Characterization of the Chemical Mechanical Micro Machining for Single Crystal Silicon |
Jeong, Sang-Cheol
(Dept.of Precision Mechanical Engineering, Busan National University)
Park, Jun-Min (Dept.of Precision Mechanical Engineering, Busan National University) Lee, Hyeon-U (Dept.of Precision Mechanical Engineering, Busan National University) Jeong, Hae-Do (Busan National University) |
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