• Journal of the Korean Society for Precision Engineering
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• v.28 no.2
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• pp.245-250
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• 2011

A high-resolution shadow mask, a nanostencil, is widely used for high resolution lithography. This high-resolution shadowmask is often fabricated by a combination of MEMS processes and focused ion beam (FIB) milling. In this study, FIB milling on 500-nm-thin SiN membrane was tested and characterized. 500 nm thick and $2{\times}2$ mm large membranes were made on a silicon wafer by micro-fabrication processes of LPCVD, photolithography, ICP etching and bulk silicon etching. A subsequent FIB milling enabled local membrane thinning and aperture making into the thinned silicon nitride membrane. Due to the high resolution of the FIB milling process, nanoscale apertures down to 60 nm could be made into the membrane. The nanostencil could be used for nanoscale patterning by local deposition through the apertures.

• Advances in Computational Design
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• v.5 no.1
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• pp.13-34
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• 2020

As small size and complex metal machining components demand increases, cutting processes in microscale become necessary. Ball-end milling is a commonly used finishing process, which nowadays can be applied in the microscale size. Surface quality and dimensional accuracy are two basic parameters that affect small size components in their assembly and functionality. Thus, good quality can be achieved by optimizing the cutting conditions of the procedure. This study presents a 3D simulation model of ball-end milling in microscale developed in a commercial CAD software and its optical and computing results. These carried out results are resumed to surface topomorphy, surface roughness, chip geometry and cutting forces calculations that arising during the cutting process. A great number of simulations were performed in a milling machine centre, applying the discretized kinematics of the procedure and the final results were compared with measurements of Al7075-T651 experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.375-376
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.437-438
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.283-284
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• 2007

• Journal of Powder Materials
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• v.10 no.6
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• pp.415-421
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• 2003

The study for producing the flake powders by milling of aluminum foil and gas atomized powders was carried out. The effects of lifter bars on the ball motions and milling of aluminum foils were also investigated. The aluminum foils were laminated each other, elongated, fragmented into small foils and finally formed into the flake powders during the dry ball-milling. The spherical atomized-powders were milled to coarse flake powders with high aspect ratio and then changed to fine flake powders with lower aspect ratio. Even though long times were required for making flake powders by milling of foils, the water covering areas of them were higher than those of powders milled using gas-atomized powders, suggesting aluminum foils were more plastically deformed by micro-forging. On the other hand, as the number of lifter bars increased, the necessary rotation speeds of milling jar for cascading mode and cataracting mode decreased drastically. It was possible to achieve same quality of milled flake powder by using the lifter bars under the lower milling speeds. The painting test showed that the appearance of painted surface was good and optimum content range of aluminum paste in car paint to maximize the degree of gloss was 3-5%.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.10
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• pp.1493-1498
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• 2010

This paper present the characteristics of micro- and meso-scale milling processes in which compressed cold air, minimum quantity lubrication (MQL) and $MoS_2$ nanofluid MQL are used. For process characterization, the microand meso-scale milling experiments are conducted using desktop meso-scale machine tool system and the surface roughness is measured. The experimental results show that the use of compressed chilly air and nanofluid MQL in the micro- and meso-scale milling processes is effective in improving the surface finish.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.904-909
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• 2004

In this paper a web-based micro fabrication system is discussed. A commercial CAD and a web browser were used as its user interfaces. In these user interfaces the concepts of Design for Manufacturing (DFM) was implemented providing the fabrication knowledge of micro machining to the designers. Simple databases were constructed to store the fabrication knowledge of materials, tools, and micro machining know-how. The part geometry was uploaded to the web server of this system as an STL (Stereo Lithography) format with process parameters for 3-axis micro milling. A Slice-based process planner automatically provides NC codes for controlling micro stages. A couple of micro parts were fabricated using the system with micro endmills. This design and manufacturing system enables network users to obtain micro-scale prototypes in a rapid manner.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.170-173
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• 2004

In this paper a web-based micro fabrication system is discussed. A commercial CAD and a web browser were used as its user interfaces. For the user interfaces, the concepts of Design for Manufacturing (DFM) were implemented providing the fabrication knowledge of micro machining to the designers. Simple databases were constructed to store the fabrication knowledge of materials, tools, and micro machining know-how. The part geometry was uploaded to the web server of this system as an STL (Stereo Lithography) format with process parameters for 3-axis micro milling. A Slice-based process planner automatically provides NC codes for controlling micro stages. A couple of micro parts were fabricated using the system with micro endmills. This design and manufacturing system enables network users to obtain micro-scale prototypes in a rapid manner.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.3 s.180
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• pp.56-60
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• 2006

A high-resolution shadow mask, or called a nanostencil was fabricated for high resolution lithography. This high-resolution shadowmask was fabricated by a combination or MEMS processes and focused ion beam (FIB) milling. 500 nm thick and $2{\times}2mm$ large membranes wore made on a silicon wafer by micro-fabrication processes of LPCVD, photolithography, ICP etching and bulk silicon etching. A subsequent FIB milling enabled local membrane thinning and aperture making into the thinned silicon nitride membrane. Due to the high resolution of the FIB milling process, nanoscale apertures down to 70 nm could be made into the membrane. By local deposition through the apertures of nanostencil, nanoscale patterns down to 70 nm could be achieved.