• Journal of the Korea institute for structural maintenance and inspection
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• v.18 no.1
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• pp.160-165
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• 2014

In this study, an efficiency test was performed by fabricating MEMS (Micro Electro Mechanical Systems) based 3-axis acceleration sensor modules and an earthquake monitoring system was composed. Data acquisition device (NI-9239) with a 24bit ADC (Analog to Digital Converter) was used for improving the performance of 3-axis acceleration sensor modules and filtered data (100Hz Low Pass Filter) was used for reducing noises. Also this paper focused on detecting meaningful vibration in the building by developing the earthquake monitoring software. If vector sum of 3-axis acceleration is greater than the preset value, the value will be recorded and saved to the file.

• International Journal of Aeronautical and Space Sciences
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• v.11 no.3
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• pp.234-239
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• 2010

The utilization of micro-electro-mechanical system (MEMS) gyros and accelerometers in low-level inertial measurement unit (IMU) influences cost effectiveness in a positive way under the condition that device error characteristics are fully calibrated. The conventional calibration process utilizes a rate table; however, this paper proposes a new method for achieving reference calibration data from the natural motion of pendulum to which the IMU undergoing calibration is attached. This concept was validated with experimental data. The pendulum angle measurements correlate extremely well with the solutions acquired from the pendulum equation of motion. The calibration data were computed using the regression method. The whole process was validated by comparing the measurement from the 6 sensor components with the measurements reconstructed using the identified calibration data.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.12 s.105
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• pp.1355-1360
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• 2005

Periodic structures can be applied as a MEMS(micro-electro-mechanical system) sensor or actuator due to low energy loss and wideband frequency response. The dynamic behavior of a mistuned periodic structure Is dramatically changed from that of a perfectly tuned periodic structure. The effects of mistuning, coupling stiffness, and driving point on the forced vibration responses of a simple periodic structure ate investigate4 through numerical simulations. On the basis of that, one can design effective and reliable MEMS components using periodic structures.

• Journal of Sensor Science and Technology
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• v.21 no.2
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• pp.114-120
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• 2012

This paper describes the design, fabrication and testing of a micromachined resonant accelerometer consisting of a symmetrical pair of proof masses and double-ended tuning fork(DETF) oscillators. Under the external acceleration along the input axis, the proof mass applies forces to the oscillators, which causes a change in their resonant frequency. This frequency change is measured to indicate the applied acceleration. Pivot anchor and leverage mechanisms are adopted in the accelerometer to generate larger force from a proof mass under certain acceleration, which enables increasing its scale factor. Finite element method analyses have been conducted to design the accelerometer and a silicon on insulator(SOI) wafer with a substrate glass wafer was used for fabricating it. The fabricated accelerometer has a scale factor of 188 Hz/g, which is shown to be in agreement with analysis results.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.2
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• pp.89-92
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• 2010

A bolometer sensor used in an infrared thermal imaging system has many advantages on the process because it does not need a separate cooling system and its manufacturing is easy. However the sensitivity of the bolometer is low and the fixed pattern noise(FPN) is large, because the bolometer sensor is made by micro electro mechanical systems (MEMS). These problems can be fixed-by using the high performance readout integrated circuit(ROIC) with noise reduction techniques. In this paper, we propose differential delta sampling circuit to remove the mismatch noise of ROIC itself, the FPN of the bolometer. And for reduction of FPN noise, the reference signal compensation circuit which compensate the reference signal by using on-resistance of MOS transistor was proposed.

• Journal of Sensor Science and Technology
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• v.9 no.3
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• pp.177-181
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• 2000

The tunneling current is exponentially dependent on the separation gap between a pair of conductors. The detection of displacement can be, therefore, carried out by measurment of a variation in the tunneling current. In this experiment, we fabricated pyramid-type silicon tunneling devices in which a tunneling current flow between a micro-tip and $Si_3N_4$ thin film membrane. A MEMS process was used for the fabrication of the tunneling devices. The micro-tips were formed on Si wafers by undercutting a differently oriented square of $SiO_2$ with KOH. The stiffness of the $Si_3N_4$ films were observed and the model for the stiffness calculation, which is useful in predicting the stiffness even when the stiffness ranges beyond the scope of the normal experimental condition, was suggested.

