• Journal of Sensor Science and Technology
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• v.22 no.2
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• pp.150-155
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• 2013

Recently, various hearing aids are developed to overcome hearing loss. There are available hearing aids, such as air conduction hearing aid, implantable middle ear hearing aid and so on. But air conduction hearing aid is inconvenience caused by howling, and ossicle chain driving type implantable middle ear hearing aid has some week point due to problem of possible nercobiosis of coupling spot along incus long process. In recent years, in order to improve these shortcomings round window (RW) driving hearing aid has been paying attention. In this paper, the physical cochlear model is proposed for a performance evaluation of the RW driving hearing aids of a transducer. In order to verify an experiment proposed on a performance of physical cochlear model, the transducer which has ossicles characteristics is used. By measuring and comparing the frequency characteristics of transducer with ossicles and human temporal bone, performance of physical cochlear model was verified. As from the result of experiment, it is expected that an implemented cochlear model is useful for evaluating characteristics of RW transducer.

• Smart Structures and Systems
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• v.6 no.3
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• pp.225-238
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• 2010

We report on the development of a new technology for the fabrication of Micro-Electro-Mechanical-System (MEMS) strain sensors to realize a novel type of crackmeter for health monitoring of ageing civil infrastructures. The fabrication of micromachined silicon MEMS sensors based on a Silicon On Insulator (SOI) technology, designed according to a Double Ended Tuning Fork (DETF) geometry is presented, using a novel process which includes a gap narrowing procedure suitable to fabricate sensors with low motional resistance. In order to employ these sensors for crack monitoring, techniques suited for bonding the MEMS sensors on a steel surface ensuring good strain transfer from steel to silicon and a packaging technique for the bonded sensors are proposed, conceived for realizing a low-power crackmeter for ageing infrastructure monitoring. Moreover, the design of a possible crackmeter geometry suited for detection of crack contraction and expansion with a resolution of $10{\mu}m$ and very low power consumption requirements (potentially suitable for wireless operation) is presented. In these sensors, the small crackmeter range for the first field use is related to long-term observation on existing cracks in underground tunnel test sections.

• Korean Journal of Materials Research
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• v.12 no.3
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• pp.211-214
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• 2002

Properties of 52/48 PZT films with various thicknesses for piezoelectric micro-electro mechanical systems (MEMS) devices fabricated by multi-coating method on $Pt(3500{\AA})/Ti(400{\AA})/SiO_2(3000{\AA})/Si$(525$\mu\textrm{m}$) substrates were investigated. PZT films were deposited by spin-coating process at 3500 rpm for 30 sec, followed by pyrolysis at 45$0^{\circ}C$ for 10 min producing the thickness of about 120nm. These processes were repeated 4, 8, 12, 16 and 20 times in order to have various thicknesses, respectively. Finally, they were crystallized at $650^{\circ}C$ for 30 min. All thick PZT films showed dense and homogeneous surface microstructures. Thick PZT films showed crystalline structures of random orientations with increasing thickness. Dielectric constants of thick PZT films were increased with increasing film thickness and reached 800 at 100kHz for 2.3$\mu\textrm{m}$ thick PZT film. $P_r\; and\; E_c$ of 2.3$\mu\textrm{m}$ thick PZT films were about 20$\mu$C/$\textrm{cm}^2$ and 63kV/cm. Depth profile analysis by Auger Electron Spectroscopy (AES) of 4800 $\AA$ thick PZT film showed the formation of the perovskite phase on Pt layer by Pb diffusion behavior. It was considered that Pb-Pt intermediate layer promoted PZT (111) columnar structures.

