• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.304-309
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• 2004

As it is difficult to construct a micro-fluidic system composed of micro-mixers, micro-channels and/or micro-chambers in a single process, an assembly process is typically used. The assembling and bonding of micro-parts, however, introduces other problems. In this work, a virtual assembly process was developed that can be used to design various micro-fluidic systems before actual fabrication commences. In the process, the information required for the micro-stereolithography process is generated automatically. Consequently, complex micro-fluidic systems can be fabricated in a single process, thereby avoiding the need for additional assembly or bonding processes. Using the developed process, several examples were fabricated.

• 한국정밀공학회지
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• 제21권9호
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• pp.182-187
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• 2004

As it is difficult to construct a micro-fluidic system composed of micro-mixers, micro-channels and/or micro-chambers in a single process, an assembly process is typically used. The assembling and bonding of micro-parts, however, introduces other problems. In this work, a virtual assembly process was developed that can be used to design various micro-systems before actual fabrication commences. In the process, the information required for the micro-stereolithography process is generated automatically. Consequently, complex micro-fluidic systems can be fabricated in a single process, thereby avoiding the need fur additional assembly or bonding processes. Using the developed process, several examples were fabricated.

• 한국기계가공학회지
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• 제12권2호
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• pp.114-120
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• 2013

An EP(Electrolytic Polishing)-MAP(Magnetic Abrasive Polishing) hybrid process was applied to remove burr on the micro pattern. Micro pattern fabrication processes are combined with micro milling and EP-MAP hybrid process for deburring. Depending on the micro milling conditions which are applied, micro burrs are formed around the side and top of the pattern. The EP-MAP deburring is used to remove these burrs effectively. To optimize removal rate and form error in the EP-MAP hybrid process, a design of experiment was performed. The effect of deburring process and form error of micro pattern are evaluated via SEM images and the results of AFM.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.383-388
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• 2005

In this paper Research development about a micro metal forming manufacturing system has been developed. A micro forming system has been achieved in Japan and it's developed micro press is limited to single forming process. To coincide with the purpose to be more practical, research and development is necessary about the press which the multi forming process is possible. We set the development of the equipment including micro deep drawing, micro punching and micro restriking process to the goal. To achieve this goal, Research about micro forming process to be related to multi process forming must be preceded first. Material selection and analysis about micro forming process are accomplished in this paper. And the basis research to make actual system is accomplished.

• Design & Manufacturing
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• 제13권1호
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• pp.5-12
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• 2019

In this paper, we studied the micro tool deflection, micro cutting with low temperature, and deformation of micro ribs caused by cutting forces. First, we performed an integrated machining error compensation method based on captured images of tool deflection shapes in micro cutting process. In micro cutting process, micro tool deflection generates very serious problems in contrast to macro tool deflection. To get the real images of micro tool deflection, it is possible to estimate tool deflection in cutting conditions modeled and to compensate for machining errors using an iterative algorithm correcting tool path. Second, in macro cutting fields, the cryogenic cutting process has been applied to cut the refractory metal but, the serious problem may be generated in micro cutting fields by the cryogenic environment. However, if the proper low temperature is applied to micro cutting area, the cooling effect of cutting heat is expected. Such effect can make the reduction of tool wear and burr formation. For verifying this passibility, the micro cutting experiment at low temperature was performed and SEM images were analyzed. Third, the micro pattern was deformed by the cutting forces and the shape error occurred in the sidewall multi-step cutting process were minimized. As the results, the relationship between the cutting conditions and the deformation of micro-structure during micro cutting process was investigated.

• 한국생산제조학회지
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• 제19권4호
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• pp.498-503
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• 2010

The main purpose of this study strongly concerned micro machining error estimation by using FEM analysis of tool deflection shapes in micro flat end-milling process. For the precision micro flat end-milling process, analysis of micro cutting errors is mandatory. In general, tool deflection is a major factor which causes cutting error and limits realization of the high-precision cutting process. Especially, in micro end-milling process, micro tool deflection generates very serious problems in contrast to macro tool deflection. Methods which deal with compensation of cutting error by tool deflection in macro end-milling process have been studied plentifully but, few researches transact with micro scaled cutting tool deflection in micro cutting process. Therefore, the trend of micro tool deflection was estimated by using FEM analysis in this paper. Cutting forces were acquired by micro dynamometer and these were utilized in FEM analysis. In order to verify FEM analysis results, micro machining processes were carried out and real machined profiles were compared with FEM results. Finally through the proposed approach well suited FEM results were obtained.

