• 한국공작기계학회논문집
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• 제16권5호
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• pp.198-204
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• 2007

This study was carried out to develope a flow control system using to supply PR(photo-resist) in the semi-conductor manufacturing process. The features of this system are to be able to measure the high viscosity and micro-flow. To meet above study object some ideas was induced to design a new concept valve with new material, multi-cross wheel, and new sealing method etc.. As the evaluations on the developed micro-flowmeter it was enough satisfied to use at the IT industries such as photo-resist process.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3268-3270
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• 1999

This paper presents the fabrication of a micro electromagnetic flowmeter for liquid flow rate measurement. The flowmeter consists of a silicon flow channel with two electrodes and two permanent magnets. The micro flow channel and the detection electrodes are fabricated by the anisotropic etching of two silicon substrates and the metal evaporation process respectively. If conductive fluid passes through a magnet field, electromotive force is generated and detected by two electrodes. When the flow rate is 2.6 ml/sec, the measured output voltage is 7.4 mV.

• 대한기계학회논문집B
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• 제40권9호
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• pp.613-620
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• 2016

유체의 전도율(conductivity)이 전자기유량계의 특성에 미치는 영향을 평가하기 위해 소형 전자기 유량계를 설계 제작하였다. 유량계의 측정관(measuring tube)은 $4mm{\times}3mm$의 직사각형 단면을 가지며 길이는 9 mm이다. 전극은 직경이 1.5 mm인 점전극과 단면이 $2mm{\times}3mm$인 면전극으로 설계하였다. 코일의 열 발생에 영향을 미치는 자화주파수, 회전수 및 굵기를 변화시키면서 최적값을 찾았다. 최적화된 측정관은 자속밀도(magnetic flux density) 0.04 T (400 gauss)를 발생시키며 안정되고, 선형적인 유량신호를 얻을 수 있었다. 유량계를 특성을 평가하기 위해 중량식 유량계 교정 장치를 제작하였다. 유동율 범위는 최대 $1.17{\times}10^{-5}m^3/s$(700 cc/min)이며 ISO규격에 따라 유동량 결정의 불확도를 평가하였으며 크기는 0.06 % 이내이었다. 유체의 전도율은 $3-11{\mu}S/cm$ 사이에서 조절하였다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.196-201
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• 2004

In biometric and biomedical applications, a special transporting mechanism must be designed for the ${\mu}$TAS (micro total analysis system) to move samples and reagents through the microchannels that connect the unit procedure components in the system. An important issue for this miniaturization and integration is microfluid management technique, i.e., microfluid transportation, metering, and mixing. In view of this, this study presents an optimal fuzzy sliding-mode control (OFSMC) design based on the 8051 microprocessor and implementation of a complete microfluidic manipulated system implementation of biochip system with a pneumatic pumping actuator, a feedback-signal photodiodes and flowmeter. The new microfluid management technique successfully improved the efficiency of molecular biology reaction by increasing the velocity of the target nucleic acid molecules, which increases the effective collision into the probe molecules as the target molecules flow back and forth. Therefore, this hybridization chip was able to increase hybridization signal 6-fold and reduce non-specific target-probe binding and background noises within 30 minutes, as compared to conventional hybridization methods, which may take from 4 hours to overnight. In addition, the new technique was also used in DNA extraction. When serum existed in the fluid, the extraction efficiency of immobilized beads with solution flowing back and forth was 88-fold higher than that of free-beads.