• 센서학회지
• /
• 제22권2호
• /
• pp.150-155
• /
• 2013

Recently, various hearing aids are developed to overcome hearing loss. There are available hearing aids, such as air conduction hearing aid, implantable middle ear hearing aid and so on. But air conduction hearing aid is inconvenience caused by howling, and ossicle chain driving type implantable middle ear hearing aid has some week point due to problem of possible nercobiosis of coupling spot along incus long process. In recent years, in order to improve these shortcomings round window (RW) driving hearing aid has been paying attention. In this paper, the physical cochlear model is proposed for a performance evaluation of the RW driving hearing aids of a transducer. In order to verify an experiment proposed on a performance of physical cochlear model, the transducer which has ossicles characteristics is used. By measuring and comparing the frequency characteristics of transducer with ossicles and human temporal bone, performance of physical cochlear model was verified. As from the result of experiment, it is expected that an implemented cochlear model is useful for evaluating characteristics of RW transducer.

• Smart Structures and Systems
• /
• 제6권3호
• /
• pp.225-238
• /
• 2010

We report on the development of a new technology for the fabrication of Micro-Electro-Mechanical-System (MEMS) strain sensors to realize a novel type of crackmeter for health monitoring of ageing civil infrastructures. The fabrication of micromachined silicon MEMS sensors based on a Silicon On Insulator (SOI) technology, designed according to a Double Ended Tuning Fork (DETF) geometry is presented, using a novel process which includes a gap narrowing procedure suitable to fabricate sensors with low motional resistance. In order to employ these sensors for crack monitoring, techniques suited for bonding the MEMS sensors on a steel surface ensuring good strain transfer from steel to silicon and a packaging technique for the bonded sensors are proposed, conceived for realizing a low-power crackmeter for ageing infrastructure monitoring. Moreover, the design of a possible crackmeter geometry suited for detection of crack contraction and expansion with a resolution of $10{\mu}m$ and very low power consumption requirements (potentially suitable for wireless operation) is presented. In these sensors, the small crackmeter range for the first field use is related to long-term observation on existing cracks in underground tunnel test sections.

• 한국재료학회지
• /
• 제12권3호
• /
• pp.211-214
• /
• 2002

Properties of 52/48 PZT films with various thicknesses for piezoelectric micro-electro mechanical systems (MEMS) devices fabricated by multi-coating method on $Pt(3500{\AA})/Ti(400{\AA})/SiO_2(3000{\AA})/Si$(525$\mu\textrm{m}$) substrates were investigated. PZT films were deposited by spin-coating process at 3500 rpm for 30 sec, followed by pyrolysis at 45$0^{\circ}C$ for 10 min producing the thickness of about 120nm. These processes were repeated 4, 8, 12, 16 and 20 times in order to have various thicknesses, respectively. Finally, they were crystallized at $650^{\circ}C$ for 30 min. All thick PZT films showed dense and homogeneous surface microstructures. Thick PZT films showed crystalline structures of random orientations with increasing thickness. Dielectric constants of thick PZT films were increased with increasing film thickness and reached 800 at 100kHz for 2.3$\mu\textrm{m}$ thick PZT film. $P_r\; and\; E_c$ of 2.3$\mu\textrm{m}$ thick PZT films were about 20$\mu$C/$\textrm{cm}^2$ and 63kV/cm. Depth profile analysis by Auger Electron Spectroscopy (AES) of 4800 $\AA$ thick PZT film showed the formation of the perovskite phase on Pt layer by Pb diffusion behavior. It was considered that Pb-Pt intermediate layer promoted PZT (111) columnar structures.

• 한국우주과학회:학술대회논문집(한국우주과학회보)
• /
• 한국우주과학회 2009년도 한국우주과학회보 제18권2호
• /
• pp.47.4-47.4
• /
• 2009

초소형전기기계시스템(MEMS: Micro-Electro-Mechanical Systems) 기술로 제작된 마이크로미러 어레이를 장착한 MEMS 우주망원경은 특유의 광시야각 감시, 목표 확인, 확대 및 고속 추적 기능을 가지며 고층대기에서의 초대형 방전현상과 같이 넓은 영역에서 드물게 임의로 일어나는 섬광현상을 관측하기에 최적이다. 러시아 과학위성 Tatiana-2의 주 탑재체로 선정된 극소형 MEMS 우주망원경 MTEL(MEMS Telescope for Extreme Lightning)은 광시야각 감시와 목표 확인을 위한 트리거망원경, 목표 확대와 고속추적을 위한 확대망원경 및 섬광현상의 분광측정을 위한 분광계로 구성되어 있다. 1년간의 개발 및 성능 검증 후 MTEL은 위성탑재를 위한 모든 우주인증 시험을 성공적으로 마쳤다. 현재 MTEL은 Tatiana-2 위성에 탑재되어 있으며, 9월 18일에 우주로 발사되어 1-3년간 800km 궤도를 비행하며 지구 대기에서 발생하는 섬광현상을 관측할 예정이다. 이 발표에서는 MTEL 탑재체의 설계, 제작, 성능 측정 및 calibration 결과를 보고하고, 위성탑재를 위한 진동 및 충격, 열, 진공 및 전자기파 적합성 등의 우주인증 시험 결과 또한 보고한다. 또한 발사 후 과학위성 및 MTEL의 이 발표 때까지의 우주에서의 상황을 보고한다.

