• Proceedings of the Korean Magnestics Society Conference
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• 2008.12a
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• pp.146.1-146.1
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• 2008

• Proceedings of the KIEE Conference
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• 1993.11a
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• pp.210-212
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• 1993

In this paper, a silicon microvalve has been fabricated using micromachining technology. The valve consists of the several thin silicon diaphragms which are designed to open and close depending on the pressure difference. It is supposed to pass fluids in only one direction. The thin diaphragms are fabricated by boron etch stop using an anisotropic etchant, EPW. The fabricated valve has been tested for various pneumatic pressure. According to the experimental results, the slit width of the valve increases as the pneumatic pressure increases.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.74.6-74
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• 2002

$\textbullet$ A new implant capable of controlling IOP actively and coping with personal difference among patients $\textbullet$ The valve actuator of the active implant is proposed and fabricated. $\textbullet$ In vitro experiments are carried out extensively with and without a rabbit. $\textbullet$ The experiments are conducted by using the open and closed loop pressure control. $\textbullet$ The experiment with the rabbit is similar as a in vivo experiment, $\textbullet$ since the compliance and the aqueous humor of the rabbit's eye are included. $\textbullet$ The experimental results verify the possibility of the valve actuator for a glaucoma implant.

• Transactions of the Korean Society of Automotive Engineers
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• v.22 no.4
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• pp.160-164
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• 2014

Recently, there has been an active study about friction force of moving parts for automotive. This study is development and evaluation of oil pockets for journal bearing and tappet valve for range extended electric vehicle. Specially, oil pockets are effect on friction force depend on pitch, size, depth. In this study, fine oil pocket was formed using by etched texturing on the journal bearing and tappet valve. And oil pocket analyzed by SEM and friction force test was carried out by tensile tester. Finally, in this study, it was suggested by round and plane part which journal besring and tappet valve.

• Journal of Sensor Science and Technology
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• v.15 no.1
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• pp.47-52
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• 2006

This paper describes the design, fabrication and characteristics of a buckling microvalve using a MCA (multilayer ceramic actuator). The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. The flow rate of the fabricated MCA valve was 0-8.13 ml/min at the applied pressure of 0-50 kPa. Maximum non-linearity was 2.24 % FS at a duty cycle of 50 %. The maximum pressure was 230 kPa and the leak rate was $3.03{\times}10^{-8}\;Pa{\cdot}m^{3}/cm^{2}$ at a supply voltage of 100 V.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.1023-1025
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• 1998

This paper presents the fabrication of a micro pump consisting of a pair of Al f1ap wave and a phase change actuator. The phase change actuator is composed of a heater, a silicone rubber diaphragm and a working liquid chamber. The diaphragm is actuated by the evaporation and the condensation of the working liquid. The actuator pumps fluid through the valves. The micro pump is fabricated by the anisotropic etch, the boron deposition and the metal evaporation. The forward and the backward flow characteristics of the f1ap valves were obtained. Also, the flow rate of the micro pump has been measured. When the square wave input of 12 V, 60% duty ratio and 0.2 Hz is applied, the average flow rate is $0.15{\mu}{\ell}/sec$ for zero pressure difference.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.198-204
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• 2007

This study was carried out to develope a flow control system using to supply PR(photo-resist) in the semi-conductor manufacturing process. The features of this system are to be able to measure the high viscosity and micro-flow. To meet above study object some ideas was induced to design a new concept valve with new material, multi-cross wheel, and new sealing method etc.. As the evaluations on the developed micro-flowmeter it was enough satisfied to use at the IT industries such as photo-resist process.

• Journal of Biomedical Engineering Research
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• v.33 no.4
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• pp.202-206
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• 2012

In this study, we developed transdermal direct drug delivery device using micro-needle painlessly. We has fabricated micro-needle that is 130 ${\mu}m$ thickness and 250 ${\mu}m$length with 10 ${\mu}m$ spiral groove for rolling down drug. Head part of micro-needle device is composed of 20ea micro-needles, an on-off valve and a protective cap. Glass bottle for containing drug is connected to head part of micro-needle device. We examined the puncture characteristic testing using porcine skin and drug delivery testing using porcine, rat skin with Indian Ink.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.737-738
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• 2013

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.159-159
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• 2009

Existence of physical moving parts (ex. check valve) produces several problems (mechanical abrasion, deterioration of reliability, limited temperature performances etc.) in driving pumps. To overcome such problems, we proposed a valveless piezoelectric micro-pump which has new type volume transferring mechanism. The proposed micro-pump has a double faced disk type vibrator that can generate peristaltic motion formed by traveling wave in each surface of a disk. This type of micro-pump is able to apply to a fluid supply system that provides two different kinds of fluid simultaneously. In this paper, we propose a simple and novel design of piezoelectric micro-pump that is peristaltically by piezoelectric actuators and allows the removal of the need for valves of other physically moving parts. The finite elements analysis on the proposed pump model was carried out to verify its operation principle using the commercial analysis software.