• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.178-182
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• 2007

This study represents the efficient depth measurement for 3-dimensional microsystems using the disparity histogram from stereo images. Implementation of user-friendly Windows program written in C++ involves the various methods for the stereo-image processing in which the minimization of matching-pixel error upon the unique point for stereo images was carried out as a pre-processing method. Even though MPC among various methods was adopted in the present measurement, the resulting measurements seem to require optimizations of the windows sizes and corrections of post-manipulation for stereo images. The present work using Windows program is promising to measure the 3-dimensional depth of micro-system efficiently in implementing the 3-dimensional structure of micro-systems.

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.158-163
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• 2001

Operators suffer much difficulty in manipulating micro/nano-sized objects without the assistance of human interfaces, due to the scaling effects in micro/nano world. This paper presents a micro manipulation system based on the teleoperation techniques which enables the operators to manipulate the objects with ease by transferring both human motion and manipulation skill to a micromanipulator. An experimental setup consisting of a micromanipulator operated under stereo-microscope with the help of intelligent user interface provides a tool that can be used to visualize and manipulate micro-sized 3D objects in a controlled manner. The key features of a micro manipulation system and control strategies using teleoperation techniques for handling micro objects are presented. Experimental results demonstrate the feasibility of this system in precisely controlling trapping and manipulation of micro objects based on teleoperation techniques.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.904-909
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• 2004

In this paper a web-based micro fabrication system is discussed. A commercial CAD and a web browser were used as its user interfaces. In these user interfaces the concepts of Design for Manufacturing (DFM) was implemented providing the fabrication knowledge of micro machining to the designers. Simple databases were constructed to store the fabrication knowledge of materials, tools, and micro machining know-how. The part geometry was uploaded to the web server of this system as an STL (Stereo Lithography) format with process parameters for 3-axis micro milling. A Slice-based process planner automatically provides NC codes for controlling micro stages. A couple of micro parts were fabricated using the system with micro endmills. This design and manufacturing system enables network users to obtain micro-scale prototypes in a rapid manner.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.170-173
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• 2004

In this paper a web-based micro fabrication system is discussed. A commercial CAD and a web browser were used as its user interfaces. For the user interfaces, the concepts of Design for Manufacturing (DFM) were implemented providing the fabrication knowledge of micro machining to the designers. Simple databases were constructed to store the fabrication knowledge of materials, tools, and micro machining know-how. The part geometry was uploaded to the web server of this system as an STL (Stereo Lithography) format with process parameters for 3-axis micro milling. A Slice-based process planner automatically provides NC codes for controlling micro stages. A couple of micro parts were fabricated using the system with micro endmills. This design and manufacturing system enables network users to obtain micro-scale prototypes in a rapid manner.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.1080-1083
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• 1997

Micro-stereolithography is a newly proposed technology as a means that can fabricate 3D micro-structures of free form. It makes a 3D structure by dividing the shape into many slices of relevant thickness along honzontal surfaces, hardening each layer of slice with a laser, and stacking them up to a des~red shape. Scale effect becomes important in this micro-fabrication process, d~fferently from the conventional stereolithography. To realize this micro-stereolithography technology, we developed an equipment using Ar+ laser, xyz stages, controllers and all the optic devices. Using the equipment, a number of micro-structures were successfully fabricated including a winecup of several tens of micrometers.

• Proceedings of the Optical Society of Korea Conference
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• 2003.07a
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• pp.64-65
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• 2003

Stereo-lithography using the two photon absorption(TPA) makes micro structures with great resolution. The technique is applied to correcting photomask, 3-D photonic crystal, 3-D optical storage, 3-D lithography and so on. In contrast to a conventional stereo-lithography with single-photon absorption which has a size problem caused by the geometrical diffraction limit, the stereo-lithography with TPA has no size limit. (omitted)

• Journal of the Korean Society for Precision Engineering
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• v.24 no.4 s.193
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• pp.44-56
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• 2007

• International Journal of Aeronautical and Space Sciences
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• v.18 no.3
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• pp.414-424
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• 2017

This paper introduces an experimental device which can measure accurate aerodynamic forces without support interference in wide experimental region for wind tunnel test of micro aerial vehicles (MAVs). A stereo pattern recognition (SPR) method was introduced to a magnetic suspension and balance system (MSBS), which can eliminate support interference by levitating the experimental model, to establish wider experimental region; thereby MSBS-SPR integrated system was developed. The SPR method is non-contact, highly accurate three-dimensional position measurement method providing wide measurement range. To evaluate the system performance, a series of performance evaluations including SPR system measurement accuracy and 6 degrees of freedom (DOFs) position/attitude control of the MAV model were conducted. This newly developed system could control the MAV model rapidly and accurately within almost 60mm for translational DOFs and 40deg for rotational DOFs inside of $300{\times}300mm$ test section. In addition, a static wind tunnel test was conducted to verify the aerodynamic force measurement capability. It turned out that this system could accurately measure the aerodynamic forces in low Reynolds number, even for the weak forces which were hard to measure using typical balance system, without making any mechanical contact with the MAV model.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.503-507
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• 2002

Mask manufacturing is a high COC and COO process in developing of semiconductor devices, because of the mass production tool with high resolution. Direct writing has been thought to be one of the patterning method to cope with development or small-lot production of the device. This study focused on the development of the direct, mastless patterning process using stereolithography tool for the easy and convenient application to micro and miso scale products. Experiments are utilized by three dimensional CAD/CAM as a mask and photo-curable resin as a photo-resist in a conventional stereo-lithography apparatus. Results show that the resolution of the pattern was achieved about 300 micron because of complexity of SLA apparatus settings, inspite of 100 micro of inherent resolution. This paper concludes that photo resist and laser spot diameter should be adjusted to get finer patterns and the proposed method is significantly feasible to mastless and low cost patterning with micro and miso scale.

• Proceedings of the Korean Society of Surveying, Geodesy, Photogrammetry, and Cartography Conference
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• 2003.04a
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• pp.151-159
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• 2003

This study presents method for self-calibration of the SEM(Scanning Electron Microscope) stereo image using the standard microprobe with same grid pattern and using parallel and central perspective projection equation. Result showed that parallel projection method is more suitable for standard microprobe. The maximum error of 3D coordinates acquired by this method did not exceed 5 $\mu\textrm{m}$, and DSM(Digital Surface Model) for three dimensional measurement of the rock sample was generated by the digital photogrammetry. This result can be used for quantification of micro scale change of shape and analysis of the micro morphology of rock due to weathering.