• 한국정보통신학회논문지
• /
• 제22권10호
• /
• pp.1307-1313
• /
• 2018

최근 빈번히 발생하고 있는 지진, 구조물의 노후화에 따라 구조물 붕괴 및 기울어짐 사고 등이 자주 발생하고 있으며, 이런 구조물에 대한 재난을 방지하기 위하여 다양한 방법이 제시되고 있는 실정이다. 이에 본 논문에서는 IoT(Internet of Things) 기반의 구조물 이상 유무를 실시간으로 모니터링 하여 구조물의 붕괴, 기울어짐, 화재 등에 대한 이상 징후현상을 사전에 제공하는 시스템을 제시한다. MEMS(Micro Electro Mechanical Systems) 센서(Sensor)기반의 기울기 센서, 가속도 센서를 이용, 센서별 검출된 데이터를 서버로 실시간 전송, 데이터를 축적하며, 설정된 임계치를 상위할 경우 대응할 수 있는 서비스를 제공 한다. 구조물의 붕괴, 기울어짐, 화재 등의 현상에 대한 임계치 상위 이벤트 발생 시 경고를 함으로, 구조물의 붕괴 및 기울어짐 현상에 대한 대피, 보수가 가능하여, 구조물에서 발생할 수 있는 재난에 대응할 수 있을 것이라고 사료된다.

• 한국공간구조학회논문집
• /
• 제19권2호
• /
• pp.63-72
• /
• 2019

Wireless sensors are more favorable in measuring structural response compared to conventional sensors in terms of them being easier to use with no issues with cables and them being considerably cheaper. Previous tests have been conducted to analyze the performance of MEMS (Micro Electro Mechanical Systems) sensor in sinusoidal excitation tests. This paper analyzes the performance of in-built MEMS sensors in devices by comparing with an ICP sensor as the reference. Earthquake input amplitude excitation in shaking table tests was done. Results show that MEMS sensors are more accurate in measuring higher input amplitude measurements which range from 100gal to 250gal than at lower input amplitudes which range from 10gal to 50gal. This confirms the results obtained in previous sinusoidal tests. It was also seen that natural frequency results have lower error values which range from 0% to 3.92% in comparison to the response spectra results. This also confirms that in-built MEMS sensors in mobile devices are good at estimating natural frequency of structures. In addition, it was also seen that earthquake input amplitudes with more frequency contents (Gyeongju) had considerably higher error values than Pohang excitation tests which has less frequency contents.

• 한국공간구조학회논문집
• /
• 제19권1호
• /
• pp.117-126
• /
• 2019

Micro-Electro-Mechanical Systems (MEMS) sensors have been widely used in Structural Health Monitoring due to their convenience and lower costs in comparison to conventional sensors. Triggered measurements are relevant in events such as earthquakes because unlike continuous measurements, they only record the structural response once an event happens. This is more cost effective and it makes the data more manageable because only the required measurements from the event are recorded. The most common method of triggering is amplitude triggering. However, lower input amplitudes (less than 0.1g) cannot be triggered by using this method. In this paper, sound triggering was introduced to allow triggered measurements for lower input amplitude values. The performance of the sound triggering and amplitude triggering were compared by a series of shaking-table tests. It was seen that sound-triggering method has a wider frequency (0.5~10Hz) and amplitude (0.01~1.0g) range of measurements. In addition, the sound triggering method performs better than the amplitude triggering method at lower amplitudes. The performance of the amplitude triggering, in terms of the triggering being simultaneous improves at higher input amplitudes.

