• Journal of the Semiconductor & Display Technology
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• v.3 no.2
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• pp.27-33
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• 2004

This paper is concerned with development of a micro tensile testing machine for optical functional materials such as single or poly crystal silicon and nickel film. Two micro tensile testers have been developed for various types of materials and dimensions. One of the testers is actuated by a PZT and the other is actuated by a servo motor for a precise displacement control. The specifications of PZT actuated micro tensile tester developed are as follows: the volumetric size of tester is desktop sized of 710$\times$200$\times$270 $mm^3$; the minimum load capacity and the load resolution in the load cell of 1N are 3 mN and 0.1 mN respectively; the full stroke and the stoke resolution of piezoelectric actuator are 1 mm and 10nm respectively. A special automatic specimen installing equipment is applied in order to prevent unexpected deformation and misalignment of specimens during handling of specimen for testing.

• Transactions of the Society of Information Storage Systems
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• v.8 no.1
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• pp.6-10
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• 2012

The tribological behavior of microsystems needs to be clearly understood in order to improve the reliability of precision components. For example, friction and wear phenomena pose serious problems in MEMS applications. As a first step to investigate the tribological behavior of such systems, an appropriate testing system must be acquired. In this work, a micro-wear tester based MEMS platform was designed. The main concern was to achieve a desirable range of horizontal displacement for the specimen holder and also to apply a normal force in the tens of ${\mu}N$ range. The structural analysis of the micro-wear tester showed that the proposed design satisfied these requirements while maintaining the structural integrity.

• Transactions of Materials Processing
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• v.11 no.7
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• pp.561-568
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• 2002

Micro tensile test is the most direct and convenient method to measure material properties such as Young's modulus and fracture strength. It, however, needs more accurate measurement system, mote stable and repetitive alignment and more sensitive gripping than conventional tensile test. Many researchers have put their effort on overcoming these difficulties for tile development of micro tensile tester, fabricating micro specimens of functional materials and measuring their properties. This paper will review the related vigorous researches over the world in the recent decade and explain how to apply them to a design of the fester which is under our own development.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.163-168
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• 2006

In a micro-unit of electronic-machine, vibration can be excited by a small impact, and this vibration acts as a fatigue load. To measure the vibration effect on the micro unit, a micro dynamic tester is needed to test a micro specimen. In this paper, it has confirmed a movement of the PZT(piezo actuator) to use a sine signal. And, it has confirmed a fracture of specimens by using a tension-tension input signal in PZT. A metal-material property in the micro scale has been tested to compare with the macro scale. A fatigue test has been conducted by using PZT actuator to give a bending-tension effect.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.220-224
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• 2005

The technology trend of Flat Panel Display (FPD) equipments have been demanded that there are compact and multi-function. Therefore, nano/micro scale patterned on polymeric materials of Back Light Unit (BLU) in Liquid Crystal Display (LCD) that has been investigated. This paper describes a series of Horizontal Type Micro Tensile Tester that were carried out to investigate the load strain distance performance of typical polymeric material sheets. The polymeric materials film that micro size shaped specimens for tensile test are used by Cold-Isostatic-Press (CIP). Test equipment is Horizontal type Micro Tensile Tester that is presented to measure the micro scale mechanical property of thin film for FPD. This paper presents which easy testing tools measure for micro patterned on polyethylene (PET) specimens.

• International Journal of Control, Automation, and Systems
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• v.3 no.3
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• pp.477-485
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• 2005

This paper is concerned with the development of a micro tensile testing machine for optically functional materials such as single or poly crystalline silicon and nickel film. This micro tensile tester has been developed for testing various types of materials and dimensions. PZT type actuation is utilized for precise displacement control. The specifications of the PZT actuated micro tensile testers developed are as follows: the volumetric size of the tester is desktop type of 710mm' 200mm' 270mm; the maximum load capacity and the load resolution in this system are IKgf and 0.0152mgf respectively and; the full stroke and the stoke resolution of the PZT actuator are $1000{\mu}m$ and 10nm respectively. Special automatic specimen installing and setting equipment is applied in order to prevent unexpected deformation and misalignment of specimens during handling of specimens for testing. Nonlinearity of the PZT actuator is compensated to linear control input by an inverse compensation method that is proposed in this paper. The strain data is obtained by ISDG method that uses the laser interference phenomenon. To test the reliance of this micro tensile testing machine, a $200{\mu}m$ thickness nickel thin film and SCS (Single Crystalline Silicon) material that is made with the MEMS fabrication process are used.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.1213-1214
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.613-614
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• 2009

• Proceedings of the KWS Conference
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• 2001.10a
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• pp.225-228
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• 2001

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.502-505
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• 2005

Researches about micro technology travel lively in these days. Such many researches are concentrated in the field of materials and a process field. But properties of micro materials should be known to give results of research developed into still more. In these various material properties, mechanical property such as tensile strength, elastic modulus, etc is the basic property. To measure mechanical properties in micro or nano scale, actuating must be very precise. PZT is a famous actuator which becomes a lot of use to measure very precise mechanical properties in micro research field. But PZT has a nonlinearity which is called as hysteresis. Not precision result is caused because of this hysteresis property in PZT actuator. Therefore feedback control method is used in many researches to prevent this hysteresis of PZT actuator. Feedback control method produce a good result in processing view, but cause a loss in a resolution view. In this paper, hysteresis is compensated by open loop control method. Hysteresis property is modeled in Mathematical function and compensated control input is constructed using inverse function of original data. Reliability of this control method can be confirmed by testing nickel thin film that is used in MEMS material broadly.