• Bulletin of the Korean Space Science Society
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• 2009.10a
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• pp.47.4-47.4
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• 2009

초소형전기기계시스템(MEMS: Micro-Electro-Mechanical Systems) 기술로 제작된 마이크로미러 어레이를 장착한 MEMS 우주망원경은 특유의 광시야각 감시, 목표 확인, 확대 및 고속 추적 기능을 가지며 고층대기에서의 초대형 방전현상과 같이 넓은 영역에서 드물게 임의로 일어나는 섬광현상을 관측하기에 최적이다. 러시아 과학위성 Tatiana-2의 주 탑재체로 선정된 극소형 MEMS 우주망원경 MTEL(MEMS Telescope for Extreme Lightning)은 광시야각 감시와 목표 확인을 위한 트리거망원경, 목표 확대와 고속추적을 위한 확대망원경 및 섬광현상의 분광측정을 위한 분광계로 구성되어 있다. 1년간의 개발 및 성능 검증 후 MTEL은 위성탑재를 위한 모든 우주인증 시험을 성공적으로 마쳤다. 현재 MTEL은 Tatiana-2 위성에 탑재되어 있으며, 9월 18일에 우주로 발사되어 1-3년간 800km 궤도를 비행하며 지구 대기에서 발생하는 섬광현상을 관측할 예정이다. 이 발표에서는 MTEL 탑재체의 설계, 제작, 성능 측정 및 calibration 결과를 보고하고, 위성탑재를 위한 진동 및 충격, 열, 진공 및 전자기파 적합성 등의 우주인증 시험 결과 또한 보고한다. 또한 발사 후 과학위성 및 MTEL의 이 발표 때까지의 우주에서의 상황을 보고한다.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.22 no.10
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• pp.1307-1313
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• 2018

In recent years, there have been frequent occurrences of collapsing buildings and tilting accidents due to frequent earthquakes and aging of buildings. Various methods have been proposed to prevent disasters on these buildings. In this paper, we propose a system that provides an indication of anomalous phenomena such as collapse and tilting of buildings by real-time monitoring of IoT(Internet of Things) based architectural anomalies. The MEMS sensor is based on the inclinometer sensor and the accelerometer sensor, transmits the detected data to the server in real time, accumulates the data, and provides the service to cope when the set threshold value is different. It is possible to evacuate and repair the collapse and tilting of the building by warning the occurrence of the upper threshold event such as the collapse and tilting of the building.

• Journal of Korean Association for Spatial Structures
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• v.19 no.2
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• pp.63-72
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• 2019

Wireless sensors are more favorable in measuring structural response compared to conventional sensors in terms of them being easier to use with no issues with cables and them being considerably cheaper. Previous tests have been conducted to analyze the performance of MEMS (Micro Electro Mechanical Systems) sensor in sinusoidal excitation tests. This paper analyzes the performance of in-built MEMS sensors in devices by comparing with an ICP sensor as the reference. Earthquake input amplitude excitation in shaking table tests was done. Results show that MEMS sensors are more accurate in measuring higher input amplitude measurements which range from 100gal to 250gal than at lower input amplitudes which range from 10gal to 50gal. This confirms the results obtained in previous sinusoidal tests. It was also seen that natural frequency results have lower error values which range from 0% to 3.92% in comparison to the response spectra results. This also confirms that in-built MEMS sensors in mobile devices are good at estimating natural frequency of structures. In addition, it was also seen that earthquake input amplitudes with more frequency contents (Gyeongju) had considerably higher error values than Pohang excitation tests which has less frequency contents.

• Journal of Korean Association for Spatial Structures
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• v.19 no.1
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• pp.117-126
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• 2019

Micro-Electro-Mechanical Systems (MEMS) sensors have been widely used in Structural Health Monitoring due to their convenience and lower costs in comparison to conventional sensors. Triggered measurements are relevant in events such as earthquakes because unlike continuous measurements, they only record the structural response once an event happens. This is more cost effective and it makes the data more manageable because only the required measurements from the event are recorded. The most common method of triggering is amplitude triggering. However, lower input amplitudes (less than 0.1g) cannot be triggered by using this method. In this paper, sound triggering was introduced to allow triggered measurements for lower input amplitude values. The performance of the sound triggering and amplitude triggering were compared by a series of shaking-table tests. It was seen that sound-triggering method has a wider frequency (0.5~10Hz) and amplitude (0.01~1.0g) range of measurements. In addition, the sound triggering method performs better than the amplitude triggering method at lower amplitudes. The performance of the amplitude triggering, in terms of the triggering being simultaneous improves at higher input amplitudes.