• 한국항행학회논문지
• /
• 제25권1호
• /
• pp.68-77
• /
• 2021

본 논문에서는 높은 동특성 환경에서 동작이 가능한 GPS/MEMS IMU 통합항법 수신모듈을 설계 및 제작하고, 그 결과를 확인하였다. 설계한 모듈은 RF 수신부, 관성측정부, 신호처리부, 상관기, 항법 S/W로 구성된다. RF 수신부는 저잡음증폭, 주파수 변환, 필터링, 자동이득조절 기능을 수행하고, 관성측정부는 3축 자이로스코프, 가속도계, 지자기센서가 적용된 MEMS급 IMU로부터 측정 데이터를 수집하여 항법S/W로 전달하는 인터페이스를 제공한다. 신호처리부 및 상관기는 FPGA 로직으로 구현하여 필터링 및 상관 값 계산을 수행하고, FPGA 내부 CPU를 사용하여 위성항법, 통합항법 S/W를 구현하였다. 제작된 모듈의 크기는 95.0 × 85.0 × 12.5 mm 이고, 무게는 110g을 확인하였으며, 동적성능 1200m/s, 가속도 10g의 환경에서 규격 이내의 항법정확도 성능을 확인하였다.

• 한국음향학회지
• /
• 제22권3호
• /
• pp.217-223
• /
• 2003

30 ㎑의 초음파 (ultrasonic wave)의 미세 진동에 의해서 유도된 음향유동 (acoustic streaming)에 의한 공기대류를 이용한 새로운 냉각방법을 소개한다. 초음파 진동은 압전소자 (piezoelectric device)에 의해서 얻어지며 50 m 정도의 진동진폭을 얻기 위해 기계적 진동 증폭자인 혼 (horn)을 추가하여 전체 진동 시스템이 공진하도록 구성된다. 음향유동에 의한 열전달 효과의 상승을 측정하기 위해 열원 (heat source) 및 열원 주위의 대기의 온도변화를 실시간으로 측정하였다. 초음파 진동 시작 후 시간지연 없이 음향유동이 유도되어 진동자 주위의 대량의 공기유동으로 인한 급격한 온도감소가 관찰되었다. 또한 열원과 진동자와의 거리가 방사 (radiation)되는 음파 (sound wave)의 반파장 (half wave length)의 정배수가 될 때 열원의 냉각효과가 극대화됨을 실험적으로 관찰하였다. 이는 음파의 공진현상에 기인한 것으로 이론적 고찰을 통한 검증 또한 수행되었다. 음향유동을 이용한 냉각법의 장점은 초음파 진동을 이용하기 때문에 무소음이며 이동 형태의 부품이 없기 때문에 반영구적으로 사용할 수 있다. 또한 기존의 전기모터를 이용한 냉각팬 (cooling fan)으로는 냉각이 어려운 초소형 기전시스템 (MEMS)의 냉각법으로 사용될 수 있는 첨단 냉각방법이다.

• 한국소음진동공학회논문집
• /
• 제14권6호
• /
• pp.528-535
• /
• 2004

Ultrasonic Vibrator is designed to achieve the maximum vibration amplitude at 30 kHz by in-cluding a horn (diameter, 40 mm), mechanical vibration amplifier at the top of the ultrasonic vibrator in the system and making the complete system resonate. In addition, it is experimentally visualized by particle imaging velocimetry (PIV) that the acoustic streaming velocity in the gap is at maximum when the gap between the ultrasonic vibrator and stationary plate agrees with the multiples of half-wavelength of the ultrasonic wave. This fact results from the resonance of the sound wave and the theoretical analysis of that is also accomplished and verified by experiment. It is observed that the magnitude of the acoustic streaming dependent upon the gap between the ultrasonic vibrator and stationary plate possibly changes due to the measurement of the average velocity fields of the acoustic streaming induced by the ultrasonic vibration at resonance and non-resonance. There exists extremely small average velocity at non-resonant gaps while the relatively large average velocity exists at resonant gaps compared with non-resonant gaps. It also reveals that there should be larger axial turbulent intensity at the hub region of the vibrator and at the edge of it in the resonant gap where the air streaming velocity is maximized and the flow phenomena is conspicuous than that at the other region. Because the variation of the acoustic streaming velocity at resonant gap is more distinctive than that at non-resonant gap, shear stress increases more in the resonant gap and is also maximized at the center region of the vibrator except the local position of center (r〓0). At the non-resonant gap there should be low values of vorticity distribution, but in contrast to the non-resonant gap, high and negative values of it exist at the center region of the vibrator with respect to the radial direction and in the vicinity of the middle region with respect to the axial direction. Acoustic streaming is noise-free due to the ultrasonic vibration and maintenance-free because of the absence of moving parts. Moreover, the proposed method by acoustic streaming can be utilized to the nano and micro-electro mechanical systems as a driving mechanism in addition to the augmentation of the streaming velocity.