• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.926-931
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• 2002

Although ceramic plates with many micro-hales are used as MCP (Micro-channel plate) for electron amplification, catalytic converters, filters, electrical insulators and thermal conductors in integrated circuits, the drilling of micro-hales in the ceramics is difficult because of their low thermal conductivity, high hardness and brittleness. Therefore, in this work, the machining of ceramic green body fellowed by sintering of green body was employed fur fabricating ceramic plates with many micro-holes. The micro-drilling of alumina green body was performed with diamond abrasive WC drills, and the cutting force w.r.t. drilling times was measured for the determination of toot life. From the investigation of the wear of micro-drill tip w.r.t. drilling times, the wear mechanism of tip during micro-drilling of ceramic green body was suggested.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1202-1205
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• 2005

Micro hole is one of basic elements for micro device or micro parts. By micro ECM, micro holes less than $50\mu{m}$ in diameter can be machined easily. Machining characteristics of micro ECM were investigated according to machining conditions such as electrolyte concentration and pulse conditions. From the investigation, optimal machining conditions were suggested for micro ECM of stainless steel. For the micro machining with high resolution, the change of machining gap should be predicted. By using electrochemical principle equations, the change of machining gap was simulated.

• 한국정밀공학회지
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• 제22권12호
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• pp.163-169
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• 2005

Micro hole is ode of basic elements for micro device or micro parts. Micro electrochemical machining (ECM) can be applied to the machining of micro holes less than 50 ${\mu}m$ in diameter, which it is not easy to apply other techniques to. For the machining of passivating metals such as stainless steel, machining conditions should be chosen carefully to prevent a passive layer. The machining conditions also affect the machining resolution, In this paper, machining characteristics of micro ECM were investigated according to machining conditions such as electrolyte concentration and pulse conditions. From the investigation, optimal machining conditions were suggested for micro ECM of stainless steel.

• 한국기계가공학회지
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• 제12권3호
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• pp.28-35
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• 2013

Micro electrical discharge machining (EDM) as a non-contact machining process is very effective for micromachining with a thin electrode because of its low machining reaction force. The micro-electrode machining device has the advantage of maintaining high precision through the whole processes and uses a feeding wire in the thin electrode tool manufacturing process. This study describes the design and evaluation of a micro-electrode machining device using optical photo-interrupter. The electrode was fabricated by reverse electrical discharge machining. The performance of designed system was evaluated to measure tension force according to feed speed of wire. This system for micro electrode fabrication proves the feasibility in the micro-EDM process of the micro holes and parts for industrial applications.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2001년도 춘계학술대회 논문집
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• pp.213-216
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• 2001

A micro hole punching system was developed and micro holes of 100m in diameter were successfully made on brass sheets of loom in thickness. A micro punch made of tungsten carbide was designed to withstand the punch load, considering the buckling and the bending moment due to possible misalignment error. The punch was fabricated by the grinding process with diamond wheel. The die was designed considering the punch load and fabricated by micro electrodischarge machining process. In this system the stripper is designed to guide punch tip to minimize the possible misalignment. The punch was installed on a vertical stepper and the die was mounted on an X-Y translation unit. The precision motion controller controlled all motions of the micro hole punching system. In this study technical difficulties and solutions in the micro hole punching process were also discussed.

• 한국기계가공학회지
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• 제17권1호
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• pp.82-88
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• 2018

An experimental study was performed on the orifice nozzle system that generates micro-bubbles by air self-suction using a venturi nozzle. This study experimentally investigates the amount of air sucked into the venturi nozzle and the number of micro-bubbles generated by the orifice nozzle system in Cases 1 and 2. The experimental conditions were varied by changing the diameter of the orifice nozzle (d=2~7 mm) and the number of holes of the perforated plate nozzle (n = 2-12). In Case 1, the air self-suction was more than 2 LPM at $d{\leq}4mm$. When d = 4 mm, the total number of bubbles was 29,777, and it was confirmed that micro-bubbles occupied approximately 65% of the total number of bubbles. In Case 2, the air self-suction was maintained constant at approximately 2.5 LPM regardless of the number (n) of holes. The total amount of bubbles increased when n increased but remained constant at approximately 44,000 when $n{\geq}7EA$. It was also confirmed that more than 80% of all bubbles were micro-bubbles when $n{\geq}10EA$. Thus, the number of micro-bubbles increased by approximately 15% compared to the experimental result of Case 1, which was optimized with d = 4 mm.

• 한국기계가공학회지
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• 제14권3호
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• pp.149-154
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• 2015

This study has focused on the deburring technology of a vacuum plate for MLCC lamination using electrolytic in-process dressing (ELID) grinding, and the magnetic-assisted polishing (MAP) process. The surface of the vacuum plate has many micro-holes for vacuum suction. They are easily blocked by the burrs created in the surface-flattening process, such as the conventional grinding process. In this study, the MAP process, the ELID grinding process, and an ultrasonic vibration table are examined to remove the micro-burrs that lead to the blockage of the holes. In the results of the experiments, the MAP process and ELID grinding technology showed significant improvements of surface roughness and deburring performance.

• 한국정밀공학회지
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• 제21권10호
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• pp.42-49
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• 2004

Electrical discharge machining (EDM) is one of the most extensively used non-conventional material removal process. The recent trend in reducing the size of product has given micro EDM a significant amount of research attention. Micro EDM is capable of machining not only micro holes and micro shafts as small as a few micrometers in diameter but also complex three dimensional micro cavities. But, longitudinal tool wear by electrical discharge is indispensable and this affects the machining accuracy in micro EDM process. Therefore, newly developed tool wear compensation strategy called round trip method is suggested and verified by experiment. In this method, machining depth of cut, overlap effect and critical travel length are also considered.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
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• pp.219-220
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• 2000

We propose a new method for the formation of an aluminum parting layer in the fabrication of field emitter arrays, in which we used a reflow property of aluminum at a lower temperature than the deformation point of glass. After the sputtered aluminum layer on the gate metal was etched for the formation of gate holes, we carried out a rapid thermal annealing process, by which the aluminum slightly diffused into the gate hole. This reflowed aluminum could be used as a parting layer and emitter arrays were easily fabricated using this method.

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2005년도 춘계학술발표대회 논문집
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• pp.97-101
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• 2005