• 한국정밀공학회지
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• 제25권7호
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• pp.139-144
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• 2008

Micro electrochemical machining was investigated to machine micro internal features. This method uses a micro disk tool electrode and can easily machine micro features inside of a micro hole, which are very difficult to make by the conventional processes. In order to limit the machining area and localize the electrochemical dissolution, ultra short pulses were used as power source and a micro disk electrode with insulating layer on its surface was used as a tool electrode. By electrochemical process, internal features, such as groove array, were fabricated on the stainless steel plate.

• 한국기계가공학회지
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• 제9권4호
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• pp.1-7
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• 2010

Recently optical and electric and electronic forms in the field of ultra fine patterns has been used extensively, and techniques of the optical parts are required that can precision-machine this micro-patterns such as V or R-shaped micro-groove patterns. In this study, V and R type, shaping the way micro groove brass machining process to characterize the material feed rate and cutting depth and the V and R as a variable brother, using two kinds of diamond tools for each picture shape and surface roughness caused by conditions such as chips, processed through the analysis of effects of geometry and analysis such as precision machining.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.172-175
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• 2002

High speed machining is one of the most effective technologies to improve productivity. It can give great advantage for manufacture of die and Moulds. However, when machining of micro groove in high speed machining a severely thermal damage was generated on workpiece and cutting tool. Generally, the cutting fluid is used to improve penetration. lubrication. and cooling effect. In order to rise the performance of lubrication. it contains extreme pressure agents (Cl, S, P). But the environment of work room go bad by those additive. Therefore, the compressed chilly air with oil mist system was developed to replace the conventional cutting fluid system. This paper carried out the tests to evaluate the machinability by the cutting environment in high speed micro groove machining of NAK80 (HrC40). Compressed chilly air with oil mist was ejected on the contact area between cutting edge and workpiece. The effect of this developed compressed chilly air with oil mist system was evaluated in terms of tool life. The results showed that the tool lift of carbide tool coated TiAlN with compressed chilly air mist cooling was much longer than that of the dry and flood coolant when cutting the material.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1052-1058
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• 2003

The possibility of micro/nano machining through electro-chemical process is discussed in this research. Electro-chemical dissolution region is localized within 1 ${\mu}m$ by applying ultra short pulses with tens of nanosecond duration. The effects of voltage, pulse duration, and pulse frequency on the localization distance are investigated. Localization distance can be manipulated by controlling the voltage and pulse duration, and various hole shapes are produced including stepped holes and taper free hole. High quality micro-hole with 8 ${\mu}m$ diameter with 20 ${\mu}m$ depth and micro-groove with 9 ${\mu}m$ width with 10 ${\mu}m$ depth are machined on 304 stainless steel.

• 한국정밀공학회지
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• 제19권1호
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• pp.186-195
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• 2002

The mechanism of micro machining of reacted layer on silicon surface were proposed. The depth of reacted layer and the change of mechanical property were measured and analyzed. Depth of hydrated layer which is created on the surface of silicon by potassium hydrate was analyzed with SEM and XPS. The decrease of the micro victors hardness of silicon surface was shown with the increase of the concentration of potassium hydrate and the change of the dynamic friction coefficient by chemical reacted layer was measured due to the readiness of machining. The experiment of groove machining was done with 3-axis machine with constant load. With chemical mechanical micro machining the surface crack and burrs generated by both brittle and ductile micro machining were diminished. And the surface profile and groove depth was shown in accordance with the machining speed and reaction time with SEM and AFM.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.542-546
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• 2003

This paper describes the machining characteristics of a developed micro grooving machine. Experiments have been conducted on the various grooving condition such as spindle revolution speed, feed rates and depth of groove. V and U-shaped blade tool and STD11 workpiece was used in this study. Evaluating the machining conditions, RMS and frequency spectrum analysis of AE(acoustic emission) signals according to each conditions were applied. As a result, this study presented the process to optimize micro grooving condition and possibility of application of AE technique in groove machining.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.877-878
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• 2009

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.934-937
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• 2001

It is well-known that the micro fabrication technology of micro parts are the high energy beam or silicon-based micro machining method such as LIGA Process, Laser machining, photolithography and etching technology. But, for fabricating complex 3-D structure it is better to use mechanical machining. This machining method by the mechanical machine tool with nanometer accuracy is getting attention in some field-especially micro optics machining such as grating, holographic lens, micro lens array, fresnel lens, encoder disk etc.. In this study, we survey the micro fabrication by mechanical cutting method and set up the mechanical micro machining system. And we carried out micro cutting experiments for micro parts with v-shape groove.

• 한국정밀공학회지
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• 제18권10호
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• pp.178-183
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• 2001

Abrasive jet machining(AJM) process is similar to the sand blasting and effectively removes hard and brittle materials. AJM has applied to rough working such as debarring and rough finishing. As the need for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro AJM is developed, and has become the inevitable technique to micromachining. This paper describes the performance of the micro AJM in micro grooving of glass. Diameter of hole and width of line in grooving is 80${\mu}{\textrm}{m}$. Experimental results showed good performance in micro grooving of glass, but the size of machined groove increased about 2~4${\mu}{\textrm}{m}$. With the fine tuning of masking process and compensation of film wear. this micro AJM could be effectively applied to the micro machining of semiconductor, electronic devices and LCD.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.977-980
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• 1997

Ultraprecision machining process and MEMS technology have been taken more and more important position in machining of micro parts such as PDP and IT components, as the application field of micro parts increases. A micro machining center is very effective equipment for the fabrication of micro parts, because of its benefits such as lower power consumption, high precision and lower machining cost. Therefore, we study the possibility of application to the micro machining of barrier ribs used in PDP and also analyse the machining characteristics. The fabricated barrier rib has 30~$200\mu\textrm{m}$ pitch and was made by the flat endmill with the diameter of 0.2mm, 40, 000rpm condition.