• Journal of Advanced Navigation Technology
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• v.23 no.3
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• pp.228-236
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• 2019

Recently, multi-sensor integration techniques have been actively studied to obtain reliable and accurate navigation solution in GPS (Global Positioning System)-denied harsh environments such as urban canyons, tunnels, and underground roads. In this paper, we propose a low-cost ultrasonic-speedometer utilizing the characteristics of the ultrasonic propagation. An efficient integrated INS (inertial navigation system)/ultrasonic-speedometer navigation system is also proposed to improve the accuracy of positioning in GPS-denied environments. To evaluate the proposed system, car experiments with field-collected measurements were performed. By the experiment results, it was confirmed that the proposed INS/ultrasonic-speedometer system bounds the positioning error growth effectively even though GPS signal is blocked more than 10 seconds and a low-cost MEMS IMU (micro electro mechanical systems inertial measurement unit) is utilized.

• Journal of Electrical Engineering and Technology
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• v.9 no.3
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• pp.950-956
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• 2014

Special purpose sensor design using MEMS (Micro-Electro-Mechanical Systems) technique is commonly used in Nondestructive Testing (NDT) research for the evaluation of existing structures and for the safety control and requirements. Various sensors and network have been developed for general infrastructures as well as safety-critical applications, e.g., aerospace, defense, and nuclear system, etc. In this paper, one of sensor technique using Fiber Bragg Gratings (FBG) and Finite Element Method (FEM) evaluation is discussed. The experimental setup and data collection technique is also demonstrated. The factors influencing test result and the advantages/limitations of this technique are also reviewed using various methods.

• Korean Journal of Metals and Materials
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• v.48 no.2
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• pp.169-174
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• 2010

A micro gas sensor for formaldehyde (HCHO) gas was fabricated by using MEMS (Micro Electro Mechanical System) technology and the sol-gel process. The sensing materials of the $SnO_2$-ZnO system were synthesized by the sol-gel method. The crystal structure and thermal analysis of the $SnO_{2}$-ZnO were characterized by XRD and DSC-TGA. The fabricated gas sensors were tested at various gas concentrations (0.5~5.0 ppm) and different operation temperatures ($350{\sim}550^{\circ}C$). The $SnO_2$-10 mol%ZnO sensor showed the highest sensitivity ($R_s=0.24$) for 1.0 ppm-formaldehyde at $500^{\circ}C$ and response time (90% saturation time) was within 20 seconds.

• Journal of Positioning, Navigation, and Timing
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• v.4 no.3
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• pp.141-150
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• 2015

In this study, a Global Navigation Satellite System (GNSS) / Inertial Navigation System (INS) / odometer / barometer integrated navigation system that uses a commercial navigation device including Micro Electro Mechanical Systems (MEMS) accelerometer and gyroscope in addition to GNSS, odometer information obtained from a vehicle, and a separate MEMS barometer sensor was implemented, and the performance was verified. In the case of GNSS and GNSS/INS integrated navigation system that are generally used in a navigation device, the performance would deteriorate in areas where GNSS signals are not available. Therefore, an integrated navigation system that calculates a better navigation solution in areas where GNSS signals are not available compared to general GNSS/INS by correcting the velocity error of GNSS/INS using an odometer and by correcting the cumulative altitude error of GNSS/INS using a barometer was suggested. To verify the performance of the navigation system, a commercial navigation device (Softman, Hyundai Mnsoft, http://www.hyundai-mnsoft.com) and a barometer sensor (ST Company) were installed at a vehicle, and an actual driving test was performed. To examine the performance of the algorithm, the navigation solutions of general GNSS/INS and the GNSS/INS/odometer/barometer integrated navigation system were compared in an area where GNSS signals are not available. As a result, a navigation solution that has a smaller position error than that of GNSS/INS could be obtained in the area where GNSS signals are not available.