• Journal of Advanced Navigation Technology
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• v.25 no.1
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• pp.68-77
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• 2021

In this paper, a GPS/MEMS IMU integrated navigation receiver module capable of operating in a high dynamic environment is designed and fabricated, and the results is confirmed. The designed module is composed of RF receiver unit, inertial measurement unit, signal processing unit, correlator, and navigation S/W. The RF receiver performs the functions of low noise amplification, frequency conversion, filtering, and automatic gain control. The inertial measurement unit collects measurement data from a MEMS class IMU applied with a 3-axis gyroscope, accelerometer, and geomagnetic sensor. In addition, it provides an interface to transmit to the navigation S/W. The signal processing unit and the correlator is implemented with FPGA logic to perform filtering and corrrelation value calculation. Navigation S/W is implemented using the internal CPU of the FPGA. The size of the manufactured module is 95.0×85.0×.12.5mm, the weight is 110g, and the navigation accuracy performance within the specification is confirmed in an environment of 1200m/s and acceleration of 10g.

• The Journal of the Acoustical Society of Korea
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• v.22 no.3
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• pp.217-223
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• 2003

A novel cooling method induced by acoustic streaming generated by ultrasonic vibration at 30㎑ is presented. Ultrasonic vibration is obtained by piezoelectric devices and the maximum vibration amplitude of 50 m is achieved by including a horn, mechanical vibration amplifier in the system and making the complete system resonate. To investigate the enhancement of heat transfer capability of acoustic streaming, the temperature variations of heat source and air in the vicinity of heat source are measured in real-time. It is observed that acoustic streaming is instantly induced by ultrasonic vibration, resulting in the significant temperature drop due to the bulk air flow caused by acoustic streaming. In addition, it is observed that the cooling effect on the heat source is maximized when the gap between the ultrasonic vibrator and heat source coincides with the multiples of half-wavelength of the ultrasonic wave. This fact results from the resonance of the sound wave. The theoretical analysis of the dependence on the gap is also accomplished and verified by experiment. The advantage of the proposed cooling method by acoustic streaming is noise-free due to the ultrasonic vibration and maintenance-free because of the absence of moving parts. Moreover. This cooling method can be utilized to the nano and micro-electro mechanical systems, where the fan-based conventional cooling method can not be employed.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.6
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• pp.528-535
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• 2004

Ultrasonic Vibrator is designed to achieve the maximum vibration amplitude at 30 kHz by in-cluding a horn (diameter, 40 mm), mechanical vibration amplifier at the top of the ultrasonic vibrator in the system and making the complete system resonate. In addition, it is experimentally visualized by particle imaging velocimetry (PIV) that the acoustic streaming velocity in the gap is at maximum when the gap between the ultrasonic vibrator and stationary plate agrees with the multiples of half-wavelength of the ultrasonic wave. This fact results from the resonance of the sound wave and the theoretical analysis of that is also accomplished and verified by experiment. It is observed that the magnitude of the acoustic streaming dependent upon the gap between the ultrasonic vibrator and stationary plate possibly changes due to the measurement of the average velocity fields of the acoustic streaming induced by the ultrasonic vibration at resonance and non-resonance. There exists extremely small average velocity at non-resonant gaps while the relatively large average velocity exists at resonant gaps compared with non-resonant gaps. It also reveals that there should be larger axial turbulent intensity at the hub region of the vibrator and at the edge of it in the resonant gap where the air streaming velocity is maximized and the flow phenomena is conspicuous than that at the other region. Because the variation of the acoustic streaming velocity at resonant gap is more distinctive than that at non-resonant gap, shear stress increases more in the resonant gap and is also maximized at the center region of the vibrator except the local position of center (r〓0). At the non-resonant gap there should be low values of vorticity distribution, but in contrast to the non-resonant gap, high and negative values of it exist at the center region of the vibrator with respect to the radial direction and in the vicinity of the middle region with respect to the axial direction. Acoustic streaming is noise-free due to the ultrasonic vibration and maintenance-free because of the absence of moving parts. Moreover, the proposed method by acoustic streaming can be utilized to the nano and micro-electro mechanical systems as a driving mechanism in addition to the augmentation of the streaming velocity.