• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.2380-2382
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• 2005

UV-LIGA 공정을 이용하여 3차원 마이크로 인덕터 제작 기술에 관하여 연구하였다. 마이크로 인덕터의 코일, 비아(via), 코어(core)의 Multi-layer 제작을 위해 UV-LIGA 공정을 이용하였으며, 전해도금(electro plating)을 위한 씨올기(seed layer)로서는 e-beam evaporator를 이용하여 금속을 증착하였다. 3차원 마이크로 인덕터의 도금 방법으로는 전해도금을 사용하였으며, 코일과 비아 부분은 구리(Cu) 전해도금, 코어 부분은 니켈(Ni)과 철(Fe)의 합금인 퍼멀로이(Ni/Fe) 전해도금을 하였다. 3차원 마이크로 인덕터의 샘플크기로는 코어의 폭은 $300{\mu}m$, 전체 길이는 9.2mm, 두께는 $20{\mu}m$의 구조로 제작되었으며, 코일 부분은 폭이 $40{\mu}m$, 두께는 $30{\mu}m$이며, 코일턴 수는 70회의 구조로 제작하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.303-303
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• 2007

Photo-imageable thick-film lithography technology was developed for the fabrication of embedded passives such as inductors and capacitors. In this study, photo-imageable dielectric and conductor pastes have apoted a negative type. Sodalime glass wafer, alumina substrate and zero-shrinkage LTCC green tapes were used as substrates. In result, The lithographic patterns were designed as lines and spaces for conductor material, or via-holes for ceramic, LTCC, materials. The scattering and reflection of UV-beam on the substrate had negative effects on fine patterning. The patterning performance was varied with the exposing and developing process conditions, and also varied with the substrate materials. Fine resolution of less then $50/50{\mu}m$ in line and space was obtained, which is difficult in screen printing method.

• Multiscale and Multiphysics Mechanics
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• v.1 no.1
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• pp.15-33
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• 2016

In this paper, an asymptotic method is employed to formulate nano- or micro-beams based on strain gradient elasticity. Although a basic theory for the strain gradient elasticity has been well established in literature, a systematic approach is relatively rare because of its complexity and ambiguity of higher-order elasticity coefficients. In order to systematically identify the strain gradient effect, an asymptotic approach is adopted by introducing the small parameter which represents the beam geometric slenderness and/or the internal atomistic characteristic. The approach allows us to systematically split the two-dimensional strain gradient elasticity into the microscopic one-dimensional through-the-thickness analysis and the macroscopic one-dimensional beam analysis. The first-order beam problem turns out to be different from the classical elasticity in terms of the bending stiffness, which comes from the through-the-thickness strain gradient effect. This subsequently affects the second-order transverse shear stress in which the surface shear stress exists. It is demonstrated that a careful derivation of a first strain gradient elasticity embraces "Gurtin-Murdoch traction" as the surface effect of a one-dimensional Euler-Bernoulli-like beam model.

• Structural Engineering and Mechanics
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• v.69 no.5
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• pp.487-497
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• 2019

Rapid advances in the engineering applications can bring further areas to provide the opportunity to manipulate anisotropic structures for direct productivity in design of micro/nano-structures. For the first time, magnetic affected wave characteristics of nanosize plates made of anisotropic material is investigated via the three-dimensional bi-Helmholtz nonlocal strain gradient theory. Three small scale parameters are used to predict the size-dependent behavior of the nanoplates more accurately. After owing governing equations of wave motion, an analytical approach based harmonic series is utilized to fine the wave frequency as well as phase velocity. It is observed that the small scale parameters, magnetic field and wave number have considerable influence on the wave characteristics of anisotropic nanoplates. Due to the lack of any study on the mechanics of three-dimensional bi-Helmholtz gradient plates made of anisotropic materials, it is hoped that the present exact model may be used as a benchmark for future works of such nanostructures.

• Current Applied Physics
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• v.18 no.11
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• pp.1261-1267
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• 2018

In this paper, an off-axis digital holographic microscopy compensated with self-hologram rotation is presented. The process is implemented via subtracting the unwrapped phase maps of the off-axis parabolic hologram and its rotation $180^{\circ}$ to eliminate the tilt induced by the angle between the spherical object wave O and the plane reference wave R. Merit of the proposed method is that it can be done without prior knowledge of physical parameters and hence can reconstruct a parabolic hologram of $1024{\times}768$ pixels within tens of milliseconds since it doesn't require a digital reference wave. The method is applied to characterize rough gold bumps and the obtained results were compared with those extracted from the conventional reconstruction method. The comparison showed that the proposed method can characterize rough surfaces with excellent contrast and in realtime. Merit of the proposed method is that it can be used for monitoring smaller biological cells and micro-fluidic devices.

• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.87-91
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• 2021

Various Cu ions are discharged into water from various industries, which results in a severe trouble for groundwater, soil, air, and eventually animals and humans. In this work, graphene oxide (GO) is introduced as a Cu removal absorber and the real-time monitoring method is demonstrated. The results show that GO is a very effective material to absorb Cu ions in the solution. In addition, the residual Cu ions in the solution is monitored via optical transmittance method, which well match with Inductively Coupled Plasma Mass Spectrometer (ICP-MS) analysis.

• Journal of Sensor Science and Technology
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• v.31 no.4
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• pp.244-248
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• 2022

Recently, several studies on the development of superhydrophobic surfaces using various nano-sized carbon-based materials have been conducted. The superhydrophobic surfaces developed using carbon soot have advantages such as low processing cost and remarkable physical and chemical properties. However, their durability is low. To address this problem, in this study, a superhydrophobic surface with high durability and a multilayer structure was fabricated using ethanol vapor treatment. Candle soot was deposited on an aluminum substrate coated with paraffin wax, and a micro-nano multilayer structure with a size of several micrometers was fabricated via ethanol vapor treatment. The fabricated superhydrophobic surface was confirmed to have a contact angle of at least 156° and high durability. Finally, it was confirmed that ethanol vapor not only changed the nanostructure of carbon but also affected the durability of the structure.

• Journal of the Korean Society for Precision Engineering
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• v.11 no.5
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• pp.189-198
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• 1994

The achievable machining accuracy depends upon the level of the micro-engineering, and the today's accuracy targets are dimensional tolerances in the order of 10nm and surface roughness in the order of 1nm. Such requirements cannot be satisfied by the conventional machining processes. Single point diamond turning is the one of new techniques which can produce the parts with such accuracy limits. The aims of this thesis are to get a better understanding of the complex cutting process with a diamond tool and, consequently, to develope a predicting model of a turned surface profile. In order to predict the turned surface profile, a numerical model has been developed. By means of this model, the influence of the operational settings-the material properties of the workpiece, the geometry of the cutting tool and the dynamic behaviour of the lathe-and their influences via the cutting forces upon the surface roughness have been estimated.

• Advances in nano research
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• v.16 no.2
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• pp.175-186
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• 2024

Dynamical behaviors of one-dimensional (1D) nano-sized structures are of great importance in nanotechnology applications. Therefore, the torsional dynamic response of functionally graded nanorods which could be used to model the nano electromechanical systems or micro electromechanical systems with torsional motion about the center of twist is examined based on the theory of strain gradient nonlocal elasticity in this work. The mathematical background is constructed based on both strain gradient theory and Eringen's nonlocal elasticity theory. The equation of motions and boundary conditions of radially functionally graded nanorods are derived using Hamilton's principle and then transformed into the eigenvalue analysis by using Fourier sine series. A general coefficient matrix is obtained to assemble the Stokes' transformation. The case of a restrained functionally graded nanorod embedded in two elastic springs against torsional rotation is then deeply investigated. The effect of changing the functionally graded index, the stiffness of elastic boundary conditions, the length scale parameter and nonlocal parameter are investigated in detail.

• Journal of Korean Port Research
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• v.11 no.1
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• pp.85-99
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• 1997

The improvements of berth productivity is closely related to berth/port systems and its relationship extends to the overall pattern of port development/logistics, transport and trade. Since ports in general and berths in specific function as a bridge transferring seaborne cargoes from seaside to landside and vice versa, berth productivity improvements should be considered in terms of the total system in which the cargoes are transported from origin to destination via berths/ports. In that respect, the objective of this study is to improve berth productivity which is a vital factor in the strategic planning in port development and operation and logistics. According to a literature survey on the subject, the contents of the studies have been limited to either a macro-perspective or a micro-perspective which is only a partial solution to the problem. Hence, this limitation requires an integrated approach to find and ultimate solution, which should be considered not separately, but as a whole. The contents and scope of this study cover the improvements of berth productivity in conjunction with strategic planning in port development. efficient operation and logistics from two different viewpoints, macro- and micro-perspective. After that, a combination of these two perspectives is applied to the integrated approach due to lacking a comprehensive perspective from either macro-approach or micro-approach. In reality, a port itself is a complex and dynamic organization. Therefore, a comprehensive insight needs an integrated approach for the long-term national economic development. In this approach, the utmost importance is how to find the bottlenecks and to solve the problems effectively from the beginning stage in port development. In conclusion, derived from the macro- and micro-perspective. the attempt to establish an integrated approach is the merit of this study, which is required as a comprehensive measure since none of the two can be a solution independently. In terms of reinforcing this study, it needs further empirical research due to the restriction of the theoretical method of this paper. Consequently, the reinforced research will be able to enhance the integrated approach on the basis of the conceptual perspective.