• 한국전기전자재료학회논문지
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• 제14권12호
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• pp.994-1000
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• 2001

In this paper, using micro-stereolithography technology, I fabricated a liquid analyzer to measure ion concentration of a solution. Micro-stereolithography is a technology to fabricate 3-dimensional structure by applying laser beam on liquid photo-polymer. This technology makes it possible to do preassemble fabrication without any extra assembling step after the process. So, the liquid analyzer could be fabricated at very low cost with very simple process by micro-stereolithography technology. The liquid analyzer consists of a chamber for containing the solution, a pump using piezoelectric effect of PZT disk, a static mixer and a sensor for measuring ion concentration using Pt electrodes.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.885-887
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• 2005

Recently, many three-dimensional micros-structures were fabricated using micro-stereolithography technology. However, for most conventional micro-stereolithography apparatus. an expensive laser was used as light source and complex optical systems were used. In this research. new type of micro-stereolithography apparatus which has UV lamp as light source and optical fiber as beam delivery system was developed. This apparatus is cheaper and simpler then conventional micro-stereolithography apparatus.

• 한국정밀공학회지
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• 제21권2호
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• pp.186-194
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• 2004

Micro-stereolithography is a newly proposed technology as a means that can fabricate a 3D micro-structure of free form. It makes a 3D micro-structure by dividing the shape into many slices of relevant thickness along horizontal surfaces, hardening each layer of slice with a focused laser beam, and stacking them up to a desired shape. In this technology, differently from the conventional stereolithography, scale effect is dominant. To realize micro-stereolithography technology, we developed the micro-stereolithography apparatus which is composed of an Ar+ laser, x-y-z stages. controllers. optical devices and scan path generation software. Related processes were developed, too. Using the system, a number of micro-structures were successfully fabricated. Some of these samples are shown for prove this system. Laser scan path generation algorithm and software considering photopolymer solidification phenomena as well as given 3D model were developed. Sample fabrication of developed software shows relatively high dimensional accuracy compared to the uncompensated result.

• 한국정밀공학회지
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• 제23권12호
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• pp.117-121
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• 2006

Generally, micro-stereolithography technology uses laser and complex optical system as light source and light delivery system, respectively. In this research, a novel micro-stereolithography technology that uses UV lamp that is more economical than UV laser as light source and optical fiber that is simpler than previous light delivery system has been developed. Furthermore, precise control system that is composed of 3-axis linear stage and shutter has been used to fabricate truly three dimensional micro-structure. For confirming the feasibility of developed micro-stereolithography apparatus, the solidification experiments were conducted. The solidification widths and depths datum of photopolymer as varying scanning speed of the UV light have been obtained. Using developed apparatus, some micro structures were fabricated successfully.

• 한국정밀공학회지
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• 제21권8호
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• pp.106-111
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• 2004

Micro-stereolithography technology has made it possible to fabricate any form of three-dimensional microstructures. It makes a 3D structure by dividing the shape into many slices of relevant thickness along horizontal surface, hardening each layer of slice with a laser, and stacking them up to a desired shape. Until now, however, the micro-stereolithography device was not designed systematically because the key factors governing the device were not considered. In this paper, we designed micro-stereolithography device using axiomatic approach. This paper contains an overview and an analysis of a new proposed system for development of micro-stereolithegraphy device, and detailed descriptions of the activities in this system. The newly designed system offers reduced machine size by minimizing of optical components and decoupled design matrix.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.1080-1083
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• 1997

Micro-stereolithography is a newly proposed technology as a means that can fabricate 3D micro-structures of free form. It makes a 3D structure by dividing the shape into many slices of relevant thickness along honzontal surfaces, hardening each layer of slice with a laser, and stacking them up to a des~red shape. Scale effect becomes important in this micro-fabrication process, d~fferently from the conventional stereolithography. To realize this micro-stereolithography technology, we developed an equipment using Ar+ laser, xyz stages, controllers and all the optic devices. Using the equipment, a number of micro-structures were successfully fabricated including a winecup of several tens of micrometers.

• 한국정밀공학회지
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• 제24권12호
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• pp.128-135
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• 2007

Micro-channels for a wave micropump have been fabricated using the Stereolithography and UV Photolithography. The micro-channel with a channel height of $500\;{\mu}m$ was fabricated with stereolithography. UV photolithography was used for producing micro-channels with a channel length less than $100\;{\mu}m$. The fabrication process data including spinning rpm, pre-bake and post-bake time, and develop time for single layer and multiple layer 3D micro-structures using SU-8 photo resist are experimentally found. A film mask printed with a 40,000 dpi laser printer was used for UV lithography and micro-structures in the order of tens of micrometers in dimension were successfully fabricated.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1155-1158
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• 2005

Micro-stereolithography is a newly proposed technology as a means that can fabricate a 3D micro structure of free form. It makes a 3D micro-structure by dividing the shape into many slices of relevant thickness along horizontal surfaces, hardening each layer of slice with a focused laser beam, and stacking them up to a desired shape. However, we do not anticipate the electric conductivity of the final product at the existing micro-stereolithography. The reason is that this technology uses polymer to make the product. Thus the new suspension which was mixed conventional photopolymer with metal powder was developed in this study. The developed suspensions were based on SL5180 which is commercialized resin and IMS03 that is made in our laboratory. And Triton X-100 was added at the suspension for getting the scattering effect and stabilizing effect. The layer recoating device was developed to be flat the mixed high viscosity suspension. A 3D micro structure was manufactured by using recoating system and micro-stereolithography system. The fabricated product was sintered to get the electric conductivity. After sintering, a pure copper product was made. In this study, new process was developed by making metal micro structure having an electric conductivity. This technology broadened the realm of the micro-stereolithography technology. And it will be applied to make the 3D micro structure of free form which has a high hardness and an electric conductivity in the near future.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.161-162
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• 2006

Micro-stereolithography technology is used for fabricating of 3-dimensional micro-structures. In some cases, this technology is more economical and simpler than MEMS and LIGA technologies based on semiconductor process. In this research, the micro-sterolithography apparatus that is more economical and simpler than current micro-stereolithography apparatus was developed. This apparatus uses UV lamp and optical fiber as a light source and tight delivery system, respectively.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.615-618
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• 2005

All over the world, many kinds of micro-actuators were already developed for various applications. The actuators are using various principles such as electromagnetic, piezoelectric and thermopneumatic etc. The most of the micro-actuators have been made using 2D based MEMS technology. In these actuators, it is difficult to drive 3-dimensional motion. This characteristic gives the limit of actuator application. However, micro-stereolithography technology has made it possible to fabricate freeform three-dimensional microstructures. In this technology, 2-dimensional micro-shape layer is cumulated on the other layers. This layer-by-layer process is the main principle to fabricate 3-dimensioal micro-structures. In this research, a micro-bellows actuator that is vertically moving was developed using the micro-stereolithography technology. When pressure was applied into the bellows, a non-contact actuating motion is generated. For actuation experiment, syringe pump and laser interferometer were used for applying pressure and measuring the displacement. Several hundreds micro-scale actuation was observed. And, to demonstrate the feasibility of proposed actuation principle, in this research, a micro-gripper was developed using half-bellows structure.