S. Zabinski, Surf. & Coat. Technol., 116-119 (1999) 36   DOI   ScienceOn
7 C. W. Kim, K. H. Kim, Thin Solids Films, 307 (1997) 113   DOI   ScienceOn
8 Philip C. Yashar, William D. Sproul, Vacuum, 55 (1999) 179   DOI   ScienceOn
9 W. D. Munz, J. Vac. Sci Tech A 4(6) (1986) 2717   DOI
10 G. W. Kim, S. Y. Lee, J. H. Hahn, Surf. & Coat. Technol., 193 (2005) 213   DOI   ScienceOn
11 K. L. Johnson, Contact Mechanics, Cambridge University Press, London, UK, 1985 : ISBN 0-521-34796-3
12 S. Veprek, A. Niederhofer, K. Moto, et al., Surf. & Coat. Technol., 133-134 (2000) 152   DOI   ScienceOn