• 한국공작기계학회논문집
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• 제16권5호
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• pp.166-171
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• 2007

In this paper Research development about a micro metal forming manufacturing system has been developed. A micro forming system has been achieved in Japan and it's developed micro press is limited to single forming process. To coincide with the purpose to be more practical, research and development is necessary about the press which the multi forming process is possible. We set the development of the equipment including micro deep drawing, micro punching and micro restriking process to the goal. To achieve this goal, we set the application product to a micro thin foil valve which is used in the micro pump module. The compound die set has been designed and manufactured to make two step process. The material of thin foil valve is SUS-304 and its thickness is 50$\mu$m. We can get a good forming results from micro punching experiments in this paper.

• 정보저장시스템학회논문집
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• 제2권4호
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• pp.236-239
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• 2006

Glass micro molding process is the most suitable process for fabricating high precision glass microlens amy at low cost. A new glass micro molding process was proposed. Tungsten carbide mold was fabricated by imprinting and sintering process to overcome the difficulties of the conventional process. In the glass micro molding process, process conditions such as processing temperature and compression force were changed. Geometrical properties of the replicated glass microlens array were measured and compared at variety process conditions. The condition of glass micro molding process was optimized. The experimental result showed that developed process was effective to produce a glass microlens array.

• 한국정밀공학회지
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• 제19권12호
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• pp.171-178
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• 2002

With increasing the needs for micro and precision parts, micro machining technology using micro tools has been studied to fabricate a small part with high density such as electronics, optics, communications, and medicine industry more than before. Though these micro tools have developed rapidly, it is difficult to apply them to micro fabrication technologies, because of the inherent manufacturing. In this study, micro tools (WC) to produce micro structures and parts were manufactured by cylindrical grinding machine employing ELID (Electrolytic In-process Dressing) technique and the micro tools are fabricated as square shape with the dimension less than 100${\mu}{\textrm}{m}$. With the micro tools on the same machine, characteristics of micro grooving and drilling are evaluated. Also we compare normal micro machining with ultrasonic micro machining on the vibration table. It is confirmed that the developed micro tools are fully applicable to micro grooving, micro drilling and free form cutting.

• Tribology and Lubricants
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• 제38권3호
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• pp.93-100
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• 2022

Micro-light emitting diode (micro-LED) displays offer numerous advantages such as high brightness, fast response, and low power consumption. Hence, they are spotlighted as the next-generation display. However, defective LEDs may be created due to non-uniform contact loads or LED alignment errors. Therefore, a repair process involving the replacement of defective LEDs with favorable ones is necessitated. The general repair process involves the removal of defective micro-LEDs, interconnection material transfer, as well as new micro-LED transfer and bonding. However, micro-LEDs are difficult to repair since their size decreases to a few tens of micron in width and less than 10 ㎛ in thickness. The conventional nozzle-type dispenser for fluxes and the conventional vacuum chuck for LEDs are not applicable to the micro-LED repair process. In this study, transfer conditions are determined using a micro stamp for repairing micro-LEDs. Results show that the aging time should be set to within 60 min, based on measuring the aging time of the flux. Additionally, the micro-LEDs are subjected to a compression test, and the result shows that they should be transferred under 18.4 MPa. Finally, the I-V curves of micro-LEDs processed by the laser and hot plate reflows are measured to compare the electrical properties of the micro-LEDs based on the reflow methods. It was confirmed that the micro-LEDs processed by the laser reflow show similar electrical performance with that processed by the hot plate reflow. The results can provide guidance for the repair of micro-LEDs using micro stamps.