• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.907-910
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• 1997

With increasing the needs for micro and precision parts, micro machining technology has been studied to fabricate a small part with high density such as electronics, optics, communications, and medicine industry more than before. But there are many problems to be solved requiring a high-level technology. So this research presents the new method to fabricate a small part through applying chemical mechanical micro machining (C3M) for the Al wafer. Al(thickness I ,u m) was sputtered on the Si substrate. Al is widely used as a lightweight material. However form defect such as burr has a bad effect on products. To improve machinability of ductile material, oxide layer was formed on the surface of AI wafcr before grooving by chemical reaction with HN03(10wt%). And then workpieces were machined to compare conventional micro-machining process with newly suggested method at different machining condition such as load and feed rate. To evaluate whether or not the machinability was improved by the effect of chemical condition, such as the size, the width of grooves 'and burr generation were measured. Finally, it is confirmed that C3M is one of the feasible tools for micro machining with the aid of effect of the chemical reaction.

• Transactions of Materials Processing
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• v.18 no.2
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• pp.166-171
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• 2009

In this paper, a basic study on micro cutting process with SM20C at low temperature environment was performed. In macro cutting fields, the cryogenic cutting process has been applied to cut the refractory metal but, the serious problem may be generated in micro cutting fields by the cryogenic environment. However, if the proper low temperature is applied to micro cutting area, the cooling effect of cutting heat is expected. Such effect can make the reduction of tool wear and burr formation. For verifying this possibility, the micro cutting experiment at low temperature was performed and SEM images were analyzed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.951-954
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• 2003

Generally, for the burrs formed in machining are irregular and very sharp in shape, it is usually very difficult to measure burr accurately. But, it is proved that precision measurement for micro burr using the conoprobe sensor by conoscopic holography method is possible. We developed 3D burr measurement system using this sensor. The system is composed of Conoscopic laser Sensor, X-Y table, controller and 3D measurement program. Some measurements using the developed system are applied to burrs formed in micro drilling and piercing.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.6
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• pp.81-87
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• 2003

Triangulation method, conoscopic holography method and interferometry method are analyzed for effective measurement of micro burr geometry, which is formed in micro drilling. To select proper sensor, the cross section of a cylinder with 0.5mm diameter is measured and the result shows that conoscopic holography method is effective for measuring highly inclined surface in cylinder. Burrs with 1.0mm and 30${\mu}{\textrm}{m}$ height are measured by three suggested methods. As a result, the conoscopic holography method is proved to be most proper in measuring burr geometry. Burr measurement system is developed, which consists of conoscopic laser sensor, X-Y table, controller and burr measurement program. Burrs can be measured automatically and the result is displayed in 3D shape

• Journal of Mechanical Science and Technology
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• v.14 no.11
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• pp.1244-1249
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• 2000

Burr and shape distortion are two main problems in micro-grooving. In this study, a simplified model is proposed based on large thrust force due to the tool edge radius. Experiments are conducted with a single crystal diamond tool on a 3-axis snaper-like machine varying the depth of cuts, and groove angles on brass, aluminum and OFHC. Experiments have shown that the thrust force becomes a dominant variable in burr generation compared to the principal force when the depth of cut is less than 2${\mu}m$. And fewer burrs develop on more brittle materials. Shape distortion is significant only when the groove angle is small and the depth of cut is larger than 30 ${\mu}m$.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.41 no.4
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• pp.251-255
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• 2017

Burr generation is inevitable during the machining of a micro-pattern, and it is difficult to distinguish between the pattern and burr because they have a very small dimensions. In this study, a micro-pattern with a pitch of $60{\mu}m$and height of $1{\mu}m$ was fabricated on a cylindrical surface using a turning machine. The structure of a burr and its generation mechanism were determined, and a magnetic abrasive deburring process was used to improve the accuracy of the pattern. As a result, when fabricating a micro-pattern, it was shown that the direction of the burr was determined by the feed direction of the tool. The measured pattern height was $1.018{\mu}m$ when the magnetic flux density and spindle speed were respectively 40 mT and 1600 rpm, respectively, during magnetic abrasive deburring, which were determined to be the optimal conditions for processing.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.598-603
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• 2005

Recently, the advanced industries using micro parts are rapidly growing. The appearance of ultra-precision feed mechanism and the development of control system make it possible to process parts in sub millimeter scale by mechanical methods. Micro endmilling is one of the prominent technology that has wide spectrum of application field ranging from macro parts to micro products. So, micro stairs have been trying to cut by using high revolution air turbine spindle and micro-endmill, and studying for magnitude of cutting force. This investigation deals removal characteristics of burr generated by micro endmilling process. Also, decreasing of burr is significant problem in making smooth and precise parts in micro endmilling. In micro endmilling, the material removal rate(MRR) and cutting forces are very small. This paper presents an investigation on the machining characteristics for micro stairs by using ultrahigh-speed air turbine spindle in machining.

• Transactions of Materials Processing
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• v.12 no.4
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• pp.314-319
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• 2003

In the micro hole punching, the size and shape of burr and burnish zone are very important factors to evaluate quality of micro holes which depend on punch-die clearance, strain rate, workpiece material and etc. To get micro holes with small burr and wide burnish zone for industrial demands, not only the parametric study but also a study on fracture behavior in shear band are necessary. In this study, 100 $\mu$m, 25 $\mu$m micro holes in diameter were fabricated on brass (Cu63/Zn37) and SUS 316 foils as aspect ratio 1:1, and the characteristics of micro holes was investigated comparing with those of macro holes over several mm by scanning electron microscopic views and section views. Like macro hole, micro hole is also composed of 4 portions, rollover. burnish zone, fracture zone and burr, and it shows similar fracture behavior in shear band. But by high strain rate (10$^2$∼10$^3$s$^{-1}$ ) condition unlike that of macro hole fabrication and by the increment of relative grain size in the direction of the workpiece thickness, fracture zone is not observed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.1084-1087
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• 1997

In this paper, we developed the micro NCT system for punching the thin plates, which is driven is driven by the standalone type microprocessor. In order to adjust the alignment between the punch and die in-situ punching procedures, the non-contact type laser sensor for measuring the burr and micro-driving system for punching die with using the differential screw are developed. The height of burr in four directions in the punched hole of test specimen are measured, and the measured data are transferred to the personal computer by RS232C serial communication technology. In the personal computer, by using the graphic user interface type monitoring program and data handling procedures which includes the filtering algorithms, the direction and length of movement of the die position is decided and these data are transferred back to the microprocessor. The microprocessor drives the micro positioning stage based on these data. Even if this method is not a perfect solution for the in-situ alignment in micro punching, but this alignment methodology is accomplished in the same stage just after the punching that we hope to solve the alignment problem in the punching system based on this technology.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.5
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• pp.1172-1182
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• 1993

In orthogonal machining a quantitative model for burr formation process and fracture when tool exits workpiece is proposed. When no fracture during burr formation burr formation process is divided by three parts; Initiation, Development and Final burr formation. According to the properties of workpiece fracture will happen or not after initiation of burr formation. Considering the fact that fracture depends on the ductility of workpiece, the fracture strain obtained from ductile fracture criterion is used for prediction. It is verified that the fracture strain from tension test can be used as fracture criterion in burr formation without large error. For detailed observation of burr formation an experimental stage for micro orthogonal cutting inside SEM (Scanning Electron Microscope) is built. Through the comparison between model prediction and experimental result from orthogonal machining in milling machine the model is verified.