• 마이크로전자및패키징학회지
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• 제22권4호
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• pp.31-36
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• 2015

전자소자의 다기능, 고밀도, 고성능, 그리고 소형화는 전자 패키지 기술에 초미세 피치 플립 칩, 3D 패키지, 유연 패키지, 등 새로운 기술 패러다임 전환을 가져왔으며, 이로 인해 패키지 된 칩의 열 관리는 소자의 성능을 좌우하는 중요한 요소로 대두되고 있다. Heat sink, heat spreader, TIM, 열전 냉각기, 등 많은 소자 냉각 방법들 중 본 연구에서는 냉매를 이용한 on-chip 액체 냉각 모듈을 Si 웨이퍼에 제작하고, 마이크로 채널 디자인에 따른 냉각 효과를 분석하였다. 마이크로 채널은 딥 반응성 이온 에칭을 이용하여 형성하였고, 3 종류 디자인(straight MC, serpentine MC, zigzag MC)으로 제작하여 마이크로 채널 디자인이 냉각 효율에 미치는 영향을 관찰하였다. 가열온도 $200^{\circ}C$, 냉매 유동속도 150 ml/min의 경우에서 straight MC가 약 $44^{\circ}C$의 높은 냉각 전후의 온도 차를 보였다. 냉매의 흐름과 상 변화는 형광현미경으로 관찰하였으며, 냉각 전후의 온도 차는 적외선현미경을 이용하여 분석하였다.

• 대한기계학회논문집B
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• 제24권2호
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• pp.241-250
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• 2000

In this study, condensation heat transfer tests were conducted in flat aluminum multi-channel tubes using R-22. Two internal geometries were tested ; one with smooth inner surface and the other with micro-fins. Data are presented for the followin~ range of variables ; vapor quality($0.1{\sim}0.9$), mass flux($200{\sim}600kg/m^2s$) and heat flux($5{\sim}15kW/m^2$). The micro-fin tube showed higher heat transfer coefficients compared with those of the smooth tube. The difference increased as the vapor quality increased. Surface tension force acting on the micro-fin surface at the high vapor quality is believed to be responsible. Different from the trends of the smooth tube, where the heat transfer coefficient increased as the mass flux increased, the heat transfer coefficient of the micro-fin tube was independent of the mass flux at high vapor quality, which implies that the surface tension effect on the fin overwhelms the vapor shear effect at the high vapor quality. Present data(except those at low mass flux and high quality) were well correlated by equivalent Reynolds number, Existing correlations overpredicted the present data at high mass flux.

• 한국전산유체공학회지
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• 제11권4호
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• pp.75-80
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• 2006

Navier-Stokes simulation of the flow in a micro viscous pump is carried out. The micro viscous pump consists of a rotating circular rotor placed in a two dimensional channel. All simulation is carried out by using a finite volume approach, at the Reynolds number of 0.5, to study the performance of the micro viscous pump. Length of channel of the pump is varied to simulate the effects of the pumping load. Numerical solutions show that the net flow of the pump is realized by two counter rotating vortices formed on both sides of the rotor. The volume flow rate of the pump is decreased as length of the channel is increased, while the static pressure difference across the rotor is increased. The static pressure difference across the rotor is observed to be inversely proportional to the volume flow rate as inertia effects are negligibly small. The efficiency of the pump is found to reach a maximum when two counter rotating vortices on both sides of the rotor becomes to merge forming an outer enveloping vortex.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집B
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• pp.96-103
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• 2000

In this study, evaporation heat transfer tests were conducted in flat aluminum multi-channel tubes using R-22. Two internal geometries were tested ; one with smooth inner surface and the other with micro-fins. Data are presented for the following range of variables ; vapor quality $(0.1{\sim}0.9)$, mass flux$(100{\sim}600kg/m^2s)$ and heat flux$(5{\sim}15kW/m^2)$. The micro-tin tube showed higher heat transfer coefficients compared with those of the smooth tube. Results showed that, for the smooth tube, the effects of mass flux, quality and heat flux were not prominent, and existing correlations overpredicted the data. For the micro-fin tube at low quality, the heat transfer coefficient increased as heat flux increased. However, the trend was reversed at high quality Kandlikar's correlation predicted the low mass flux data, and Shah's correlation predicted the high mass flux data. The heat transfer coefficient of the micro fin tube was approximately two times larger than that of the plain tube. New correlation was developed based on present data.

• 대한기계학회논문집B
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• 제35권8호
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• pp.831-838
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• 2011

마이크로채널 표면의 핵에서 생성된 기포는 물을 작동유체로 이용하는 경우 채널의 좁은 단면적에 의해 압착되어 유동불안정성을 유발한다. 직관 마이크로채널에서 압착된 기포는 관성 유동의 역방향인 채널 상류로 진행한다. 마이크로채널에서 역방향 유동을 없애기 위해 채널 하류의 단면적을 확장시키는 것이 효과적이다. 그 이유는 압착된 기포의 전후단 계면의 표면장력에 의한 압력차이가 계면의 반지름에 역비례해서 자연적으로 기포가 채널 하류로 이동하려는 힘이 발생하기 때문이다. 확장 증발 마이크로채널에서 정적 유동불안정성 모델이 제시되었으며, 실험으로 모델을 검증하였다. 또한, 안정된 확장 시스템을 설계하기 위해 국부 설계 개념을 도입하였다. 검증된 모델과 개념을 바탕으로 안정된 확장 증발 마이크로채널 설계를 성공적으로 수행하였다.

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2004년도 추계학술대회 논문집
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• pp.86-89
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• 2004

One most feasible way to measure the concentration field in the micro-channel is using micro-LIF(Laser Induced Fluorescence) method. However, an accurate concentration field at a given cross plane in a micro-channel has not been successfully achieved so far due to various limitations in the light illumination and fluorescence signal detection. The present study demonstrates a novel method to provide an ultra thin laser sheet beam having five(5) microns thickness by use of a micro focus laser line generator. The laser sheet beam illuminates an exact plane of concentration measurement field to increase the signal to noise ratio and considerably reduce the depth uncertainty. Nile Blue A was used as fluorescent dye for the present LIF measurement. The enhancement of the fluorescent intensity signals was performed by a solvent mixture of water $(95\%)$ and ethanol (EtOH)/methanol (MeOH) $(5\%)$ mixture. To reduce the rms errors resulted from the CCD electronic noise and other sources, an expansion of grid size was attempted from $1\times1$ to 3(3 or 5(5 pixel data windows and the pertinent signal-to-noise level has been noticeably increased accordingly.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 금형가공,미세가공,플라스틱가공 공동 심포지엄
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• pp.49-53
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• 2005

The objective of this research was to establish the size limitation of micro metal forming and analyze the formability of foil. Flat-rolled ultra thin metallic copper foil($3{\mu}m$ in thickness) was used as a forming material and foil was annealed to improve the formability at the temperature of $385^{\circ}C$. Forming die was fabricated by using etching technique of DRIE(deep reactive ion etching) and HNA isotropic etching. For the forming die and coupe. foil were vacuum packed and the forming was conducted as applying hydrostatic pressure of 250MPa to the vacuum packed unit. We successfully obtained the micro channels of $12\~14{\mu}m$ width and $9{\mu}m$ depth from micro forming process we designed. We also investigated the thickness strain distribution of foil from experiment and FE simulation result. Micro channels had a good formability of smooth surface and size accuracy. We expect that micro metal forming technology will be applied to production of micro parts.

• 한국정밀공학회지
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• 제30권1호
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• pp.120-127
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• 2013

A novel severe plastic deformation process named half channel angular extrusion (HCAE) is proposed in order to produce bulk UFG materials. In HCAE process, equal channel angular extrusion (ECAE) and conventional forward extrusion process is integrated to increase the strain per pass and effectiveness of the SPD process. Three-dimensional finite element analysis was carried out to study the deformation behavior of the materials in the HCAE process. HCAE process was performed experimentally on commercially pure aluminum (AA1050) and micro-Vickers hardness test was used to measure the distribution of hardness on the section of normal to the extrusion direction. The results show that HCAE is able to impose more intensive strains per pass and give rise to higher micro-hardness than ECAE.

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2007년도 추계학술대회
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• pp.71-76
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• 2007

Flow visualization of a droplet passing through a straight channel and a diverging channel has been carried out using micro-PIV. Diverging channel is frequently used in lab-on-a-chip and microfluidic devices, where flow pattern inside the droplet passing is quite different from that through a straight channel. In the present study, we visualized the droplet flow in three different regions. The first region is where the droplet has a wide contact area with the channel wall, the second region is characterized with a narrow contact area and the third region is where droplet is detached from the channel wall. Visualization results show that the internal flow inside the droplet passing through the straight channel moves in the opposite direction to the droplet velocity in the near wall exhibiting complex flow patterns. But in the diverging channel the internal flow inside the droplet moves in the same direction as the droplet velocity due to the shear induced by oil phase flow exhibiting rather simple flow pattern.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집D
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• pp.360-364
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• 2001

Numerical Aanlysis is made on the thermal performance of micro heat pipe in a axial flat grooved channel. The flow of liquid and vapor is investigated in trapezoidal grooves and the effect of variable shear stress along the interface of the liquid and vapor considered. The results from this study are obtained in the axial variation of pressure difference between vapor and liquid, contact angle, velocity of liquid and vapor and so forth. In addition, maximum heat transport capacity of micro-heat pipe is provided by varying the operation temperature, and compared with that from Schneider and Devos's model in which the interfacial shear stress is neglected.